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1. 发明授权

US08329118B2 Method and apparatus for determining one or more operating parameters for a microfluidic circuit 有权
标题翻译：用于确定微流体电路的一个或多个操作参数的方法和装置
公开(公告)号：US08329118B2
公开(公告)日：2012-12-11
申请号：US10932662
申请日：2004-09-02
申请人： Aravind Padmanabhan , Peter Reutiman , Eugen I. Cabuz
发明人： Aravind Padmanabhan , Peter Reutiman , Eugen I. Cabuz
IPC分类号： G05D7/00
CPC分类号： G05D7/0694 , B01L3/5027 , B01L2200/0621 , B01L2300/021 , B01L2300/0816 , B01L2400/0487 , Y10T137/0318 , Y10T137/0391 , Y10T137/0396 , Y10T137/8593 , Y10T137/85978 , Y10T436/12
摘要： Methods for determining one or more operating parameters for a timing protocol of a microfluidic circuit are provided. In some embodiments, wet out times are measured for certain flow channels, and start times, flow rates and/or other parameters are calculated so that the various fluids in the microfluidic cartridge arrive at certain locations at a desired time and/or in a desired sequence. To help compensate for process variations, one or more fluidic process monitor components/structures may be fabricated along with the functional components/structures of a microfluidic cartridge. Test may be performed on the process monitor components/structures to help identify process variations in the particular microfluidic cartridge at hand. By using the process monitor data, the timing protocol for a particular microfluidic cartridge may be made more accurate.
摘要翻译：提供了用于确定微流体电路的定时协议的一个或多个操作参数的方法。在一些实施例中，对于某些流动通道测量湿时间，并计算开始时间，流速和/或其它参数，使得微流控筒中的各种流体在期望的时间和/或期望的时间内到达某些位置序列。为了帮助补偿过程变化，可以与微流控盒的功能组件/结构一起制造一个或多个流体过程监控组件/结构。可以在过程监视器组件/结构上执行测试，以帮助识别手头上特定微流控筒的过程变化。通过使用过程监控数据，可以使特定微流控盒的定时协议更准确。

2. 发明授权

US06968862B2 Electrostatically actuated valve 失效
公开(公告)号：US06968862B2
公开(公告)日：2005-11-29
申请号：US10980685
申请日：2004-11-03
申请人： Cleopatra Cabuz , Eugen I. Cabuz
发明人： Cleopatra Cabuz , Eugen I. Cabuz
IPC分类号： F15C5/00 , F16K31/02 , F16K99/00 , F16K1/00
CPC分类号： F16K99/0001 , F15C5/00 , F16K31/02 , F16K99/0015 , F16K99/0028 , F16K99/0051 , Y10T137/86879 , Y10T137/87788
摘要： An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.

3. 发明授权

US06211580B1 Twin configuration for increased life time in touch mode electrostatic actuators 有权
标题翻译：双重配置，可延长触摸模式静电执行器的使用寿命
公开(公告)号：US06211580B1
公开(公告)日：2001-04-03
申请号：US09222096
申请日：1998-12-29
申请人： Cleopatra Cabuz , Eugen I. Cabuz
发明人： Cleopatra Cabuz , Eugen I. Cabuz
IPC分类号： H01H1964
CPC分类号： H02N1/002 , H01H47/002 , H01H59/0009 , H01H2059/0018 , Y10T307/747 , Y10T307/826
摘要： An electrostatic actuator and drive configuration device for use in a system requiring a long term ON state operation. The device includes a first electrostatic actuator positioned to operate in the system requiring the long term ON state upon activation of a power supply. The device also includes a second electrostatic actuator positioned to operate in the system requiring the long term ON state upon activation of the power supply. A timer is connected to the power supply to alternately select the first or the second actuator for activation to drive the selected actuator to the ON state. The timer is controlled to select the first or second electrostatic actuator on an alternating basis to prevent either electrostatic actuator from remaining in the ON state for more than a predetermined time without the other actuator being selected. The electrostatic actuators may be configured in parallel or in series, depending upon the demands of the system. When the electrostatic actuators are switches, linear actuators or relays, they are normally connected side by side mechanically parallel. When the actuators are shutters, mirrors or valves, normal connection is in sequence end to end. When devices are selected to be in the ON condition, the selection should be such that each device is closed before the other is opened.
摘要翻译：用于需要长期接通状态操作的系统中的静电致动器和驱动配置装置。该装置包括第一静电致动器，其定位成在激活电源时需要长期接通状态的系统中操作。该装置还包括第二静电致动器，其定位成在激活电源时需要长期接通状态的系统中操作。定时器连接到电源以交替地选择第一或第二致动器进行激活以将所选择的致动器驱动到接通状态。控制定时器以交替的方式选择第一静电致动器或第二静电致动器，以防止静电致动器在没有选择其它致动器的情况下保持在ON状态超过预定时间。静电致动器可以根据系统的要求并联或串联配置。当静电执行器是开关，线性执行器或继电器时，它们通常并排并排并排。当执行器是百叶窗，镜子或阀门时，正常连接按顺序排列到最后。当选择设备处于ON状态时，选择应该使每个设备在其他设备打开之前关闭。

