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    • 3. 发明授权
    • Process of patterning small scale devices
    • 图案化小规模器件的工艺
    • US07939247B2
    • 2011-05-10
    • US12201993
    • 2008-08-29
    • An ChenZoran Krivokapic
    • An ChenZoran Krivokapic
    • G03F7/00G03F1/00
    • H01L21/0337H01L21/0338H01L21/32139H01L29/16H01L29/1606
    • A process is provided that includes forming a first mask on an underlying layer, where the mask has two adjacent portions with an open gap therebetween, and depositing a second mask material within the open gap and at an inclined angle with respect to an upper surface of the underlying layer to form a second mask. In another implementation, a process is provided that includes forming a first mask on an underlying layer, where the mask has a pattern that includes an open gap, and depositing a second mask material within the open gap to form a second mask, where particles of the second mask material are directed in parallel or substantially in parallel to a line at an inclined angle with respect to an upper surface of the underlying layer.
    • 提供了一种方法,其包括在下层上形成第一掩模,其中掩模具有两个相邻部分,其间具有开放间隙,并且将第二掩模材料沉积在开放间隙内并且以相对于 底层形成第二个掩模。 在另一个实施方案中,提供了一种方法,其包括在下层上形成第一掩模,其中掩模具有包括开放间隙的图案,以及在开口间隙内沉积第二掩模材料以形成第二掩模, 第二掩模材料相对于下层的上表面以倾斜的角度平行地或基本平行于一条直线引导。
    • 4. 发明授权
    • Crossbar array memory elements and related read methods
    • Crossbar数组内存元素和相关读取方法
    • US08605481B2
    • 2013-12-10
    • US12895043
    • 2010-09-30
    • An ChenZoran Krivokapic
    • An ChenZoran Krivokapic
    • G11C11/00
    • G11C11/413G11C8/10
    • Apparatus and related fabrication and read methods are provided for crossbar memory elements. An exemplary crossbar memory element includes a crossbar array structure including a set of access lines, unswitched resistance elements coupled electrically in series between the set of access lines and a reference voltage node, and switched resistance elements coupled electrically in series between the first set of access lines and the reference voltage node. To read from a selected access line, the switched resistance element associated with that access line is enabled while the remaining switched resistance elements are disabled.
    • 为交叉开关存储器元件提供了装置和相关的制造和读取方法。 示例性的横向存储器元件包括交叉开关阵列结构,其包括一组接入线,电连接在该组接入线路和参考电压节点之间的非开关电阻元件以及电连接在第一组接入之间的开关电阻元件 线路和参考电压节点。 要从选定的接入线路读取,与该接入线路相关联的开关电阻元件被使能,而剩余的开关电阻元件被禁用。
    • 9. 发明申请
    • PROCESS OF PATTERNING SMALL SCALE DEVICES
    • 绘制小规模设备的过程
    • US20100055577A1
    • 2010-03-04
    • US12201993
    • 2008-08-29
    • An ChenZoran Krivokapic
    • An ChenZoran Krivokapic
    • G03F1/16
    • H01L21/0337H01L21/0338H01L21/32139H01L29/16H01L29/1606
    • A process is provided that includes forming a first mask on an underlying layer, where the mask has two adjacent portions with an open gap therebetween, and depositing a second mask material within the open gap and at an inclined angle with respect to an upper surface of the underlying layer to form a second mask. In another implementation, a process is provided that includes forming a first mask on an underlying layer, where the mask has a pattern that includes an open gap, and depositing a second mask material within the open gap to form a second mask, where particles of the second mask material are directed in parallel or substantially in parallel to a line at an inclined angle with respect to an upper surface of the underlying layer.
    • 提供了一种方法,其包括在下层上形成第一掩模,其中掩模具有两个相邻部分,其间具有开放间隙,并且将第二掩模材料沉积在开放间隙内并且以相对于 底层形成第二个掩模。 在另一个实施方案中,提供了一种方法,其包括在下层上形成第一掩模,其中掩模具有包括开放间隙的图案,以及在开口间隙内沉积第二掩模材料以形成第二掩模, 第二掩模材料相对于下层的上表面以倾斜的角度平行地或基本平行于一条直线引导。