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1. 发明申请

US20070272669A1 Laser Multiplexing 审中-公开
标题翻译：激光多路复用
公开(公告)号：US20070272669A1
公开(公告)日：2007-11-29
申请号：US10589926
申请日：2005-02-21
申请人： Andrew Comley , Samir Ellwi , Nicolas Hay , Matthew Henry
发明人： Andrew Comley , Samir Ellwi , Nicolas Hay , Matthew Henry
IPC分类号： G03F7/20
CPC分类号： G02B27/0955 , B23K26/0604 , B23K26/0608 , B23K26/067 , B82Y10/00 , G02B27/0905 , G02B27/0972 , G03F7/70033 , G03F7/7005
摘要： A laser multiplexing system and method for use with high power pulsed lasers in Extreme Ultraviolet Lithography is disclosed. In a first embodiment, a high power EUV laser multiplexing element for laser produced plasma generation has a compound lens with at least two focusing elements arranged to focus at least two respective laser beams to a focal point on a common workpiece. In a second embodiment, a laser multiplexing apparatus has at least two pulsed laser sources for generating pulsed laser beams and a temporal multiplexing element arranged to temporally interleave at least two pulsed laser beams. In a third embodiment, a laser multiplexing assembly comprises a beam shaping element in which the beam shaping element is arranged to direct a first laser beam along an axis common with a second laser beam axis onto a common focusing element arranged about the common axis.
摘要翻译：公开了一种用于极紫外光刻技术中的大功率脉冲激光器的激光复用系统和方法。在第一实施例中，用于激光产生等离子体产生的高功率EUV激光复用元件具有复合透镜，其具有布置成将至少两个相应激光束聚焦到公共工件上的焦点的至少两个聚焦元件。在第二实施例中，激光多路复用装置具有用于产生脉冲激光束的至少两个脉冲激光源和布置成在时间上交错至少两个脉冲激光束的时间复用元件。在第三实施例中，激光多路复用组件包括光束整形元件，其中光束整形元件布置成将第一激光束沿着与第二激光束轴共同的轴线引导到围绕公共轴线布置的公共聚焦元件上。

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