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1. 发明授权

US07307827B2 Variable capacitor and method of manufacturing variable capacitor 失效
标题翻译：可变电容器及制造可变电容器的方法
公开(公告)号：US07307827B2
公开(公告)日：2007-12-11
申请号：US11104453
申请日：2005-04-13
申请人： Takeaki Shimanouchi , Masahiko Imai , Tadashi Nakatani , Anh Tuan Nguyen , Satoshi Ueda
发明人： Takeaki Shimanouchi , Masahiko Imai , Tadashi Nakatani , Anh Tuan Nguyen , Satoshi Ueda
IPC分类号： H01G5/01 , H01G7/00
CPC分类号： H01G5/18 , H01G5/16 , Y10T29/417 , Y10T29/435
摘要： The first movable electrode is flat, but the second movable electrode is deformed into a convex shape. A dielectric layer is placed on the facing surface of the second movable electrode. By adjusting a voltage to be applied between the first movable electrode and the second movable electrode, an arbitrary distance is secured between the two electrodes by the electrostatic attractive force generated between the two electrodes, and a desired electrostatic capacitance is obtained. When the distance between the two electrodes is shortened, first, at the center, a part of the first movable electrode and a part of the second movable electrode come into contact with each other with the dielectric layer between them. Then, the first movable electrode and the dielectric layer (second movable electrode) come into contact with each other successively from the contact part towards the periphery side, and the contact area gradually increases.
摘要翻译：第一可动电极是平坦的，但是第二可动电极变形为凸形。电介质层被放置在第二可动电极的相对表面上。通过调整施加在第一可动电极和第二可动电极之间的电压，通过在两个电极之间产生的静电吸引力，确保两个电极之间的任意距离，并获得所需的静电电容。当两个电极之间的距离缩短时，首先在中心处，第一可移动电极的一部分和第二可动电极的一部分彼此接触，并且它们之间具有介电层。然后，第一可动电极和电介质层（第二可动电极）从接触部朝向周边依次相接触，接触面积逐渐增大。

2. 发明授权

US07851976B2 Micro movable device and method of making the same using wet etching 有权
标题翻译：微动移动装置及其制造方法
公开(公告)号：US07851976B2
公开(公告)日：2010-12-14
申请号：US12436178
申请日：2009-05-06
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
IPC分类号： H01L41/04 , H01L41/047
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.
摘要翻译：微型移动装置包括：基底基板，固定在基底基板上的固定部分，具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器在与基底基板相对的一侧上。压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构，第一电极膜和第二电极膜之间的第二电极膜和压电膜。可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。

3. 发明申请

US20090212664A1 MICRO MOVABLE DEVICE AND METHOD OF MAKING THE SAME USING WET ETCHING 有权
标题翻译：微移动装置及其使用湿蚀刻制造相同装置的方法
公开(公告)号：US20090212664A1
公开(公告)日：2009-08-27
申请号：US12436178
申请日：2009-05-06
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
IPC分类号： H01L41/047
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.
摘要翻译：微型移动装置包括：基底基板，固定在基底基板上的固定部分，具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器在与基底基板相对的一侧上。压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构，第一电极膜和第二电极膜之间的第二电极膜和压电膜。可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。

4. 发明授权

US07535326B2 Microswitching element 有权
标题翻译：微动开关元件
公开(公告)号：US07535326B2
公开(公告)日：2009-05-19
申请号：US11245007
申请日：2005-10-07
申请人： Tadashi Nakatani , Anh Tuan Nguyen , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Tadashi Nakatani , Anh Tuan Nguyen , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
IPC分类号： H01H51/22
CPC分类号： H01H57/00 , H01H59/0009 , H01H2057/006
摘要： A microswitching element includes a base substrate, a fixing portion attached to the base substrate, and a movable portion including a fixed end fixed to the fixing portion. The movable portion is surrounded by the fixing portion via a slit having a pair of closed ends. The movable portion includes a first surface and a second surface. The first surface faces the base substrate, and the second surface is opposite to the first surface. The microswitching element also includes a movable contact portion provided on the second surface of the movable portion, and a pair of fixed contact electrodes each including a contact surface facing the movable contact portion. The fixed contact electrodes are attached to the fixing portion.
摘要翻译：微型开关元件包括基底基板，附接到基底基板的固定部分以及固定在固定部分上的固定端部的可动部分。可移动部分通过具有一对封闭端的狭缝被固定部分包围。可移动部分包括第一表面和第二表面。第一表面面向基底，第二表面与第一表面相对。微动开关元件还包括设置在可动部分的第二表面上的可动接触部分和一对固定接触电极，每个固定接触电极包括面向可动接触部分的接触表面。固定接触电极附接到固定部分。

