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    • 2. 发明申请
    • VACUUM APPARATUS
    • 真空装置
    • US20150332896A1
    • 2015-11-19
    • US14526423
    • 2014-10-28
    • BOE TECHNOLOGY GROUP CO., LTD.BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
    • Haitao YangYunyou ZhengChenglong WuWei LiYoungjin SongXin LiLin FengJie Liu
    • H01J37/32
    • H01J37/32697H01J37/32009H01J37/32532H01J2237/0041
    • An embodiment of the present disclosure provides a vacuum apparatus, which relates to a display technical field. The vacuum apparatus can eliminate an electrostatic adsorption between a substrate and an electrode so as to avoid damages to the substrate. The vacuum apparatus includes: a vacuum cavity; a first electrode and a second electrode located inside the vacuum cavity and opposite to each other; and positioning structures for positioning the substrate. The substrate is located between the first electrode and the second electrode and is positioned closer to the first electrode or the second electrode. The vacuum apparatus further includes an electrostatic elimination device. The electrostatic elimination device can eliminate the electrostatic adsorption between the substrate and the first electrode and/or between the substrate and the second electrode by attracting charged particles to the surface of the substrate closer to a side of the first electrode and/or the surface of the substrate closer to a side of the second electrode. The present disclosure also relates to manufacture method of the vacuum apparatus.
    • 本公开的实施例提供了一种与显示技术领域有关的真空装置。 真空装置可以消除基板和电极之间的静电吸附,以避免损坏基板。 真空装置包括:真空腔; 位于真空腔内并彼此相对的第一电极和第二电极; 以及用于定位基板的定位结构。 衬底位于第一电极和第二电极之间并且被定位成更靠近第一电极或第二电极。 真空装置还包括静电消除装置。 静电消除装置可以通过将带电粒子吸引到靠近第一电极和/或第二电极的表面的衬底的表面来消除衬底与第一电极之间和/或衬底和第二电极之间的静电吸附 所述衬底更靠近所述第二电极的一侧。 本公开还涉及真空装置的制造方法。