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    • 1. 发明授权
    • Electrode-free resonator structures for frequency control, filters and sensors
    • 用于频率控制,滤波器和传感器的无电极谐振器结构
    • US06903629B1
    • 2005-06-07
    • US10669282
    • 2003-09-24
    • Arthur BallatoJohn R. VigYook-Kong Yong
    • Arthur BallatoJohn R. VigYook-Kong Yong
    • H03H9/17H03H9/56H03H9/205H03H9/54
    • H03H9/177H03H9/132H03H9/56H03H2003/0428H03H2003/0435
    • Double-sided, single-sided and ring electrode mesa resonators are provided that operate in the difficult 3 GHZ frequency with an electrode-free resonator area that serves as an energy-trapping area. The double-sided electrode-free resonator device is a double-sided mesa resonator plate, top and bottom wells, a mesa, and top and bottom electrodes deposited in such a way that the electrodes cover the plate surface and surround the mesa, which allows the mesa to protrude above the electrodes and provide an electrode-free resonator area. The top and bottom electrodes, which are acoustically coupled and controlled by acoustic gaps, create an electro-magnetic field and an excitation voltage within a vibrating area of the resonator plate generates an acoustic energy which is trapped within the resonator area and confined to the resonator area to minimize a leakage of the acoustic energy and provide a high Q factor at 3 GHz. The resonator has a resonator frequency determined by a resonator thickness dimension, t3, influences the resonator area's ability to function as an active element trapping the acoustic energy. The inventors herein have observed a strong relationship between decreased resonator thickness and motional impedance. Double-sided and single-sided filter devices based on the same principles are also provided.
    • 提供双面,单面和环形电极台面共振器,其工作在困难的3 GHZ频率,无电极谐振器区域用作能量捕获区域。 双面无电极谐振器装置是双面台面共振器板,顶部和底部井,台面以及顶部和底部电极,以使得电极覆盖板表面并且围绕台面的方式沉积,这允许 台面突出在电极上方,并提供无电极的谐振器区域。 通过声学间隙声学耦合和控制的顶部和底部电极产生电磁场,并且谐振器板的振动区域内的激发电压产生被吸收在谐振器区域内并限于谐振器的声能 以最小化声能的泄漏并在3GHz提供高Q因子。 谐振器具有由谐振器厚度尺寸t 3确定的谐振器频率,影响谐振器区域作为捕获声能的有源元件的功能。 发明人在此观察到减小的谐振器厚度和运动阻抗之间的强关系。 还提供了基于相同原理的双面和单面过滤装置。
    • 2. 发明授权
    • Method of fabricating acceleration resistant crystal resonators
    • 制造加速电阻晶体谐振器的方法
    • US4409711A
    • 1983-10-18
    • US426349
    • 1982-09-29
    • Arthur BallatoJohn R. Vig
    • Arthur BallatoJohn R. Vig
    • H03H9/05H03H9/19H03H9/56H04R17/00
    • H03H9/56H03H9/566Y10T29/42
    • An acceleration resistant crystal resonator is made from a single quartz te that is optically twinned into a left-handed (LH) quartz portion and a right-handed (RH) quartz portion. According to the method, the optically twinned single quartz plate is formed into a resonator plate wherein the effective thickness of the (LH) portion is substantially the same as the effective thickness of the (RH) portion. The resonator plate is then mounted and bonded to the support structure of a crystal resonator enclosure. A pair of electrodes is then deposited onto the (LH) portion and a pair of electrodes deposited onto the (RH) portion. The thickness of the two pairs of electrodes is then adjusted so that the resonant frequency of the resonator on the (LH) portion is substantially the same as the resonant frequency of the resonator on the (RH) portion. The pairs of electrodes are then interconnected to each other and to an oscillator circuit so that in-phase vibration of the two portions is assured. The enclosure is then hermetically sealed.