5. 发明授权

US07540968B2 Micro movable device and method of making the same using wet etching 有权
标题翻译：微动移动装置及其制造方法
公开(公告)号：US07540968B2
公开(公告)日：2009-06-02
申请号：US11376114
申请日：2006-03-16
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Takeaki Shimanouchi , Masahiko Imai , Satoshi Ueda
IPC分类号： H01L21/302
CPC分类号： H01H57/00 , H01H2057/006 , H01L41/094 , H01L41/316 , Y10T29/42
摘要： A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.
摘要翻译：微型移动装置包括：基底基板，固定在基底基板上的固定部分，具有连接固定部分并且沿着基底基板延伸的固定端的可动部分;以及设置在可动部分和固定部分上的压电驱动器在与基底基板相对的一侧上。压电驱动器具有由与可移动部分和固定部分接触的第一电极膜提供的层压结构，第一电极膜和第二电极膜之间的第二电极膜和压电膜。可移动部分和固定部分中的至少一个设置有沿着压电驱动器延伸的凹槽。

6. 发明申请

US20080174390A1 Micro-switching device and method of manufacturing the same 失效
标题翻译：微动开关装置及其制造方法
公开(公告)号：US20080174390A1
公开(公告)日：2008-07-24
申请号：US12007630
申请日：2008-01-14
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
IPC分类号： H01P1/10 , H01H11/00
CPC分类号： H01H57/00 , H01H59/0009 , H01H61/04 , H01H2057/006 , H01H2061/006 , Y10T29/49105
摘要： A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In manufacturing the micro-switching device., the first electrode is formed on a substrate, and a sacrifice layer is formed on the substrate to cover the first electrode. Then, a first recess and a shallower second recess are formed in the sacrifice layer at a position corresponding to the first electrode. The second electrode is formed to have a portion opposing the first electrode via the sacrifice layer, and to fill the first recess. The third electrode is formed to have a portion opposing the first electrode via the sacrifice layer; and to fill the second recess. Thereafter the sacrifice layer is removed.
摘要翻译：微型开关装置包括固定部分，可移动部分，具有第一和第二触点的第一电极，具有接触第一触点的第三触点的第二电极和与第二触点相对的第四触点的第三电极。在微型开关元件的制造中，第一电极形成在基板上，牺牲层形成在基板上以覆盖第一电极。然后，在与第一电极对应的位置处，在牺牲层中形成第一凹部和较浅的第二凹部。第二电极形成为具有经由牺牲层与第一电极相对的部分，并填充第一凹槽。第三电极通过牺牲层形成为具有与第一电极相对的部分; 并填补第二个休息。然后除去牺牲层。

7. 发明授权

US08106730B2 Microswitching device and method of manufacturing the same 有权
标题翻译：微动开关装置及其制造方法
公开(公告)号：US08106730B2
公开(公告)日：2012-01-31
申请号：US11699378
申请日：2007-01-30
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda
IPC分类号： H01H51/22
CPC分类号： H01H59/0009
摘要： A microswitching device includes a base, a fixed portion joined to the base, a movable portion extending along the base and having a fixed end fixed to the fixed portion, a movable contact electrode film provided on a side of the movable portion opposite the base, a pair of fixed contact electrodes joined to the fixed portion and having a region opposing the movable contact electrode film, a movable driving electrode film provided on a side of the movable portion opposite the base, and a fixed driving electrode having a region opposing the movable driving electrode film. The movable driving electrode film is thinner than the movable contact electrode film. The fixed driving electrode is joined to the fixed portion joined to the base.
摘要翻译：一种微动开关装置，包括基座，与基座连接的固定部分，沿着基座延伸并具有固定在固定部分上的固定端的可动部分，设置在与基座相对的可动部分的一侧的可动接点电极膜，一对固定接触电极，其连接到固定部分并且具有与可动接触电极膜相对的区域;可动驱动电极膜，设置在与基座相对的可动部分的一侧;以及固定驱动电极，具有与可动接触电极膜相对的区域驱动电极膜。可动驱动电极膜比可动接触电极膜薄。固定驱动电极接合到与基座接合的固定部分。

