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1. 发明授权

US06690036B2 Method and apparatus for steering an optical beam in a semiconductor substrate 有权
标题翻译：用于在半导体衬底中转向光束的方法和装置
公开(公告)号：US06690036B2
公开(公告)日：2004-02-10
申请号：US09811171
申请日：2001-03-16
申请人： Ansheng Liu , Mario J. Paniccia , Michael T. Morse , Dmitri E. Nikonov , Yi Ding
发明人： Ansheng Liu , Mario J. Paniccia , Michael T. Morse , Dmitri E. Nikonov , Yi Ding
IPC分类号： H01L2724
CPC分类号： G02B6/122 , G02B6/2813 , G02F1/025 , G02F1/2955 , G02F2001/217
摘要： An optical steering method and apparatus. In one aspect of the present invention, the disclosed apparatus includes a multi-mode interference (MMI) device disposed in a semiconductor substrate. The MMI device includes an input and a plurality of outputs Each one of the plurality of outputs of the MMI device is optically coupled to the input of the MMI device. A phase array is disposed in the semiconductor substrate. The phase array includes a plurality of inputs and a plurality of outputs. The plurality of inputs of the phase array optically are coupled to the plurality of outputs of the phase array. The phase array is coupled to control relative phase differences between optical beams output by each one of the plurality of outputs of the phase array.
摘要翻译：一种光学转向方法和装置。在本发明的一个方面，所公开的装置包括设置在半导体衬底中的多模干涉（MMI）装置。 MMI设备包括输入和多个输出MMI设备的多个输出中的每一个光学耦合到MMI设备的输入。相位阵列设置在半导体衬底中。相位阵列包括多个输入和多个输出。光学上的相位阵列的多个输入耦合到相位阵列的多个输出端。相位阵列被耦合以控制由相位阵列的多个输出中的每一个输出的光束之间的相对相位差。

2. 发明授权

US06891653B2 Method and apparatus for steering an optical beam in a semiconductor substrate 失效
标题翻译：用于在半导体衬底中转向光束的方法和装置
公开(公告)号：US06891653B2
公开(公告)日：2005-05-10
申请号：US10177872
申请日：2002-06-19
申请人： Ansheng Liu , Mario J. Paniccia , Michael T. Morse , Dmitri E. Nikonov , Yi Ding
发明人： Ansheng Liu , Mario J. Paniccia , Michael T. Morse , Dmitri E. Nikonov , Yi Ding
IPC分类号： G02B6/122 , G02B6/28 , G02F1/025 , G02F1/295
CPC分类号： G02B6/122 , G02B6/2813 , G02F1/025 , G02F1/2955 , G02F2001/217
摘要： An optical steering method and apparatus. In one aspect of the present invention, the disclosed apparatus includes a multi-mode interference (MMI) device disposed in a semiconductor substrate. The MMI device includes an input and a plurality of outputs. Each one of the plurality of outputs of the MMI device is optically coupled to the input of the MMI device. A phase array is disposed in the semiconductor substrate. The phase array includes a plurality of inputs and a plurality of outputs. The plurality of inputs of the phase array optically are coupled to the plurality of outputs of the phase array. The phase array is coupled to control relative phase differences between optical beams output by each one of the plurality of outputs of the phase array.
摘要翻译：一种光学转向方法和装置。在本发明的一个方面，所公开的装置包括设置在半导体衬底中的多模干涉（MMI）装置。 MMI设备包括输入和多个输出。 MMI设备的多个输出中的每一个光耦合到MMI设备的输入。相位阵列设置在半导体衬底中。相位阵列包括多个输入和多个输出。光学上的相位阵列的多个输入耦合到相位阵列的多个输出端。相位阵列被耦合以控制由相位阵列的多个输出中的每一个输出的光束之间的相对相位差。

3. 发明授权

US06434289B1 Method and apparatus for confining an optical beam in an optical switch 有权
标题翻译：将光束限制在光开关中的方法和装置
公开(公告)号：US06434289B1
公开(公告)日：2002-08-13
申请号：US09676294
申请日：2000-09-28
申请人： Mario J. Paniccia , Yi Ding , Dmitri E. Nikonov
发明人： Mario J. Paniccia , Yi Ding , Dmitri E. Nikonov
IPC分类号： G02B626
CPC分类号： G02F1/025 , G02B2006/12145
摘要： A device for confining an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed between an optical input port and an optical output port in a semiconductor substrate layer disposed between a plurality of optical confinement layers such that an optical beam is confined to remain within the layers. In one embodiment, a plurality of semiconductor substrate layers are included in the optical switch. Each of the semiconductor substrate layers is disposed between optical confinement layers such that optical beams passing through the semiconductor substrate layers are confined to remain within the semiconductor substrate layers until exiting through respective optical output ports. In one embodiment, integrated circuitry such as driver circuitry, controller circuitry, logic circuitry, coder-decoder circuitry, microprocessor circuitry or the like is included in at least one of the semiconductor substrate layers.
摘要翻译：用于将光束限制在光开关中的装置。在一个实施例中，所公开的光开关包括设置在设置在多个光限制层之间的半导体衬底层中的光输入端口和光输出端口之间的光开关器件，使得光束被限制在残留在层内。在一个实施例中，光开关中包括多个半导体衬底层。每个半导体衬底层设置在光学限制层之间，使得通过半导体衬底层的光束被限制为保留在半导体衬底层内，直到通过相应的光学输出端口离开。在一个实施例中，诸如驱动器电路，控制器电路，逻辑电路，编码器 - 解码器电路，微处理器电路等的集成电路被包括在至少一个半导体衬底层中。