    • 加速阻抗晶体谐振器由单个石英板制成,该石英板被光学地结合到左旋(LH)石英部分和右旋(RH)石英部分中。 根据该方法,将光学双组合的单个石英板形成为共振板,其中(LH)部分的有效厚度与(RH)部分的有效厚度基本相同。 然后将谐振器板安装并结合到晶体谐振器外壳的支撑结构。 然后将一对电极沉积到(LH)部分上,并将一对电极沉积在(RH)部分上。 然后调整两对电极的厚度,使得(LH)部分上的谐振器的谐振频率基本上与(RH)部分上的谐振器的谐振频率相同。 然后将这对电极彼此互连并连接到振荡器电路,以确保两部分的同相振动。 然后将外壳密封。
    • 4. 发明授权
    • Method of making radiation hardened quartz crystal oscillators
    • 制造辐射硬化石英晶体振荡器的方法
    • US5428315A
    • 1995-06-27
    • US719922
    • 1985-01-22
    • John R. VigArthur Ballato
    • John R. VigArthur Ballato
    • G04F5/06H03L1/00G04C3/00H03B5/04H03B5/32
    • G04F5/06H03L1/00
    • A method is provided of making radiation compensated quartz crystal oscillators. According to the method, at least two quartz crystal oscillators are first selected that have different responses to energetic radiation from gamma rays, neutrons, etc. Each oscillator is characterized individually as to its radiation sensitivity, the oscillators then exposed to the same radiation flux and the respective output frequency extracted from each oscillator. The frequency difference between the oscillators arising from the influence of the radiation flux is then derived. A correction signal is then derived from the frequency difference and the known radiation sensitivities. The correction signal is then applied to one of the oscillators to effect radiation compensation of its frequency.
    • 提供了制造辐射补偿石英晶体振荡器的方法。 根据该方法,首先选择至少两个对γ射线,中子等的能量辐射具有不同响应的石英晶体振荡器。每个振荡器的辐射灵敏度分别表征,然后振荡器暴露于相同的辐射通量, 从每个振荡器提取的相应输出频率。 然后导出由辐射通量的影响引起的振荡器之间的频率差。 然后从频率差和已知的辐射灵敏度导出校正信号。 然后将校正信号施加到振荡器之一以实现其频率的辐射补偿。
    • 6. 发明授权
    • Method of determining angle-of-cut
    • 确定切割角度的方法
    • US06518778B2
    • 2003-02-11
    • US09770797
    • 2001-01-23
    • John R. VigArthur Ballato
    • John R. VigArthur Ballato
    • G01R2922
    • G01N23/20
    • Methods are included for determining deviations from &phgr;=0° in test resonators based on the quasi-pure modes' displacement ratio variations with &phgr; angle. A direct relationship between deviation from &phgr;=0° and the c-mode displacement ratio has been observed, so that the larger the deviation from &phgr;=0°, then the larger is the change in the normalized frequency of the c-mode upon immersion in, or contact with, a fluid. The method includes measuring &thgr; and &phgr; angles in reference resonators with different small &phgr; angles and quasi-pure mode frequencies of reference resonators in both air and a test fluid at ambient temperatures, calculating the normalized frequency changes between the air and fluid measurements as a reference point, measuring the test resonator in air then in the fluid and comparing the results. Also includes are similar methods for measuring the &phgr; angles in the quasi-pure mode of near-BT-cut resonator plates and the LGX family of rotated-y-cut ZTC crystal resonators, so that the appropriate modes' displacement ratio variations with the &phgr; angle determine deviations from &phgr;=0°. In the preferred method of this invention the test fluid used for measuring a reference fluid quasi-pure mode frequency is pure water at ambient temperature.
    • 包括用于基于准纯模式的具有phi角度的位移比变化来确定测试谐振器中与phi = 0°的偏差的方法。 已经观察到与phi = 0°的偏离与c模式位移比之间的直接关系,使得与phi = 0°的偏差越大,则浸入时c模式的归一化频率的变化越大 进入或接触流体。 该方法包括在空气中的参考谐振器和环境温度下的测试流体中具有不同小的phi角和准纯模式频率的参考谐振器中的θ和phi角度,计算空气和流体测量之间的归一化频率变化作为参考 点,测量空气中的测试谐振器,然后在流体中并比较结果。 还包括用于测量近BT切割谐振器板和LGX系列旋转Y切割ZTC晶体谐振器的准纯模式中的phi角的类似方法,使得适当的模式与phi的位移比变化 角度确定与phi = 0°的偏差。 在本发明的优选方法中,用于测量参考流体准纯模式频率的测试流体是环境温度下的纯水。
    • 7. 发明授权
    • Techniques for sensing the properties of fluids with resonators
    • 用谐振器检测流体性质的技术
    • US06247354B1
    • 2001-06-19
    • US09531630
    • 2000-03-21
    • John R. VigArthur Ballato
    • John R. VigArthur Ballato
    • G01N1110
    • G01N29/036G01N11/16G01N29/2418G01N29/30G01N29/348G01N2291/02818G01N2291/02881G01N2291/0421G01N2291/0422
    • A technique of determining the properties of a liquid. One or more resonators are exposed to air or another reference fluid of known properties. Oscillator circuits drive the resonators at at least two different frequencies. Frequency counters measure the fluid-operating frequencies of the resonators while they are in contact with the reference fluid. The resonators are then immersed in liquid as the oscillator circuits drive the resonators. The liquid-operating frequencies are measured by the frequency counters while the resonators are in contact with the liquid. A computer compares the fluid-operating frequencies and the liquid-operating frequencies to obtain difference frequencies that are independent functions of the liquid's properties. A computer determines the liquid properties from the difference frequencies.