8. 发明授权

US07755460B2 Micro-switching device 失效
标题翻译：微动开关装置
公开(公告)号：US07755460B2
公开(公告)日：2010-07-13
申请号：US11987884
申请日：2007-12-05
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
IPC分类号： H01H51/22
CPC分类号： H01H47/325 , H01H59/0009
摘要： A micro-switching device includes a movable electrode provided on a movable support having an end fixed to a fixing member. The switching device also includes first and second stationary electrodes. The movable electrode includes first and second contact portions. The first stationary electrode includes a third contact portion facing the first contact portion of the movable electrode. The second stationary electrode includes a fourth contact portion facing the second contact portion of the movable electrode. The distance between the first and the third contact portions is smaller than the distance between the second and the fourth contact portions. The switching device further includes a driving mechanism having a driving force generation region provided on the movable support. The center of gravity of the driving force generation region is closer to the second contact portion than to the first contact portion.
摘要翻译：微型开关装置包括可动电极，其设置在具有固定到固定构件的端部的可动支架上。开关装置还包括第一和第二固定电极。可动电极包括第一和第二接触部分。第一固定电极包括面对可动电极的第一接触部分的第三接触部分。第二固定电极包括面对可动电极的第二接触部分的第四接触部分。第一和第三接触部分之间的距离小于第二和第四接触部分之间的距离。开关装置还包括具有设置在可动支架上的驱动力产生区域的驱动机构。驱动力产生区域的重心比第一接触部分更靠近第二接触部分。

9. 发明授权

US07755459B2 Micro-switching device and method of manufacturing the same 失效
标题翻译：微动开关装置及其制造方法
公开(公告)号：US07755459B2
公开(公告)日：2010-07-13
申请号：US12007630
申请日：2008-01-14
申请人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
发明人： Anh Tuan Nguyen , Tadashi Nakatani , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
IPC分类号： H01P1/10 , B81B3/00
CPC分类号： H01H57/00 , H01H59/0009 , H01H61/04 , H01H2057/006 , H01H2061/006 , Y10T29/49105
摘要： A micro-switching device includes a fixing portion, a movable portion, a first electrode with first and second contacts, a second electrode with a third contact contacting the first contact, and a third electrode with a fourth contact opposing the second contact. In manufacturing the micro-switching device., the first electrode is formed on a substrate, and a sacrifice layer is formed on the substrate to cover the first electrode. Then, a first recess and a shallower second recess are formed in the sacrifice layer at a position corresponding to the first electrode. The second electrode is formed to have a portion opposing the first electrode via the sacrifice layer, and to fill the first recess. The third electrode is formed to have a portion opposing the first electrode via the sacrifice layer; and to fill the second recess. Thereafter the sacrifice layer is removed.
摘要翻译：微型开关装置包括固定部分，可移动部分，具有第一和第二触点的第一电极，具有接触第一触点的第三触点的第二电极和与第二触点相对的第四触点的第三电极。在微型开关元件的制造中，第一电极形成在基板上，牺牲层形成在基板上以覆盖第一电极。然后，在与第一电极对应的位置处，在牺牲层中形成第一凹部和较浅的第二凹部。第二电极形成为具有经由牺牲层与第一电极相对的部分，并填充第一凹部。第三电极通过牺牲层形成为具有与第一电极相对的部分; 并填补第二个休息。然后除去牺牲层。

10. 发明申请

US20080210531A1 Micro-switching device and manufacturing method for the same 有权
标题翻译：微开关器件及其制造方法相同
公开(公告)号：US20080210531A1
公开(公告)日：2008-09-04
申请号：US11987885
申请日：2007-12-05
申请人： Tadashi Nakatani , Anh Tuan Nguyen , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
发明人： Tadashi Nakatani , Anh Tuan Nguyen , Satoshi Ueda , Yu Yonezawa , Naoyuki Mishima
IPC分类号： H01H57/00 , H01H11/00
CPC分类号： H01H59/0009 , H01H2059/0081 , Y10T29/49105
摘要： A micro-switching device includes a base substrate, a fixing member on the substrate, a movable part having an end fixed to the fixing member and extending along the substrate, a movable contact electrode provided on the movable part and facing away from the substrate, a pair of stationary contact electrodes bonded to the fixing member and including a region facing the movable contact electrode, a movable driver electrode between the movable contact electrode and the stationary end on the movable part at a surface facing away from the substrate, and a stationary driver electrode bonded to the fixing member and including an elevated portion having a region facing the movable driver electrode. The elevated portion is provided with steps facing the movable driver electrode, where the steps are closer to the substrate as they are farther from the movable contact electrode.
摘要翻译：微型开关装置包括基底基板，基板上的固定部件，具有固定在固定部件上并沿着基板延伸的端部的可动部件，设置在可动部件上并且背离基板的可动接触电极，一对固定接触电极，其固定在所述固定部件上并且包括与所述可动接触电极相对的区域，所述可动接触电极与所述可动部分之间的位于所述可移动部分的背离所述基板的表面的可动驱动电极，驱动电极结合到所述固定构件并且包括具有面向所述可移动驱动电极的区域的升高部分。升高部分设置有面向可移动驱动电极的台阶，其中台阶比离开可动接触电极更靠近基板。

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