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    • 6. 发明授权
    • Semiconductor component and methods for producing a semiconductor component
    • 半导体元件及其制造方法
    • US08637378B2
    • 2014-01-28
    • US13156970
    • 2011-06-09
    • Andreas MeiserWalter HartnerHermann GruberDietrich BonartThomas Gross
    • Andreas MeiserWalter HartnerHermann GruberDietrich BonartThomas Gross
    • H01L21/763H01L27/105
    • H01L21/76802H01L21/76286H01L21/76877H01L21/84H01L27/1203
    • A semiconductor component includes a semiconductor body, in which are formed: a substrate of a first conduction type, a buried semiconductor layer of a second conduction type arranged on the substrate, and a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units arranged laterally alongside one another are provided. The buried semiconductor layer is part of at least one semiconductor functional unit, the semiconductor functional units being electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer, and the substrate. The isolation structure includes at least one trench and an electrically conductive contact to the substrate, the contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench.
    • 半导体部件包括半导体本体,其中形成有:第一导电类型的衬底,布置在衬底上的第二导电类型的埋入半导体层,以及布置在埋置的第三导电类型的功能单元半导体层 半导体层,其中设置有横向彼此排列的至少两个半导体功能单元。 掩埋半导体层是至少一个半导体功能单元的一部分,半导体功能单元通过渗透功能单元半导体层,埋入半导体层和基板的隔离结构彼此电绝缘。 隔离结构包括至少一个沟槽和与衬底的导电接触,与衬底的接触通过至少一个沟槽与功能单元半导体层和掩埋层电绝缘。
    • 7. 发明授权
    • Semiconductor component and methods for producing a semiconductor component
    • 半导体元件及其制造方法
    • US08476734B2
    • 2013-07-02
    • US13156987
    • 2011-06-09
    • Andreas MeiserWalter HartnerHermann GruberDietrich BonartThomas Gross
    • Andreas MeiserWalter HartnerHermann GruberDietrich BonartThomas Gross
    • H01L21/763H01L27/105
    • H01L21/76802H01L21/76286H01L21/76877H01L21/84H01L27/1203
    • A semiconductor component includes a semiconductor body, in which are formed: a substrate of a first conduction type, a buried semiconductor layer of a second conduction type arranged on the substrate, and a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units arranged laterally alongside one another are provided. The buried semiconductor layer is part of at least one semiconductor functional unit, the semiconductor functional units being electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer, and the substrate. The isolation structure includes at least one trench and an electrically conductive contact to the substrate, the contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench.
    • 半导体部件包括半导体本体,其中形成有:第一导电类型的衬底,布置在衬底上的第二导电类型的埋入半导体层,以及布置在埋置的第三导电类型的功能单元半导体层 半导体层,其中设置有横向彼此排列的至少两个半导体功能单元。 掩埋半导体层是至少一个半导体功能单元的一部分,半导体功能单元通过渗透功能单元半导体层,埋入半导体层和基板的隔离结构彼此电绝缘。 隔离结构包括至少一个沟槽和与衬底的导电接触,与衬底的接触通过至少一个沟槽与功能单元半导体层和掩埋层电绝缘。
    • 8. 发明申请
    • SEMICONDUCTOR COMPONENT AND METHODS FOR PRODUCING A SEMICONDUCTOR COMPONENT
    • 半导体元件的制造方法和半导体元件的制造方法
    • US20110233721A1
    • 2011-09-29
    • US13156987
    • 2011-06-09
    • Andreas MeiserWalter HartnerHermann GruberDietrich BonartThomas Gross
    • Andreas MeiserWalter HartnerHermann GruberDietrich BonartThomas Gross
    • H01L29/06
    • H01L21/76802H01L21/76286H01L21/76877H01L21/84H01L27/1203
    • A semiconductor component includes a semiconductor body, in which are formed: a substrate of a first conduction type, a buried semiconductor layer of a second conduction type arranged on the substrate, and a functional unit semiconductor layer of a third conduction type arranged on the buried semiconductor layer, in which at least two semiconductor functional units arranged laterally alongside one another are provided. The buried semiconductor layer is part of at least one semiconductor functional unit, the semiconductor functional units being electrically insulated from one another by an isolation structure which permeates the functional unit semiconductor layer, the buried semiconductor layer, and the substrate. The isolation structure includes at least one trench and an electrically conductive contact to the substrate, the contact to the substrate being electrically insulated from the functional unit semiconductor layer and the buried layer by the at least one trench.
    • 半导体部件包括半导体本体,其中形成有:第一导电类型的衬底,布置在衬底上的第二导电类型的埋入半导体层,以及布置在埋置的第三导电类型的功能单元半导体层 半导体层,其中设置有横向彼此排列的至少两个半导体功能单元。 掩埋半导体层是至少一个半导体功能单元的一部分,半导体功能单元通过渗透功能单元半导体层,埋入半导体层和基板的隔离结构彼此电绝缘。 隔离结构包括至少一个沟槽和与衬底的导电接触,与衬底的接触通过至少一个沟槽与功能单元半导体层和掩埋层电绝缘。