    • 确定液体性质的技术。 将一个或多个共振器暴露于已知性质的空气或另一参考流体。 振荡器电路以至少两个不同的频率驱动谐振器。 频率计测量谐振器在与参考流体接触时的流体工作频率。 谐振器然后在振荡器电路驱动谐振器时浸入液体中。 液体工作频率由频率计数器测量,而谐振器与液体接触。 计算机比较流体操作频率和液体操作频率以获得作为液体特性的独立功能的差异频率。 计算机根据差分频率确定液体特性。
    • 8. 发明授权
    • Method of making miniature high frequency SC-cut quartz crystal
resonators
    • 制作微型高频SC切割石英晶体谐振器的方法
    • US4554717A
    • 1985-11-26
    • US559546
    • 1983-12-08
    • John R. VigArthur Ballato
    • John R. VigArthur Ballato
    • H03H3/08H04R17/00
    • H03H3/08Y10T29/42
    • Miniature high frequency SC-cut quartz crystal resonators are made from a plano-plano SC-cut quartz crystal wafer by chemically polishing the wafer; then chemomechanically polishing the chemically polished wafer; then chemically polishing the chemomechanically polished wafer; depositing a suitable pattern of etch resist on the wafer using standard photolithographic techniques; chemically polishing the wafer; stripping the photoresist from the wafer; placing a suitable evaporative mask pattern into intimate contact with the wafer; depositing a suitable pattern of electrodes on the wafer; testing the resonators so formed on the wafer; selectively separating those resonators having the desired properties; mounting the selected resonators into an enclosure; adjusting the frequency of the selected resonators to the exact frequency desired; and hermetically sealing the enclosure.
    • 微型高频SC切割石英晶体谐振器由平面SC切割石英晶体晶片通过化学抛光晶片制成; 然后化学机械抛光化学抛光的晶圆; 然后化学抛光化学机械抛光的晶圆; 使用标准光刻技术在晶片上沉积合适的蚀刻抗蚀剂图案; 化学抛光晶片; 从晶片剥离光致抗蚀剂; 将合适的蒸发掩模图案放置成与晶片紧密接触; 在晶片上沉积合适的电极图案; 测试在晶圆上形成的谐振器; 选择性地分离具有所需特性的那些谐振器; 将所选择的谐振器安装到外壳中; 将所选谐振器的频率调节到所需的精确频率; 并密封外壳。
    • 9. 发明授权
    • Method of fabricating acceleration resistant crystal resonators and
acceleration resistant crystal resonators so formed
    • 制造加速电阻晶体谐振器和如此形成的加速电阻晶体谐振器的方法
    • US4365182A
    • 1982-12-21
    • US196508
    • 1980-10-14
    • Arthur BallatoJohn R. Vig
    • Arthur BallatoJohn R. Vig
    • H03H9/05H03H9/19H03H9/56H03H9/205
    • H03H9/56H03H9/566
    • An acceleration resistant crystal resonator is made from a single quartz te that is optically twinned into a left-handed (LH) quartz portion and a right-handed (RH) quartz portion. According to the method, the optically twinned single quartz plate is formed into a resonator plate wherein the effective thickness of the (LH) portion is substantially the same as the effective thickness of the (RH) portion. The resonator plate is then mounted and bonded to the support structure of a crystal resonator enclosure. A pair of electrodes is then deposited onto the (LH) portion and a pair of electrodes deposited onto the (RH) portion. The thickness of the two pairs of electrodes is then adjusted so that the resonant frequency of the resonator on the (LH) portion is substantially the same as the resonant frequency of the resonator on the (RH) portion. The pairs of electrodes are then interconnected to each other and to an oscillator circuit so that in-phase vibration of the two portions is assured. The enclosure is then hermetically sealed.
    • 加速阻抗晶体谐振器由单个石英板制成,该石英板被光学地结合到左旋(LH)石英部分和右旋(RH)石英部分中。 根据该方法,将光学双组合的单个石英板形成为共振板,其中(LH)部分的有效厚度与(RH)部分的有效厚度基本相同。 然后将谐振器板安装并结合到晶体谐振器外壳的支撑结构。 然后将一对电极沉积到(LH)部分上,并将一对电极沉积在(RH)部分上。 然后调整两对电极的厚度,使得(LH)部分上的谐振器的谐振频率基本上与(RH)部分上的谐振器的谐振频率相同。 然后将这对电极彼此互连并连接到振荡器电路,以确保两部分的同相振动。 然后将外壳密封。