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1. 发明授权

US06783630B2 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling 失效
标题翻译：用于快速热处理（RTP）的分段冷板用于传导冷却
公开(公告)号：US06783630B2
公开(公告)日：2004-08-31
申请号：US10228788
申请日：2002-08-27
申请人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
发明人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
IPC分类号： H01L2100
CPC分类号： C23C16/463 , C23C16/52 , H01L21/67109
摘要： The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and method are disclosed which provides a segmented cold plate situated within a process chamber, wherein a plurality of segments of the cold plate are operable to radially translate between an engaged position and a disengaged position, wherein a substrate holder may pass between the plurality of segments when the segments are in the disengaged position. According to another aspect, an elevator is operable to linearly translate a substrate residing on a substrate holder between a heating position proximate to a heater assembly and a cooling position proximate to the segmented cold plate. According to another aspect, the cold plate comprises a plurality of holes through which one or more gases may flow, wherein an amount or mixture of the one or more gases is controllable via a controller, and wherein one or more temperature sensors are operable to provide temperature feedback at the substrate. According to another aspect the substrate resides within close proximity to the cold plate, wherein when gas is flowed through the holes, the substrate is cooled in the viscous regime, and the amount and/or mixture of gases flowed through the holes is controlled, based, at least in part, on the one or more measured temperatures.
摘要翻译：本发明涉及半导体热处理系统和用于热冷却半导体衬底的装置。根据本发明的一个方面，公开了一种半导体热处理系统及相关设备和方法，其提供位于处理室内的分段冷板，其中冷板的多个段可操作以在啮合位置和脱离位置，其中当所述段处于分离位置时，衬底保持器可以在所述多个段之间通过。根据另一方面，电梯可操作以将位于基板保持器上的基板线性平移在靠近加热器组件的加热位置和靠近分段冷板的冷却位置之间。根据另一方面，冷板包括一个或多个气体可流过的多个孔，其中一个或多个气体的量或混合物可经由控制器控制，并且其中一个或多个温度传感器可操作以提供衬底温度反馈。根据另一方面，衬底位于紧邻冷板的位置，其中当气体流过孔时，衬底在粘性状态下被冷却，并且基于孔流动的气体的量和/或混合物被基于，至少部分地基于一个或多个测量的温度。

2. 发明申请

US20050026447A1 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling 失效
标题翻译：用于快速热处理（RTP）的分段冷板用于传导冷却
公开(公告)号：US20050026447A1
公开(公告)日：2005-02-03
申请号：US10879463
申请日：2004-06-29
申请人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
发明人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
IPC分类号： C23C16/52 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： C23C16/463 , C23C16/52 , H01L21/67109
摘要： The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and method are disclosed which provides a segmented cold plate situated within a process chamber, wherein a plurality of segments of the cold plate are operable to radially translate between an engaged position and a disengaged position, wherein a substrate holder may pass between the plurality of segments when the segments are in the disengaged position. According to another aspect, an elevator is operable to linearly translate a substrate residing on a substrate holder between a heating position proximate to a heater assembly and a cooling position proximate to the segmented cold plate. According to another aspect, the cold plate comprises a plurality of holes through which one or more gases may flow, wherein an amount or mixture of the one or more gases is controllable via a controller, and wherein one or more temperature sensors are operable to provide temperature feedback at the substrate. According to another aspect the substrate resides within close proximity to the cold plate, wherein when gas is flowed through the holes, the substrate is cooled in the viscous regime, and the amount and/or mixture of gases flowed through the holes is controlled, based, at least in part, on the one or more measured temperatures.
摘要翻译：本发明涉及半导体热处理系统和用于热冷却半导体衬底的装置。根据本发明的一个方面，公开了一种半导体热处理系统及相关设备和方法，其提供位于处理室内的分段冷板，其中冷板的多个段可操作以在啮合位置和脱离位置，其中当所述段处于分离位置时，衬底保持器可以在所述多个段之间通过。根据另一方面，电梯可操作以将位于基板保持器上的基板线性平移在靠近加热器组件的加热位置和靠近分段冷板的冷却位置之间。根据另一方面，冷板包括一个或多个气体可流过的多个孔，其中一个或多个气体的量或混合物可经由控制器控制，并且其中一个或多个温度传感器可操作以提供衬底温度反馈。根据另一方面，衬底位于紧邻冷板的位置，其中当气体流过孔时，衬底在粘性状态下被冷却，并且基于孔流动的气体的量和/或混合物被基于，至少部分地基于一个或多个测量的温度。