4. 发明授权

US06421473B1 Method and apparatus for switching an optical beam in an integrated circuit die 有权
标题翻译：用于切换集成电路管芯中的光束的方法和装置
公开(公告)号：US06421473B1
公开(公告)日：2002-07-16
申请号：US09676297
申请日：2000-09-28
申请人： Mario J. Paniccia , Yi Ding , Dmitri E. Nikonov
发明人： Mario J. Paniccia , Yi Ding , Dmitri E. Nikonov
IPC分类号： G02B612
CPC分类号： G02F1/025 , G02B2006/12145 , G02F1/313
摘要： A device for confining an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed between an optical input port and an optical output port in a semiconductor substrate layer of an integrated circuit die. The semiconductor substrate layer is disposed between a plurality of optical confinement layers such that an optical beam is confined to remain within the semiconductor substrate layer until exiting through the optical output port. In one embodiment, a plurality of semiconductor substrate layers are included in the optical switch. Each of the semiconductor substrate layers is disposed between optical confinement layers such that optical beams passing through the semiconductor substrate layers are confined to remain within the semiconductor substrate layers until exiting through respective optical output ports. In one embodiment, at least one optical switching device is disposed in each of the plurality of semiconductor substrate layers. In one embodiment, integrated circuitry such as driver circuitry, controller circuitry, logic circuitry, coder-decoder circuitry, microprocessor circuitry or the like is included in at least one of the semiconductor substrate layers.
摘要翻译：用于将光束限制在光开关中的装置。在一个实施例中，所公开的光开关包括设置在集成电路管芯的半导体衬底层中的光输入端口和光输出端口之间的光开关器件。半导体衬底层设置在多个光学限制层之间，使得光束被限制为保持在半导体衬底层内，直到通过光学输出端口离开。在一个实施例中，光开关中包括多个半导体衬底层。每个半导体衬底层设置在光学限制层之间，使得通过半导体衬底层的光束被限制为保留在半导体衬底层内，直到通过相应的光学输出端口离开。在一个实施例中，至少一个光学开关器件设置在多个半导体衬底层的每一个中。在一个实施例中，诸如驱动器电路，控制器电路，逻辑电路，编码器 - 解码器电路，微处理器电路等的集成电路被包括在至少一个半导体衬底层中。

5. 发明授权

US06449405B1 Method and apparatus for switching a plurality of optical beams in an optical switch 失效
标题翻译：用于在光开关中切换多个光束的方法和装置
公开(公告)号：US06449405B1
公开(公告)日：2002-09-10
申请号：US09676293
申请日：2000-09-28
申请人： Mario J. Paniccia , Yi Ding , Dmitri E. Nikonov
发明人： Mario J. Paniccia , Yi Ding , Dmitri E. Nikonov
IPC分类号： G02B642
CPC分类号： G02F1/025 , G02B2006/12145
摘要： A device for confining an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed between an optical input port and an optical output port in a semiconductor substrate layer disposed between a plurality of optical confinement layers such that an optical beam is confined to remain within the layers. In one embodiment, a plurality of semiconductor substrate layers are included in the optical switch. Each of the semiconductor substrate layers is disposed between optical confinement layers such that optical beams passing through the semiconductor substrate layers are confined to remain within the semiconductor substrate layers until exiting through respective optical output ports. In one embodiment, integrated circuitry such as driver circuitry, controller circuitry, logic circuitry, coder-decoder circuitry, microprocessor circuitry or the like is included in at least one of the semiconductor substrate layers.
摘要翻译：用于将光束限制在光开关中的装置。在一个实施例中，所公开的光开关包括设置在设置在多个光限制层之间的半导体衬底层中的光输入端口和光输出端口之间的光开关器件，使得光束被限制在残留在层内。在一个实施例中，光开关中包括多个半导体衬底层。每个半导体衬底层设置在光学限制层之间，使得通过半导体衬底层的光束被限制为保留在半导体衬底层内，直到通过相应的光学输出端口离开。在一个实施例中，诸如驱动器电路，控制器电路，逻辑电路，编码器 - 解码器电路，微处理器电路等的集成电路被包括在至少一个半导体衬底层中。

6. 发明授权

US06566679B2 Integrated semiconductor superlattice optical modulator 有权
公开(公告)号：US06566679B2
公开(公告)日：2003-05-20
申请号：US10246967
申请日：2002-09-18
申请人： Dmitri E. Nikonov , Mario J. Paniccia
发明人： Dmitri E. Nikonov , Mario J. Paniccia
IPC分类号： H01L2978
CPC分类号： B82Y20/00 , G02F1/01708 , G02F1/025 , Y10T24/4051
摘要： Devices and techniques for integrating a silicon superlattice optical modulator on a silicon substrate with other circuit elements. The superlattice structure is designed to convert the indirect bandgap structure of silicon into a direct bandgap structure to achieve more efficient optical absorption. The modulator can be fabricated based on a structure of a circuit element by using standard fabrication processes for silicon integrated circuits such as metal oxide semiconductor processing.

