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    • 1. 发明授权
    • Magnetic sensor and magnetic detecting method of the same
    • 磁传感器和磁检测方法相同
    • US09453890B2
    • 2016-09-27
    • US14635111
    • 2015-03-02
    • ASAHI KASEI MICRODEVICES CORPORATION
    • Masaya YamashitaYo YamagataKen TanakaNorihiko Mikoshiba
    • G01R33/02G01R33/022G01R33/09H01L43/08
    • G01R33/0206G01R33/09G01R33/093G01R33/096G01R33/098H01L43/08
    • The present invention relates to a magnetic sensor and a magnetic detecting method of the same capable of detecting at least a magnetic field perpendicular to a substrate and a magnetic field parallel to the substrate in a state where the respective magnetic field components are mixed. One embodiment of the magnetic sensor detects a magnetic field of the orthogonal three axes, and includes a magnetic detector including a magnetic field sensitive material configured to detect a magnetic field component in a first direction, a magnetic field direction converters configured to convert a magnetic field component in a second direction and a magnetic field component in a third direction into magnetic field components in the first direction, the second direction being perpendicular to the first direction, the third direction being perpendicular to both of the first and the second directions.
    • 本发明涉及一种磁传感器及其磁性检测方法,其能够在混合各磁场分量的状态下至少检测垂直于基板的磁场和平行于基板的磁场。 磁传感器的一个实施例检测正交三轴的磁场,并且包括磁检测器,该磁检测器包括被配置为检测第一方向上的磁场分量的磁场敏感材料,磁场方向转换器,被配置为转换磁场 在第二方向上的分量和在第三方向上的磁场分量成为第一方向上的磁场分量,第二方向垂直于第一方向,第三方向垂直于第一方向和第二方向。