3. 发明授权

US07166187B2 Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling 失效
标题翻译：用于快速热处理（RTP）的分段冷板用于传导冷却
公开(公告)号：US07166187B2
公开(公告)日：2007-01-23
申请号：US10879463
申请日：2004-06-29
申请人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
发明人： Ali Shajii , David Tao , Mathias Koch , Douglas Brown , Hossein Zarrin
IPC分类号： H01L21/00 , C23C16/00
CPC分类号： C23C16/463 , C23C16/52 , H01L21/67109
摘要： The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and method are disclosed which provides a segmented cold plate situated within a process chamber, wherein a plurality of segments of the cold plate are operable to radially translate between an engaged position and a disengaged position, wherein a substrate holder may pass between the plurality of segments when the segments are in the disengaged position. According to another aspect, an elevator is operable to linearly translate a substrate residing on a substrate holder between a heating position proximate to a heater assembly and a cooling position proximate to the segmented cold plate. According to another aspect, the cold plate comprises a plurality of holes through which one or more gases may flow, wherein an amount or mixture of the one or more gases is controllable via a controller, and wherein one or more temperature sensors are operable to provide temperature feedback at the substrate. According to another aspect the substrate resides within close proximity to the cold plate, wherein when gas is flowed through the holes, the substrate is cooled in the viscous regime, and the amount and/or mixture of gases flowed through the holes is controlled, based, at least in part, on the one or more measured temperatures.
摘要翻译：本发明涉及半导体热处理系统和用于热冷却半导体衬底的装置。根据本发明的一个方面，公开了一种半导体热处理系统及相关设备和方法，其提供位于处理室内的分段冷板，其中冷板的多个段可操作以在啮合位置和脱离位置，其中当所述段处于分离位置时，衬底保持器可以在所述多个段之间通过。根据另一方面，电梯可操作以将位于基板保持器上的基板线性平移在靠近加热器组件的加热位置和靠近分段冷板的冷却位置之间。根据另一方面，冷板包括一个或多个气体可流过的多个孔，其中一个或多个气体的量或混合物可经由控制器控制，并且其中一个或多个温度传感器可操作以提供衬底温度反馈。根据另一方面，衬底位于紧邻冷板的位置，其中当气体流过孔时，衬底在粘性状态下被冷却，并且基于孔流动的气体的量和/或混合物被基于，至少部分地基于一个或多个测量的温度。

4. 发明授权

US09029809B2 Movable microchamber system with gas curtain 有权
标题翻译：带气帘的可移动微型系统
公开(公告)号：US09029809B2
公开(公告)日：2015-05-12
申请号：US13690132
申请日：2012-11-30
申请人： Digby Pun , Ali Shajii , Andrew B. Cowe , Raymond Ellis , James T. McWhirter
发明人： Digby Pun , Ali Shajii , Andrew B. Cowe , Raymond Ellis , James T. McWhirter
IPC分类号： H01L21/268 , H01L21/324 , B23K26/12 , H01L31/18
CPC分类号： B23K26/127 , B23K26/12 , H01L21/268 , H01L21/324 , H01L31/18 , H01L31/1864 , Y10T137/0318
摘要： A movable microchamber system with a gas curtain is disclosed. The microchamber system has a top member with a light-access feature and a stage assembly that supports a substrate to be processed. The stage assembly is disposed relative to the top member to define a microchamber and a peripheral microchamber gap. An inert gas is flowed into the peripheral microchamber gap to form the gas curtain just outside of the microchamber. The gas curtain substantially prevents reactive gas in the ambient environment from entering the microchamber when the stage assembly moves relative to the top member.
摘要翻译：公开了一种具有气幕的可移动微型仓库系统。微室系统具有具有光访问特征的顶部构件和支撑要处理的衬底的台架组件。台架组件相对于顶部构件设置以限定微室和外围微室间隙。惰性气体流入周边微室间隙，以在微室外形成气幕。当台架组件相对于顶部构件移动时，气幕基本上防止周围环境中的反应性气体进入微型室。

