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    • 3. 发明授权
    • Method for designing and manufacturing a PMOS device with drain junction breakdown point located for reduced drain breakdown voltage walk-in
    • 用于设计和制造具有漏极结击穿点的PMOS器件的方法,用于降低漏极击穿电压
    • US08086979B2
    • 2011-12-27
    • US12480916
    • 2009-06-09
    • Douglas BrisbinAndrew Strachan
    • Douglas BrisbinAndrew Strachan
    • G06F17/50
    • H01L29/0847H01L29/7835
    • A PMOS device can be designed and manufactured in accordance with the invention to locate its drain junction breakdown point and maximum impact ionization point to reduce or eliminate drain breakdown voltage walk-in. In some embodiments, the drain junction breakdown point and maximum impact ionization point are located sufficiently far from the gate that the device exhibits no significant drain breakdown voltage walk-in. The device can be a high voltage power transistor having an extended drain region including a P-type lightly doped drain (P-LDD) implant, with drain junction breakdown and maximum impact ionization points appropriately located by controlling the implant dose employed to produce the P-LDD implant. Other aspects of the invention are methods for designing a PMOS device including by determining relative locations of the gate and at least one of the drain junction breakdown and maximum impact ionization points to reduce drain breakdown voltage walk-in, and methods for manufacturing integrated circuits including any embodiment of the PMOS device of the invention.
    • 可以根据本发明设计和制造PMOS器件以定位其漏极结击穿点和最大冲击电离点,以减少或消除漏极击穿电压。 在一些实施例中,漏极结击穿点和最大冲击电离点位于距离栅极足够远的位置,器件不会显示出显着的漏极击穿电压。 该器件可以是具有包括P型轻掺杂漏极(P-LDD)注入的扩展漏极区域的高压功率晶体管,漏极结击穿和最大冲击电离点通过控制用于产生P的植入剂量来适当地定位 -LDD植入物。 本发明的其他方面是用于设计PMOS器件的方法,包括通过确定栅极的相对位置和漏极结击穿和最大冲击电离点中的至少一个来减少漏极击穿电压的走向,以及用于制造集成电路的方法,包括 本发明的PMOS器件的任何实施例。
    • 4. 发明申请
    • METHOD OF FORMING A ROBUST, MODULAR MIM CAPACITOR WITH IMPROVED CAPACITANCE DENSITY
    • 形成具有改善电容密度的稳定的模块化MIM电容器的方法
    • US20130069200A1
    • 2013-03-21
    • US13239192
    • 2011-09-21
    • Venkat RaghavanAndrew Strachan
    • Venkat RaghavanAndrew Strachan
    • H01L29/92H01L21/02
    • H01L28/90
    • A method of forming a capacitor structure comprises: forming a doped polysilicon layer on an underlying dielectric layer; forming a dielectric stack on the doped polysilicon layer; forming a contact hole in the dielectric stack to expose a surface region of the doped polysilsicon layer; forming a conductive contact plug that fills the contact hole and is in contact with the exposed surface of the doped polysilicon layer; forming a plurality of trenches in the dielectric stack such that each trench exposes a corresponding surface region of the doped polysilicon layer; forming a conductive bottom capacitor plate on exposed surfaces of the of the dielectric stack an don exposed surfaces of the doped polysilicon layer; forming a capacitor dielectric layer on the bottom capacitor plate; and forming a conductive top capacitor plate on the capacitor dielectric layer.
    • 形成电容器结构的方法包括:在下面的介电层上形成掺杂的多晶硅层; 在所述掺杂多晶硅层上形成电介质叠层; 在所述电介质堆叠中形成接触孔以暴露所述掺杂聚硅氧烷层的表面区域; 形成填充所述接触孔并与所述掺杂多晶硅层的暴露表面接触的导电接触插塞; 在所述电介质堆叠中形成多个沟槽,使得每个沟槽暴露所述掺杂多晶硅层的对应表面区域; 在所述电介质堆叠的暴露表面上形成导电底部电容器板,以及所述掺杂多晶硅层的暴露表面; 在底部电容器板上形成电容器电介质层; 以及在所述电容器介电层上形成导电顶部电容器板。
    • 7. 发明申请
    • Method for Designing and Manufacturing a PMOS Device with Drain Junction Breakdown Point Located for Reduced Drain Breakdown Voltage Walk-in
    • 用于设计和制造具有漏极结点故障点的PMOS器件的方法,用于降低漏极击穿电压
    • US20090254872A1
    • 2009-10-08
    • US12480916
    • 2009-06-09
    • Douglas BrisbinAndrew Strachan
    • Douglas BrisbinAndrew Strachan
    • G06F17/50
    • H01L29/0847H01L29/7835
    • A PMOS device can be designed and manufactured in accordance with the invention to locate its drain junction breakdown point and maximum impact ionization point to reduce or eliminate drain breakdown voltage walk-in. In some embodiments, the drain junction breakdown point and maximum impact ionization point are located sufficiently far from the gate that the device exhibits no significant drain breakdown voltage walk-in. The device can be a high voltage power transistor having an extended drain region including a P-type lightly doped drain (P-LDD) implant, with drain junction breakdown and maximum impact ionization points appropriately located by controlling the implant dose employed to produce the P-LDD implant. Other aspects of the invention are methods for designing a PMOS device including by determining relative locations of the gate and at least one of the drain junction breakdown and maximum impact ionization points to reduce drain breakdown voltage walk-in, and methods for manufacturing integrated circuits including any embodiment of the PMOS device of the invention.
