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1. 发明授权

US5767027A Aluminum nitride sintered body and its production method 失效
标题翻译：氮化铝烧结体及其制造方法
公开(公告)号：US5767027A
公开(公告)日：1998-06-16
申请号：US669492
申请日：1996-07-11
申请人： Atsushi Sakon , Ryusuke Ushikoshi , Koichi Umemoto , Hiromichi Kobayashi
发明人： Atsushi Sakon , Ryusuke Ushikoshi , Koichi Umemoto , Hiromichi Kobayashi
IPC分类号： C04B35/581
CPC分类号： C04B35/581
摘要： An aluminum nitride sintered body is provided comprising metal elements contained in an amount of not more than 100 ppm for each metal element except for aluminum and assuming black color of a lightness of not more than N 4 according to the definition of JIS Z 8721. The aluminum nitride sintered body has preferably a relative density of at least 99.3% and crystal grains constituting the sintered body have an average particle diameter of at least 0.6 .mu.m but not more than 4.0 .mu.m. A powder of aluminum nitride obtained by reduction nitriding method is sintered at a temperature of at least 1,800.degree. C. under a pressure of at least 120 kg/cm.sup.2. Sintering temperature is preferably not more than 2,000.degree. C. and the sintering is preferably effected for at least 2 hrs but not more than 5 hrs.
摘要翻译： PCT No.PCT / JP95 / 00141 Sec。 371日期：1996年7月11日 102（e）日期1996年7月11日PCT提交1995年2月3日PCT公布。公开号WO95 / 21139 日期1995年8月10日提供了一种氮化铝烧结体，其包括除了铝之外的每个金属元素含有不超过100ppm的金属元素，并且假定根据以下定义的亮度不大于N 4的黑色 JIS Z 8721。氮化铝烧结体的相对密度优选为99.3％以上，构成烧结体的晶粒的平均粒径为0.6μm以上且4.0μm以下。通过还原氮化方法获得的氮化铝粉末在至少1800℃的温度下在至少120kg / cm 2的压力下烧结。烧结温度优选不超过2000℃，并且烧结优选进行至少2小时但不超过5小时。

2. 发明授权

US5683606A Ceramic heaters and heating devices using such ceramic heaters 失效
标题翻译：陶瓷加热器和使用这种陶瓷加热器的加热装置
公开(公告)号：US5683606A
公开(公告)日：1997-11-04
申请号：US359742
申请日：1994-12-20
申请人： Ryusuke Ushikoshi , Atsushi Sakon , Koichi Umemoto , Yusuke Niiori
发明人： Ryusuke Ushikoshi , Atsushi Sakon , Koichi Umemoto , Yusuke Niiori
IPC分类号： H05B3/20 , C23C16/46 , H05B3/14 , H05B3/18 , H05B3/44 , F27D11/00
CPC分类号： C23C16/46 , H05B3/141
摘要： A ceramic heater includes a substrate made of aluminum nitride, a resistive heating element buried in the substrate and made of a metal having a high melting point, and terminals electrically connected to the resistive heating element and buried in said substrate. The terminals are made of a metal having a high melting point and a coefficient of thermal expansion not smaller than that of the substrate. The metal of the resistive heating element has a coefficient of thermal expansion not smaller than that of the substrate. The coefficient of thermal expansion of each of the terminals and the resistive heating element is in a range from 5.0.times.10.sup.-6 /.degree.C. to 8.3.times.10.sup.-6 /.degree.C.
摘要翻译：陶瓷加热器包括由氮化铝制成的基板，埋在基板中的由具有高熔点的金属制成的电阻加热元件，以及电连接到电阻加热元件并埋入所述基板中的端子。端子由具有高熔点和不小于基板的热膨胀系数的金属制成。电阻加热元件的金属的热膨胀系数不小于基板的热膨胀系数。端子和电阻加热元件的热膨胀系数在5.0×10 -6 /℃至8.3×10 -6 /℃的范围内。

