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    • 4. 发明授权
    • Measuring optical phase
    • 测量光学相位
    • US06765681B1
    • 2004-07-20
    • US10119501
    • 2002-04-10
    • John N. SweetserAnders Grunnet-Jepsen
    • John N. SweetserAnders Grunnet-Jepsen
    • G01B902
    • G01M11/0264G01M11/0271
    • The phase (and amplitude) of a wave front may be accurately measured using knowledge of the wave front of an optical field generated by an optical element, permitting the determination of the spatial transfer function of that optical element. As a device under test is scanned across an aperture plate having slits, variations in the relative amplitude and phase of light passing through the slits are affected by the optical properties of the device under test, in turn affecting the interference pattern at a detector. Changes in the amplitude and phase of the detected signal are directly and uniquely related to the transfer function of the device under test.
    • 可以使用光学元件产生的光场的波前的知识来精确地测量波前的相位(和幅度),从而允许确定该光学元件的空间传递函数。 由于被测设备被扫描穿过具有狭缝的光阑,因此通过狭缝的光的相对幅度和相位的变化受被测设备的光学特性的影响,进而影响检测器处的​​干涉图案。 检测到的信号的幅度和相位的变化与被测器件的传递函数直接且唯一相关。
    • 6. 发明授权
    • Method and apparatus for measuring optical phase and amplitude
    • 用于测量光学相位和振幅的方法和装置
    • US06781701B1
    • 2004-08-24
    • US10116794
    • 2002-04-05
    • John N. SweetserAnders Grunnet-Jepsen
    • John N. SweetserAnders Grunnet-Jepsen
    • G01B902
    • G01M11/0292
    • A method, apparatus, and system for measuring optical phase and amplitude properties of an output optical field to characterize diffractive, refractive, and other optical elements to estimate, measure, and characterize an optical transfer function are disclosed herein. In a representative embodiment, a light source may generate an optical field incident to an optical element, such as a diffraction grating. An aperture plate may be positioned relative to the optical element to allow translation of at least one of the aperture plate or the optical element in a plane transverse to a surface normal of the optical element, resulting in an output optical field having spatially dependant amplitude and phase characteristics related to a position on the optical element and to the optical field incident to the optical element. The output optical field may then be detected and analyzed to characterize the optical transfer function of the optical element.
    • 本文公开了一种用于测量输出光场的光学相位和幅度属性以表征衍射,折射和其他光学元件以估计,测量和表征光学传递函数的方法,装置和系统。 在代表性的实施例中,光源可以产生入射到诸如衍射光栅的光学元件的光场。 孔板可以相对于光学元件定位,以允许在与光学元件的表面法线横向的平面中平移孔板或光学元件中的至少一个,导致具有空间依赖幅度的输出光场和 与光学元件上的位置和入射到光学元件的光场相关的相位特性。 然后可以检测和分析输出光场以表征光学元件的光学传递函数。