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    • 7. 发明申请
    • METHOD FOR MANUFACTURING SOLAR CELL
    • 制造太阳能电池的方法
    • US20100193352A1
    • 2010-08-05
    • US12678578
    • 2008-09-17
    • Hirohisa TakahashiSatoru IshibashiIsao SugiuraSatoru Takasawa
    • Hirohisa TakahashiSatoru IshibashiIsao SugiuraSatoru Takasawa
    • C23C14/35
    • H01L31/1884C23C14/086H01L31/022466Y02E10/50
    • The present invention relates to a method for manufacturing a solar cell provided with a buffer layer or an intermediate electrode. The buffer layer is disposed between a rear electrode and a photovoltaic cell. The rear electrode is disposed on the opposite side of a light incidence side and functions as an electrode for extracting electric power. The intermediate electrode is disposed between a plurality of photovoltaic cells. The intermediate electrode or the buffer layer comprises a ZnO-based transparent conductive film. The method comprises forming the intermediate electrode or the buffer layer by sputtering a target on which a formation material of the transparent conductive film is provided while applying sputtering voltage to generate a horizontal magnetic field on a surface of the target. The intermediate electrode or the buffer layer is formed through sputtering at a sputtering voltage of 340V or less.
    • 本发明涉及一种具有缓冲层或中间电极的太阳能电池的制造方法。 缓冲层设置在后电极和光伏电池之间。 后电极设置在光入射侧的相反侧,并且用作用于提取电力的电极。 中间电极设置在多个光伏电池之间。 中间电极或缓冲层包括ZnO基透明导电膜。 该方法包括通过溅射在其上提供透明导电膜的形成材料的靶而形成中间电极或缓冲层,同时施加溅射电压以在靶的表面上产生水平磁场。 中间电极或缓冲层通过溅射形成,溅射电压为340V以下。
    • 8. 发明授权
    • Scribe device
    • 划痕装置
    • US06470782B1
    • 2002-10-29
    • US09064089
    • 1998-04-22
    • Gyo ShimotoyodomeIsao Sugiura
    • Gyo ShimotoyodomeIsao Sugiura
    • C03B33027
    • C03B33/12C03B33/027C03B33/10Y10T83/02Y10T83/0333Y10T83/0341Y10T83/647
    • A scribe device comprises a body (10). A holder (20) is supported by the body (10) such that the holder (20) can slightly slide in a direction of a slide axis (Lb) which intersects a surface of a workpiece (100). Retaining portions (15, 21) spaced apart in a direction of the slide axis (Lb) are formed on the body (10) and the holder (20), respectively. A vibratory actuator (40) is sandwiched between the retainer portion of the body and the retainer portion of the holder. The holder (20) holds an abutment member (30). The holder is biased by a biasing member (23) such that said retaining portion of the holder is pressed against the vibratory actuator. The vibratory actuator renders the vibrations in the direction of the slide axis to the holder. The abutment member transmits the vibrations from the holder to the workpiece. That is, the abutment member (30) is subjected to a static force and a vibration energy and pressed against the workpiece (100). In that state, the abutment member (30) is relatively moved with respect to the workpiece (100) to thereby form a scribe line in the workpiece.
    • 划线装置包括主体(10)。 保持器(20)由主体(10)支撑,使得保持器(20)能够在与工件(100)的表面相交的滑动轴线(Lb)的方向上稍微滑动。 在主体(10)和保持架(20)上分别形成在滑动轴线(Lb)的方向上间隔开的保持部(15,21)。 振动致动器(40)夹在主体的保持器部分和保持器的保持器部分之间。 保持器(20)保持抵靠构件(30)。 保持器由偏置构件(23)偏置,使得保持器的保持部分被压靠在振动致动器上。 振动致动器使得沿着滑动轴线的方向的振动保持器。 抵接构件将振动从保持器传递到工件。 也就是说,抵接构件(30)受到静力和振动能量并被压靠在工件(100)上。 在该状态下,抵接构件(30)相对于工件(100)相对移动,从而在工件中形成划线。