3. 发明授权

US5616024A Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles 失效
公开(公告)号：US5616024A
公开(公告)日：1997-04-01
申请号：US380190
申请日：1995-01-27
申请人： Kazuhiro Nobori , Ryusuke Ushikoshi , Koichi Umemoto , Atsushi Sakon , Yusuke Niiori , Masahiro Murasato
发明人： Kazuhiro Nobori , Ryusuke Ushikoshi , Koichi Umemoto , Atsushi Sakon , Yusuke Niiori , Masahiro Murasato
IPC分类号： H05B3/20 , B21F99/00 , C23C16/46 , C30B25/10 , C30B31/12 , F27D1/16 , F27D99/00 , H05B3/14 , F27D3/12
CPC分类号： F27D99/0006 , C23C16/46 , C30B25/10 , C30B31/12 , F27D1/16 , H05B3/143 , F27D2099/0008
摘要： A ceramic heater composed of a ceramic substrate and a resistant heating element embedded within the ceramic substrate along a predetermined planar pattern is obtained by holding a convolution of a spiral-coiled high melting metallic filament in the above predetermined planar pattern and heat-treating the convolution at a temperature not higher than a primary recrystallization commencement temperature of the high melting metal under a non-oxidative atmosphere to provide the resistant heating element, embedding the resulting resistant heating element within a ceramic shaped body, and then, sintering the ceramic shaped body. In a preferred embodiment, the resistant heating element is a convolution of a spiral coil, the number of coils per a unit length of said convolution is set at a predetermined value in each of defined domains of the ceramic heater, and when the number of coils per a unit length of the convolution is determined, the relation of the maximal value, the minimal value and the mean value, of all the determined numbers of coils in the above domains, satisfies the formula:(maximal value-minimal value)/mean value.ltoreq.0.1.Another preferred embodiment comprising a disc-shaped ceramic substrate and a resistant heating element embedded within the substrate is adapted for application in semiconductor wafer heating, wherein a resistant heating element having a planar shape composed of a plurality of concentric loops differing in diameters from each other and connecting portions which connect inner loops in sequence with outer loops to form a series of resistant heating element. In a process for manufacturing ceramic articles composed of a ceramic substrate, an electroconducting body embedded within the ceramic substrate and a conduit or pit bored avoiding the above electroconducting body in the ceramic substrate, an X-ray transmission photograph of the ceramic substrate is taken and then the conduit or pit is formed based on the X-ray transmission photograph.

4. 发明授权

US07169724B2 Alumina sintered body and method for producing the same 有权
标题翻译：氧化铝烧结体及其制造方法
公开(公告)号：US07169724B2
公开(公告)日：2007-01-30
申请号：US10997277
申请日：2004-11-24
申请人： Atsushi Sakon , Toshihiko Suzuki
发明人： Atsushi Sakon , Toshihiko Suzuki
IPC分类号： C04B35/10 , C04B38/00
CPC分类号： C04B35/111 , B82Y30/00 , C04B35/117 , C04B35/6303 , C04B35/6316 , C04B38/0038 , C04B2111/00267 , C04B2235/3206 , C04B2235/3208 , C04B2235/3217 , C04B2235/3218 , C04B2235/322 , C04B2235/3418 , C04B2235/528 , C04B2235/5445 , C04B2235/5454 , C04B2235/5472 , C04B2235/77 , C04B35/10 , C04B38/0054 , C04B38/0074
摘要： An alumina sintered body having communicating pores of 400–1100 Å in average pore diameter and 4–16% in porosity and being obtainable by mixing first alumina particles 1 having a particle diameter of 0.2–0.7 μm and a sphericity of 0.7–1.0 as an aggregate and second alumina particles having a particle diameter of 0.01–0.1 μm as a pore forming material to embed a plurality of the second alumina particles 2 in the spaces between the first alumina particles 1, and sintering the mixture at a temperature of 1200–1400° C. The alumina sintered body can be used for a part for various gas permeable industrial materials inclusive of protective film for gas sensors, and the like.
摘要翻译：一种氧化铝烧结体，其连通孔的平均孔径为400-1100，孔隙率为4-16％，可通过混合粒径为0.2-0.7μm的第一氧化铝颗粒1和0.7-1.0的球形度，作为粒径为0.01〜0.1μm的骨料和第二氧化铝粒子作为成孔材料，将多个第二氧化铝粒子2嵌入第一氧化铝粒子1之间的空间，并在1200-1400℃的温度下烧结该混合物 ℃。氧化铝烧结体可用于各种气体渗透性工业材料的部件，包括用于气体传感器的保护膜等。

5. 发明授权

US07655123B2 Gas sensor 有权
标题翻译：气体传感器
公开(公告)号：US07655123B2
公开(公告)日：2010-02-02
申请号：US10997051
申请日：2004-11-24
申请人： Atsushi Sakon , Osamu Nakasone , Kaori Takahashi , Toshihiko Suzuki
发明人： Atsushi Sakon , Osamu Nakasone , Kaori Takahashi , Toshihiko Suzuki
IPC分类号： G01N27/417 , G01N27/409 , G01N27/26
CPC分类号： G01N27/419 , G01N27/4077 , G01N33/0037 , Y02A50/245
摘要： A gas sensor comprising a first measuring chamber for introducing a gas to be measured, a second measuring chamber for detection of the gas to be measured, and as pump cells a first pump cell having a pair of pump electrodes, and a second pump cell having a measuring electrode and an auxiliary pump electrode, wherein a porous alumina sintered body having communicating pores of 500-1100 Å in average pore diameter and 6-16% in porosity is formed as an electrode protective layer on the surface of at least the measuring electrode of the second pump cell in such a manner that the alumina sintered body covers the measuring electrode. The gas sensor can be use for long period of time because of the protective layer.
摘要翻译：一种气体传感器，包括用于引入要测量的气体的第一测量室，用于检测待测气体的第二测量室，以及作为泵电池的具有一对泵电极的第一泵电池，以及具有测量电极和辅助泵电极，其中在至少测量电极的表面上形成具有平均孔径为500-1100，孔隙率为6-16％的连通孔的多孔氧化铝烧结体作为电极保护层以氧化铝烧结体覆盖测量电极的方式。由于保护层，气体传感器可长时间使用。