5. 发明申请

US20140096908A1 DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS 审中-公开
标题翻译：分布式多区域等离子体源系统，方法和装置
公开(公告)号：US20140096908A1
公开(公告)日：2014-04-10
申请号：US13649103
申请日：2012-10-10
申请人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
发明人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
IPC分类号： H01J37/32
CPC分类号： H01J37/32431 , H01J37/321 , H01J37/32669
摘要： A processing chamber including multiple plasma sources in a process chamber top. Each one of the plasma sources is a ring plasma source including a primary winding and multiple ferrites. A plasma processing system is also described. A method of plasma processing is also described.
摘要翻译：处理室包括处理室顶部中的多个等离子体源。每个等离子体源是包括初级绕组和多个铁氧体的环形等离子体源。还描述了等离子体处理系统。还描述了等离子体处理的方法。

6. 发明授权

US08334505B2 Chemical ionization reaction or proton transfer reaction mass spectrometry 失效
标题翻译：化学电离反应或质子转移反应质谱
公开(公告)号：US08334505B2
公开(公告)日：2012-12-18
申请号：US12026799
申请日：2008-02-06
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/26
CPC分类号： G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
摘要： A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

7. 发明申请

US20120174992A1 Apparatus and Method for Pressure Fluctuation Insensitive Mass Flow Control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US20120174992A1
公开(公告)日：2012-07-12
申请号：US13425784
申请日：2012-03-21
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： F16K31/12
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/776
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

8. 发明授权

US07628860B2 Pulsed mass flow delivery system and method 有权
公开(公告)号：US07628860B2
公开(公告)日：2009-12-08
申请号：US10822358
申请日：2004-04-12
申请人： Ali Shajii , Siddharth P. Nagarkatti , Matthew Mark Besen , William R. Clark , Daniel Alexander Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth P. Nagarkatti , Matthew Mark Besen , William R. Clark , Daniel Alexander Smith , Bora Akgerman
IPC分类号： C23C16/455 , C23C16/52 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

9. 发明申请

US20090095902A1 CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A TIME-OF-FLIGHT MASS SPECTROMETER 失效
标题翻译：化学离子反应或原子转移反应与时间飞行质谱仪的质谱
公开(公告)号：US20090095902A1
公开(公告)日：2009-04-16
申请号：US11869980
申请日：2007-10-10
申请人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/40 , H01J49/26 , H01J49/36
CPC分类号： H01J49/145
摘要： A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form product ions. The reagent ions and product ions are directed to a time-of-flight mass spectrometer module for detection and determination of a mass value for the ions. The time-of-flight mass spectrometer module can include an optical system and an ion beam adjuster for focusing, interrupting, or altering a flow of reagent and product ions according to a specified pattern. The time-of-flight mass spectrometer module can include signal processing techniques to collect and analyze an acquired signal, for example, using statistical signal processing, such as maximum likelihood signal processing.
摘要翻译：描述了用于飞行时间质谱的系统及其组件和方法。微波或高频RF能量源用于电离试剂蒸气以形成试剂离子。试剂离子进入室并与流体样品相互作用以形成产物离子。试剂离子和产物离子被引导到飞行时间质谱仪模块，用于检测和确定离子的质量值。飞行时间质谱模块可以包括用于根据指定图案聚焦，中断或改变试剂和产物离子流的光学系统和离子束调节器。飞行时间质谱仪模块可以包括用于收集和分析所获取的信号的信号处理技术，例如使用诸如最大似然信号处理的统计信号处理。

10. 发明申请

US20070139122A1 Radio Frequency Power Delivery System 有权
标题翻译：射频供电系统
公开(公告)号：US20070139122A1
公开(公告)日：2007-06-21
申请号：US11554979
申请日：2006-10-31
申请人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
发明人： Siddharth Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy Kalvaitis , William McKinney , Daniel Goodman , William Holber , John Smith
IPC分类号： H03F3/191
CPC分类号： H03F1/56 , H03F3/191 , H03F3/20
摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
摘要翻译：提供了一种将功率传递给动态负载的系统和方法。该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

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