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    • 2. 发明授权
    • Integrated circuit inductor
    • 集成电路电感
    • US5227659A
    • 1993-07-13
    • US815834
    • 1991-12-27
    • Allyn E. Hubbard
    • Allyn E. Hubbard
    • H01L27/08
    • H01L27/08
    • An integrated circuit inductor is disclosed which can be fabricated by adding simple follow-on steps to standard fabrication line processes. In a preferred embodiment, standard CMOS technology is used to fabricate a multi-turn coil having its axis normal to the layers of oxide, polysilicon, and metal which form the coil. For a coil 100 microns on a side, an inductance on the order of 10 nH can be achieved. By including a magnetic core in the design using the disclosed procedure, this value can be increased to as high as 0.1 mH. Thus, inductor values ranging from 0.001 mH-0.1 mH can be physically implemented as integrated, highly-miniaturized CMOS designs for analog operation in the range of approximately 1-100 MHz.
    • 公开了一种集成电路电感器,其可以通过向标准制造线工艺添加简单的后续步骤来制造。 在优选实施例中,使用标准CMOS技术来制造具有垂直于形成线圈的氧化物层,多晶硅层和金属层的多匝线圈。 对于一侧为100微米的线圈,可以实现10 nH级的电感。 通过使用所公开的程序在设计中包括磁芯,该值可以增加到高达0.1mH。 因此,范围从0.001 mH-0.1 mH的电感值可以物理地实现为集成的高度小型化CMOS设计,用于大约1-100 MHz范围内的模拟操作。