    • 可以根据本发明设计和制造PMOS器件以定位其漏极结击穿点和最大冲击电离点,以减少或消除漏极击穿电压。 在一些实施例中,漏极结击穿点和最大冲击电离点位于距离栅极足够远的位置,器件不会显示出显着的漏极击穿电压。 该器件可以是具有包括P型轻掺杂漏极(P-LDD)注入的扩展漏极区域的高压功率晶体管,漏极结击穿和最大冲击电离点通过控制用于产生P的植入剂量来适当地定位 -LDD植入物。 本发明的其他方面是用于设计PMOS器件的方法,包括通过确定栅极的相对位置和漏极结击穿和最大冲击电离点中的至少一个来减少漏极击穿电压的走向,以及用于制造集成电路的方法,包括 本发明的PMOS器件的任何实施例。
    • 8. 发明授权
    • PMOS device with drain junction breakdown point located for reduced drain breakdown voltage walk-in and method for designing and manufacturing such device
    • 具有漏极结击穿点的PMOS器件用于降低漏极击穿电压,以及用于设计和制造这种器件的方法
    • US07180140B1
    • 2007-02-20
    • US10825833
    • 2004-04-16
    • Douglas BrisbinAndrew Strachan
    • Douglas BrisbinAndrew Strachan
    • H01L29/76
    • H01L29/0847H01L29/7835
    • A PMOS device can be designed and manufactured in accordance with the invention to locate its drain junction breakdown point and maximum impact ionization point to reduce or eliminate drain breakdown voltage walk-in. In some embodiments, the drain junction breakdown point and maximum impact ionization point are located sufficiently far from the gate that the device exhibits no significant drain breakdown voltage walk-in. The device can be a high voltage power transistor having an extended drain region including a P-type lightly doped drain (P-LDD) implant, with drain junction breakdown and maximum impact ionization points appropriately located by controlling the implant dose employed to produce the P-LDD implant. Other aspects of the invention are methods for designing a PMOS device including by determining relative locations of the gate and at least one of the drain junction breakdown and maximum impact ionization points to reduce drain breakdown voltage walk-in, and methods for manufacturing integrated circuits including any embodiment of the PMOS device of the invention.
    • 可以根据本发明设计和制造PMOS器件以定位其漏极结击穿点和最大冲击电离点,以减少或消除漏极击穿电压。 在一些实施例中,漏极结击穿点和最大冲击电离点位于距离栅极足够远的位置,器件不会显示出显着的漏极击穿电压。 该器件可以是具有包括P型轻掺杂漏极(P-LDD)注入的扩展漏极区的高压功率晶体管,漏极结击穿和最大冲击电离点通过控制用于产生P的植入剂量来适当地定位 -LDD植入物。 本发明的其他方面是用于设计PMOS器件的方法,包括通过确定栅极的相对位置和漏极结击穿和最大冲击电离点中的至少一个来减少漏极击穿电压的走向,以及用于制造集成电路的方法,包括 本发明的PMOS器件的任何实施例。
    • 10. 发明申请
    • Method for designing and manufacturing a PMOS device with drain junction breakdown point located for reduced drain breakdown voltage walk-in
    • 用于设计和制造具有漏极结击穿点的PMOS器件的方法,用于降低漏极击穿电压
    • US20070264768A1
    • 2007-11-15
    • US11705975
    • 2007-02-14
    • Douglas BrisbinAndrew Strachan
    • Douglas BrisbinAndrew Strachan
    • H01L21/8238
    • H01L29/0847H01L29/7835
    • A PMOS device can be designed and manufactured in accordance with the invention to locate its drain junction breakdown point and maximum impact ionization point to reduce or eliminate drain breakdown voltage walk-in. In some embodiments, the drain junction breakdown point and maximum impact ionization point are located sufficiently far from the gate that the device exhibits no significant drain breakdown voltage walk-in. The device can be a high voltage power transistor having an extended drain region including a P-type lightly doped drain (P-LDD) implant, with drain junction breakdown and maximum impact ionization points appropriately located by controlling the implant dose employed to produce the P-LDD implant. Other aspects of the invention are methods for designing a PMOS device including by determining relative locations of the gate and at least one of the drain junction breakdown and maximum impact ionization points to reduce drain breakdown voltage walk-in, and methods for manufacturing integrated circuits including any embodiment of the PMOS device of the invention.
    • 可以根据本发明设计和制造PMOS器件以定位其漏极结击穿点和最大冲击电离点,以减少或消除漏极击穿电压。 在一些实施例中,漏极结击穿点和最大冲击电离点位于距离栅极足够远的位置,器件不会显示出显着的漏极击穿电压。 该器件可以是具有包括P型轻掺杂漏极(P-LDD)注入的扩展漏极区域的高压功率晶体管,漏极结击穿和最大冲击电离点通过控制用于产生P的植入剂量来适当地定位 -LDD植入物。 本发明的其他方面是用于设计PMOS器件的方法,包括通过确定栅极的相对位置和漏极结击穿和最大冲击电离点中的至少一个来减少漏极击穿电压的走向,以及用于制造集成电路的方法,包括 本发明的PMOS器件的任何实施例。