专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US3643671A Apparatus for treating elements of circular outline 失效
标题翻译：用于处理通用元素的装置
公开(公告)号：US3643671A
公开(公告)日：1972-02-22
申请号：US3643671D
申请日：1970-06-19
申请人： BOSCH GMBH ROBERT
发明人： HENNINGES KARIN , SCHULZE BERND
IPC分类号： B24B31/027 , C23F1/00 , C23F1/08 , H01L21/00 , B08B3/08 , B08B11/02
CPC分类号： C23F1/00 , B24B31/027 , C23F1/08 , H01L21/00
摘要： An apparatus for treating elements of circular outline. A vessel is provided with guide grooves which are either straight and parallel to one another or are torus shaped and concentric with one another. The vessel is mounted for tilting movement about a ball-and-socket joint and accommodates a bath of etching fluid. Disc-shaped elements to be treated are supported on edge in the respective guide grooves. A motor is mounted below the vessel and its output shaft drives a can follower having at least one ascending and at least one descending surface portion, and in the case of straight parallel guide grooves two rod-shaped follower members are mounted for sliding movement in axial direction of the motor shaft with their lower ends resting on the can disc surface and their upper ends engaging the bottom wall of the vessel so that, when they are shifted in axial direction of the motor output shaft, the vessel is tilted alternately to one side and the opposite side about the ball-and-socket joint. If the guide grooves are torus shaped, then three such follower members are used which are circumferentially spaced about the axis at equiangular locations.

2. 发明授权

US3607478A Method of treating semiconductor elements of circular outline 失效
标题翻译：处理圆形圆形半导体元件的方法
公开(公告)号：US3607478A
公开(公告)日：1971-09-21
申请号：US3607478D
申请日：1968-12-05
申请人： BOSCH GMBH ROBERT
发明人： HENNINGES KARIN , SCHULZE BERND
IPC分类号： B24B31/027 , C23F1/00 , C23F1/08 , H01L21/00 , H01L7/00 , B08B3/10
CPC分类号： C23F1/00 , B24B31/027 , C23F1/08 , H01L21/00
摘要： A method of and apparatus for treating elements of circular outline. A vessel is provided with guide grooves which are either straight and parallel to one another or are torus-shaped and concentric with one another. The vessel is mounted for tilting movement about a ball and socket joint and accommodates a bath of etching fluid. Disc-shaped elements to be treated are supported on edge in the respective guide grooves. A motor is mounted below the vessel and its output shaft drives a cam follower having at least one ascending and at least one descending surface portion, and in the case of straight parallel guide grooves two rod-shaped follower members are mounted for sliding movement in axial direction of the motor shaft with their ends resting on the cam disc surface and their upper ends engaging the bottom wall of the vessel so that, when they are shifted in axial direction of the motor output shaft, the vessel is tilted alternately to one side and the opposite side about the ball and socket joint. If the guide grooves are torus-shaped, then three such follower members are used which are circumferentially spaced about the axis at equiangular locations.
摘要翻译：一种用于处理圆形轮廓元件的装置。容器设置有彼此直线且平行的导槽，或者是圆环形并且彼此同心的导槽。该容器被安装成围绕一个球窝接头倾斜运动并容纳蚀刻液浴。待处理的圆盘形元件被支撑在相应导向槽中的边缘上。电动机安装在容器下方，其输出轴驱动具有至少一个上升和至少一个下降表面部分的罐随动件，并且在直线平行导向槽的情况下，安装两个杆状随动件用于轴向滑动电动机轴的方向，其下端搁置在罐盘表面上，并且其上端接合容器的底壁，使得当它们沿电动机输出轴的轴向移动时，容器交替地倾斜到一侧以及围绕球窝接头的相对侧。如果导向槽是圆环形的，则使用三个这样的从动构件，其在等角位置周围围绕轴线间隔开。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式