4. 发明授权

US5822170A Hydrophobic coating for reducing humidity effect in electrostatic actuators 失效
标题翻译：疏水涂层，用于减少静电执行机构的湿度效应
公开(公告)号：US5822170A
公开(公告)日：1998-10-13
申请号：US948335
申请日：1997-10-09
申请人： Cleopatra Cabuz , Thomas R. Ohnstein , Eugen I. Cabuz
发明人： Cleopatra Cabuz , Thomas R. Ohnstein , Eugen I. Cabuz
IPC分类号： F15C5/00 , H02N1/00 , H02N13/00
CPC分类号： H02N1/002 , F15C5/00 , H02N13/00
摘要： A touch mode electrostatic actuator and method of making the same, having first and second electrode driven surfaces positioned to move between a spaced apart relationship and a contact relationship when dielectric layer on each of the first and second electrode surfaces is subjected to a source of electrical potential to selectively actuate and discharge the dielectric layers to cause the movement between the relationships. The electrostatic actuators of this invention includes a hydrophobic layer for preventing absorption of water thereon, the hydrophobic layers being adapted to cause condensed water to form drops and prevent formation of a continuous water layer. The hydrophobic layer may be a coating on a hydrophilic actuator or, alternatively, may be made entirely from a hydrophobic material. The preferred hydrophobic material is selected from a group consisting of organic materials such as octadecyltrichlorosilane, perfluoro-decyltrichlorosilane, tetrafluoroethylene, and inorganic materials such as a diamond type carbon layer. The hydrophobic layer is electrically isolating and chemically stable in its intended environment. In the preferred embodiments, the hydrophobic material is applied to the hydrophilic dielectric layer by a method selected from dipping, plasma deposition, Langmuir-Blodgett technique, sputtering and CVD deposition.
摘要翻译：一种触摸模式静电致动器及其制造方法，当第一和第二电极表面上的电介质层经受电气源时，第一和第二电极驱动表面定位成在间隔开的关系和接触关系之间移动选择性地致动和释放电介质层以引起关系之间的移动的潜力。本发明的静电致动器包括用于防止其上吸收水的疏水层，疏水层适于引起冷凝水形成液滴并防止形成连续的水层。疏水层可以是亲水性致动器上的涂层，或者可以完全由疏水材料制成。优选的疏水性材料选自有机材料如十八烷基三氯硅烷，全氟癸基三氯硅烷，四氟乙烯和无机材料如金刚石型碳层。疏水层在其预期环境中是电绝缘的和化学稳定的。在优选的实施方案中，疏水材料通过选自浸渍，等离子体沉积，Langmuir-Blodgett技术，溅射和CVD沉积的方法施加到亲水介电层上。

5. 发明授权

US07222639B2 Electrostatically actuated gas valve 失效
标题翻译：静电致动气阀
公开(公告)号：US07222639B2
公开(公告)日：2007-05-29
申请号：US11025758
申请日：2004-12-29
申请人： Ulrich Bonne , Cleopatra Cabuz , Eugen I. Cabuz , Stephen J. Kemp , John T. Adams , Tzu-Yu Wang , Sybrandus B. V. Munsterhuis , Gerrit J. Baarda
发明人： Ulrich Bonne , Cleopatra Cabuz , Eugen I. Cabuz , Stephen J. Kemp , John T. Adams , Tzu-Yu Wang , Sybrandus B. V. Munsterhuis , Gerrit J. Baarda
IPC分类号： G05D16/06
CPC分类号： F16K31/402 , F16K31/02 , F16K31/385 , F23N1/005 , F23N2035/18 , F23N2035/20 , F23N2035/24 , Y10T137/7761 , Y10T137/87917
摘要： A gas valve body with a first flow chamber and, a second flow chamber including and a main valve positioned in line and between the first flow chamber and the second flow chamber. The main valve can be opened by creating a pressure differential across the main valve. An electrostatically controlled pilot valve is provided for controlling the pressure differential across the main valve for “on-ff” operation. The electrostatically controlled pilot valve may also be operated to “modulate” the pressure differential across the main valve along a range of pressure differential values.
摘要翻译：一种具有第一流动室的气体阀体，以及包括第一流动室和第二流动室的第二流动室和第二流动室。可以通过在主阀上形成压差来打开主阀。提供静电控制的先导阀，用于控制主阀上的压差用于“on-ff”操作。静电控制先导阀还可以被操作以沿着一定范围的压力差来“调制”主阀上的压力差。