7. 发明授权

US06501092B1 Integrated semiconductor superlattice optical modulator 有权
标题翻译：集成半导体超晶格光调制器
公开(公告)号：US06501092B1
公开(公告)日：2002-12-31
申请号：US09435057
申请日：1999-10-25
申请人： Dmitri E. Nikonov , Mario J. Paniccia
发明人： Dmitri E. Nikonov , Mario J. Paniccia
IPC分类号： H01L2978
CPC分类号： B82Y20/00 , G02F1/01708 , G02F1/025 , Y10T24/4051
摘要： Devices and techniques for integrating a silicon superlattice optical modulator on a silicon substrate with other circuit elements. The superlattice structure is designed to convert the indirect bandgap structure of silicon into a direct bandgap structure to achieve more efficient optical absorption. The modulator can be fabricated based on a structure of a circuit element by using standard fabrication processes for silicon integrated circuits such as metal oxide semiconductor processing.
摘要翻译：将硅超晶格光调制器与硅衬底与其他电路元件集成的器件和技术。超晶格结构被设计为将硅的间接带隙结构转换成直接带隙结构以实现更有效的光吸收。可以通过使用诸如金属氧化物半导体处理的硅集成电路的标准制造工艺，基于电路元件的结构来制造调制器。

8. 发明授权

US06621097B2 Integrated semiconductor superlattice optical modulator 有权
公开(公告)号：US06621097B2
公开(公告)日：2003-09-16
申请号：US10246992
申请日：2002-09-18
申请人： Dmitri E. Nikonov , Mario J. Paniccia
发明人： Dmitri E. Nikonov , Mario J. Paniccia
IPC分类号： H01L2906
CPC分类号： B82Y20/00 , G02F1/01708 , G02F1/025 , Y10T24/4051
摘要： Apparatuses and methods for modulating an optical signal that include a superlattice structure. The superlattice structure is designed to convert the indirect bandgap structure of silicon into a direct bandgap structure to achieve more efficient optical absorption. The apparatus can be fabricated based on a structure of a circuit element by using standard fabrication processes for silicon integrated circuits such as metal oxide semiconductor processing.

9. 发明授权

US06463193B2 Method and apparatus for switching an optical beam using a phase array disposed in a higher doped well region 有权
公开(公告)号：US06463193B2
公开(公告)日：2002-10-08
申请号：US09732033
申请日：2000-12-06
申请人： Mario J. Paniccia , Dmitri E. Nikonov
发明人： Mario J. Paniccia , Dmitri E. Nikonov
IPC分类号： G02B626
CPC分类号： G02F1/025 , G02F2203/48 , G02F2203/50
摘要： A device for switching an optical beam in an optical switch. In one embodiment, the disclosed optical switch includes an optical switching device disposed in a well region in a semiconductor substrate layer. In one embodiment, the well region has a higher doping concentration than the semiconductor substrate layer in which the well region is disposed. The optical switching device is optically coupled to an optical input port and an optical output port of the integrated circuit die.

10. 发明授权

US07215841B2 Extracting phase error in waveguides 有权
标题翻译：提取波导中的相位误差
公开(公告)号：US07215841B2
公开(公告)日：2007-05-08
申请号：US11019718
申请日：2004-12-21
申请人： Everett X. Wang , Sai Yu , Yi Ding , Dmitri E. Nikonov
发明人： Everett X. Wang , Sai Yu , Yi Ding , Dmitri E. Nikonov
IPC分类号： G02B6/26
CPC分类号： G02B6/12007 , G02B6/13
摘要： Provided are a method and a system, wherein optical beams of a plurality of wavelengths are directed through a plurality of optical devices, wherein waveguides comprising the optical devices have different fabrication errors, and wherein the waveguides have a plurality of waveguide lengths and a plurality of waveguide widths. Optical phase errors corresponding to the waveguides are measured by the optical devices. A determination is made of the components of the optical phase errors for the waveguides from the measured phase errors.
摘要翻译：提供了一种方法和系统，其中多个波长的光束被引导通过多个光学器件，其中包括光学器件的波导具有不同的制造误差，并且其中波导具有多个波导长度和多个波导宽度。通过光学器件测量与波导对应的光学相位误差。根据测量的相位误差确定波导的光学相位误差的分量。

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