6. 发明申请

US20050118097A1 Alumina sintered body and method for producing the same 有权
标题翻译：氧化铝烧结体及其制造方法
公开(公告)号：US20050118097A1
公开(公告)日：2005-06-02
申请号：US10997277
申请日：2004-11-24
申请人： Atsushi Sakon , Toshihiko Suzuki
发明人： Atsushi Sakon , Toshihiko Suzuki
IPC分类号： B01D39/20 , B01J23/70 , B01J23/74 , C01F7/02 , C04B35/10 , C04B35/111 , C04B35/117 , C04B35/63 , C04B38/00
CPC分类号： C04B35/111 , B82Y30/00 , C04B35/117 , C04B35/6303 , C04B35/6316 , C04B38/0038 , C04B2111/00267 , C04B2235/3206 , C04B2235/3208 , C04B2235/3217 , C04B2235/3218 , C04B2235/322 , C04B2235/3418 , C04B2235/528 , C04B2235/5445 , C04B2235/5454 , C04B2235/5472 , C04B2235/77 , C04B35/10 , C04B38/0054 , C04B38/0074
摘要： An alumina sintered body having communicating pores of 400-1100 Å in average pore diameter and 4-16% in porosity and being obtainable by mixing first alumina particles 1 having a particle diameter of 0.2-0.7 μm and a sphericity of 0.7-1.0 as an aggregate and second alumina particles having a particle diameter of 0.01-0.1 μm as a pore forming material to embed a plurality of the second alumina particles 2 in the spaces between the first alumina particles 1, and sintering the mixture at a temperature of 1200-1400° C. The alumina sintered body can be used for a part for various gas permeable industrial materials inclusive of protective film for gas sensors, and the like.
摘要翻译：一种氧化铝烧结体，其连通孔的平均孔径为400-1100，孔隙率为4-16％，可通过混合粒径为0.2-0.7μm的第一氧化铝颗粒1和0.7-1.0的球形度，作为粒径为0.01〜0.1μm的骨料和第二氧化铝粒子作为成孔材料，将多个第二氧化铝粒子2嵌入第一氧化铝粒子1之间的空间，并在1200-1400℃的温度下烧结该混合物 ℃。氧化铝烧结体可用于各种气体渗透性工业材料的部件，包括用于气体传感器的保护膜等。

7. 发明申请

US20050126910A1 Gas sensor 有权
标题翻译：气体传感器
公开(公告)号：US20050126910A1
公开(公告)日：2005-06-16
申请号：US10997051
申请日：2004-11-24
申请人： Atsushi Sakon , Osamu Nakasone , Kaori Takahashi , Toshihiko Suzuki
发明人： Atsushi Sakon , Osamu Nakasone , Kaori Takahashi , Toshihiko Suzuki
IPC分类号： G01N27/41 , G01N27/26 , G01N27/407 , G01N27/416 , G01N27/419 , G01N33/00
CPC分类号： G01N27/419 , G01N27/4077 , G01N33/0037 , Y02A50/245
摘要： A gas sensor comprising a first measuring chamber 11 for introducing a gas to be measured, a second measuring chamber 12 for detection of the gas to be measured, and as pump cells a first pump cell 31 having a pair of pump electrodes 21 and 22, and a second pump cell 32 having a measuring electrode 23 and an auxiliary pump electrode 24, wherein a porous alumina sintered body having communicating pores of 500-1100 Å in average pore diameter and 6-16% in porosity is formed as an electrode protective layer 50 on the surface of the measuring electrode 23 as at least one of a pair of the electrode 23 and 24 of the second pump cell 32 in such a manner that the alumina sintered body covers the measuring electrode 23. The gas sensor can be use for long period of time because of the protective layer.
摘要翻译：一种气体传感器，包括用于引入待测气体的第一测量室11，用于检测待测气体的第二测量室12以及具有一对泵电极21和22的第一泵室31，以及具有测量电极23和辅助泵电极24的第二泵电池32，其中形成具有平均孔径为500-100，孔隙率为6-16％的连通孔的多孔氧化铝烧结体作为电极保护层 50作为第二泵电池32的一对电极23和24中的至少一个，测量电极23的表面以氧化铝烧结体覆盖测量电极23的方式。由于保护层，气体传感器可长时间使用。

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