6. 发明授权

US06837476B2 Electrostatically actuated valve 失效
标题翻译：静电致动阀
公开(公告)号：US06837476B2
公开(公告)日：2005-01-04
申请号：US10174851
申请日：2002-06-19
申请人： Cleopatra Cabuz , Eugen I. Cabuz
发明人： Cleopatra Cabuz , Eugen I. Cabuz
IPC分类号： F15C5/00 , F16K31/02 , F16K99/00
CPC分类号： F16K99/0001 , F15C5/00 , F16K31/02 , F16K99/0015 , F16K99/0028 , F16K99/0051 , Y10T137/86879 , Y10T137/87788
摘要： An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.
摘要翻译：相对较小的静电驱动阀具有相对低的制造成本，并且消耗相对较低的电压和/或功率。通常关闭，常开，三（或更多）方式的阀和其他配置。这些静电驱动阀适用于各种应用，例如包括但不限于低功率和无线应用。

7. 发明授权

US06750589B2 Method and circuit for the control of large arrays of electrostatic actuators 有权
标题翻译：用于控制大型静电致动器阵列的方法和电路
公开(公告)号：US06750589B2
公开(公告)日：2004-06-15
申请号：US10057073
申请日：2002-01-24
申请人： Eugen I. Cabuz
发明人： Eugen I. Cabuz
IPC分类号： H02N100
CPC分类号： G09G3/2014 , G09G3/346 , H02N1/002
摘要： A circuit and method for controlling an array of n electrostatic actuators, where n is an integer, preferably of at least 32 and may be in excess of 10,000 or more. At least one high voltage generator is provided having a desired high voltage output. N switches are operably connected to the generator, each switch being directly connected to one of the n electrostatic actuators. N capacitors, one of which is connected in parallel to each of the n actuators receives voltage from the high voltage generator through its specific switch. A central processor controls the desired voltage in a particular wave form and the time each of the n switches is closed. The shape of the voltage and the time of the voltage rise is determined by the voltage leakage in the components of the array.
摘要翻译：用于控制n个静电致动器的阵列的电路和方法，其中n是整数，优选至少32并且可以超过10,000或更大。提供具有期望的高电压输出的至少一个高压发生器。 N个开关可操作地连接到发电机，每个开关直接连接到n个静电致动器中的一个。 N个电容器，其中一个并联连接到每个n个致动器，通过其特定的开关从高压发生器接收电压。中央处理器以特定的波形控制期望的电压和n个开关中的每个关闭的时间。电压的形状和电压上升的时间由阵列的组件中的电压泄漏确定。

8. 发明授权

US06351054B1 Compounded AC driving signal for increased reliability and lifetime in touch-mode electrostatic actuators 有权
标题翻译：复合交流驱动信号，提高了触摸模式静电执行器的可靠性和寿命
公开(公告)号：US06351054B1
公开(公告)日：2002-02-26
申请号：US09591170
申请日：2000-06-09
申请人： Cleopatra Cabuz , Eugen I. Cabuz
发明人： Cleopatra Cabuz , Eugen I. Cabuz
IPC分类号： H02N100
CPC分类号： H02N1/006
摘要： An electrostatic actuator device and method for actuating the device. The device includes a pair of actuator plates having electrodes for conducting a voltage potential thereto and at least one of the pair being movable with respect to the other. The plates are positioned to move upon application of a voltage potential through electrodes attached thereto. A driving means provides a voltage potential to the electrodes to cause the movement of the at least one plate. The driving means produces compound AC signal with rise/fall sections at least 10 to 100 times (preferably more than twenty times) the mechanical response time of the actuator. The preferred AC signals are selected from square-wave, sine wave, triangle wave and mixtures thereof. The preferred circuit produces rise/fall sections that are a quarter of a full period of the AC wave signal, and only the nominal section of the compound AC signal is used for driving the actuator. Preferred is an actuation cycle having a rise section with the signal amplitude increasing from zero to the desired final value through a plurality of individual periods of the a AC signal and a fall section with the signal amplitude decreasing from a nominal final value to zero through a similar plurality of individual periods of basic AC signal. The specific frequency of the square wave AC signal and the rise fall times of the amplitude modulation is adjusted to minimize stiction between said actuator plates.
摘要翻译：一种用于致动该装置的静电致动器装置和方法。该装置包括一对致动器板，其具有用于向其施加电压电位的电极，并且该对中的至少一个可相对于另一个运动。这些板被定位成通过附着在其上的电极施加电压电位而移动。驱动装置向电极提供电压电位以引起至少一个板的运动。驱动装置产生具有上升/下降部分的复合交流信号，至少10至100倍（优选超过20倍）致动器的机械响应时间。优选的交流信号选自方波，正弦波，三角波及其混合。优选的电路产生上升/下降部分，其为交流波信号的整个周期的四分之一，并且仅复合AC信号的标称部分用于驱动致动器。优选的是具有信号幅度从零增加到期望最终值的上升段的致动周期，通过AC信号的多个独立周期以及信号幅度从标称最终值通过a到类似的多个基本AC信号的单独周期。调整方波AC信号的特定频率和振幅调制的上升下降时间以最小化所述致动器板之间的静摩擦。

9. 发明授权

US06240944B1 Addressable valve arrays for proportional pressure or flow control 有权
标题翻译：用于比例压力或流量控制的可寻址阀组
公开(公告)号：US06240944B1
公开(公告)日：2001-06-05
申请号：US09404560
申请日：1999-09-23
申请人： Thomas R. Ohnstein , Eugen I. Cabuz
发明人： Thomas R. Ohnstein , Eugen I. Cabuz
IPC分类号： F16K1120
CPC分类号： F16K99/0001 , F15B11/0426 , F15B2211/40507 , F15B2211/40515 , F15B2211/40576 , F15B2211/45 , F15B2211/455 , F15C5/00 , F16K99/0007 , F16K99/0051 , G05D7/0694 , Y10T137/0318 , Y10T137/87314
摘要： A device for controlling the proportional pressure or flow of fluids over a range of source pressure. An addressable array is interposed between a source pressure and an exit pressure chamber. The array comprises a plurality of valves, the total open area of which define the opening between the source pressure and the exit pressure. Also provided is an actuator for separately actuating each valve of the array between an open and a closed condition, whereby the total number of open valves determines the flow between the source pressure and the exit pressure. The preferred valves are electrostatically actuated valves including upper and lower electrodes addressable by a conductor, and are fabricated monolithically on a single substrate. The array is formed so that actuation actuates a number of valves ranging from one valve to all the valves in the array. The device may be used to control flow between the source pressure and the exit pressure chamber. In another embodiment, the device further includes a proportional exit port in communication with the device for discharging a controlling pressure therefrom, the exit port being positioned to receive the proportion of fluid not discharged through the addressable array.
摘要翻译：用于在源压力范围内控制流体的比例压力或流量的装置。位于源压力和出口压力室之间的可寻址阵列。阵列包括多个阀，其总开口面积限定了源压力和出口压力之间的开度。还提供了用于在打开和关闭状态之间单独致动阵列的每个阀的致动器，由此，打开阀的总数确定源压力和出口压力之间的流量。优选的阀是静电驱动阀，包括可由导体寻址的上电极和下电极，并且在单个基板上单片地制造。该阵列形成为使得致动致动多个阀，其范围从阵列中的一个阀到所有阀。该装置可用于控制源压力和出口压力室之间的流量。在另一个实施例中，该装置还包括与装置连通的比例出口，用于从其排放控制压力，出口被定位成接收未通过可寻址阵列排出的流体比例。

10. 发明授权

US07444869B2 Force rebalancing and parametric amplification of MEMS inertial sensors 失效
标题翻译：力学重新平衡和参数放大的MEMS惯性传感器
公开(公告)号：US07444869B2
公开(公告)日：2008-11-04
申请号：US11549769
申请日：2006-10-16
申请人： Burgess R. Johnson , Eugen I. Cabuz
发明人： Burgess R. Johnson , Eugen I. Cabuz
IPC分类号： G01P9/04
CPC分类号： G01C19/5719 , G01C19/5726
摘要： MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of pump electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis.
摘要翻译：公开了使用力重新平衡和参数增益放大技术来测量科里奥利力的MEMS装置和方法。 MEMS惯性传感器可以包括一个或多个检验质量块，与每个检验质量块相邻定位的至少一个检测电极，用于静电归零正交和科里奥利相关检验质量运动的多个用于电极的矫正电极和用于产生泵送力对检验质量。强制重新平衡电压可以施加到一些绞车电极，以沿着器件的感测轴静电消除正交和/或科里奥利相关的质量运动。泵的电压大约是电动机驱动频率的两倍，可用于沿检测轴泵送检测质量。

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