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1. 发明申请

US20140083189A1 Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain 审中-公开
标题翻译：具有2自由度感应模式的温度稳定的MEMS陀螺仪解决带宽和增益之间的权衡
公开(公告)号：US20140083189A1
公开(公告)日：2014-03-27
申请号：US13666469
申请日：2012-11-01
申请人： Alexander Trusov , Adam Schofield , Andrei Shkel
发明人： Alexander Trusov , Adam Schofield , Andrei Shkel
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , B23Q17/00 , G01C19/5719
摘要： The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.
摘要翻译：本发明是一种新颖的陀螺仪设计，其产生对制造和环境变化坚固的装置，允许灵活地选择操作参数，并且不管选择的操作频率如何，以最小的牺牲牺牲提供增加的带宽。陀螺仪具有单自由度（DOF）驱动模式和2自由度感测模式。驱动模式工作频率和感测模式带宽可以在所提出的设计中任意选择，放宽增益，晶粒尺寸和检测电容之间的折衷。即使存在制造缺陷，结构的对称性确保了驱动模式谐振相对于感测模式操作区域的最佳位置。

2. 发明授权

US08656776B2 Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwidth and gain 有权
标题翻译：具有2-DOF感测模式的温度稳定的MEMS陀螺仪寻址带宽和增益之间的折衷
公开(公告)号：US08656776B2
公开(公告)日：2014-02-25
申请号：US13666494
申请日：2012-11-01
申请人： Alexander Trusov , Adam Schofield , Andrei Shkel
发明人： Alexander Trusov , Adam Schofield , Andrei Shkel
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , B23Q17/00 , G01C19/5719
摘要： The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.
摘要翻译：本发明是一种新颖的陀螺仪设计，其产生对制造和环境变化坚固的装置，允许灵活地选择操作参数，并且不管选择的操作频率如何，以最小的牺牲牺牲提供增加的带宽。陀螺仪具有单自由度（DOF）驱动模式和2自由度感测模式。驱动模式工作频率和感测模式带宽可以在所提出的设计中任意选择，放宽增益，晶粒尺寸和检测电容之间的折衷。即使存在制造缺陷，结构的对称性确保了驱动模式谐振相对于感测模式操作区域的最佳位置。

3. 发明授权

US08443667B2 Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwith and gain 有权
标题翻译：具有2-DOF感测模式的温度稳定的MEMS陀螺仪寻址带宽和增益之间的折衷
公开(公告)号：US08443667B2
公开(公告)日：2013-05-21
申请号：US12918284
申请日：2009-02-12
申请人： Alexander Trusov , Adam Schofield , Andrei Shkel
发明人： Alexander Trusov , Adam Schofield , Andrei Shkel
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , B23Q17/00 , G01C19/5719
摘要： The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.
摘要翻译：本发明是一种新颖的陀螺仪设计，其产生对制造和环境变化坚固的装置，允许灵活地选择操作参数，并且不管选择的操作频率如何，以最小的牺牲牺牲提供增加的带宽。陀螺仪具有单自由度（DOF）驱动模式和2自由度感测模式。驱动模式工作频率和感测模式带宽可以在所提出的设计中任意选择，放宽增益，晶粒尺寸和检测电容之间的折衷。即使存在制造缺陷，结构的对称性确保了驱动模式谐振相对于感测模式操作区域的最佳位置。

4. 发明申请

US20130074304A1 Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain 有权
标题翻译：具有2自由度感应模式的温度稳定的MEMS陀螺仪解决带宽和增益之间的权衡
公开(公告)号：US20130074304A1
公开(公告)日：2013-03-28
申请号：US13666494
申请日：2012-11-01
申请人： Alexander Trusov , Adam Schofield , Andrei Shkel
发明人： Alexander Trusov , Adam Schofield , Andrei Shkel
IPC分类号： B23Q17/00
CPC分类号： G01C19/56 , B23Q17/00 , G01C19/5719
摘要： The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth with minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.
摘要翻译：本发明是一种新颖的陀螺仪设计，其产生对制造和环境变化坚固的装置，允许灵活地选择操作参数，并且不管选择的操作频率如何，以最小的牺牲牺牲提供增加的带宽。陀螺仪具有单自由度（DOF）驱动模式和2自由度感测模式。驱动模式工作频率和感测模式带宽可以在所提出的设计中任意选择，放宽增益，晶粒尺寸和检测电容之间的折衷。即使存在制造缺陷，结构的对称性确保了驱动模式谐振相对于感测模式操作区域的最佳位置。

5. 发明申请

US20110094302A1 Micromachined Gyroscopes with 2-DOF Sense Modes Allowing Interchangeable Robust and Precision Operation 有权
标题翻译：具有2自由度感应模式的微加工陀螺仪允许可互换的鲁棒和精确操作
公开(公告)号：US20110094302A1
公开(公告)日：2011-04-28
申请号：US12605178
申请日：2009-10-23
申请人： Adam Schofield , Alexander Trusov , Andrei Shkel
发明人： Adam Schofield , Alexander Trusov , Andrei Shkel
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5733
摘要： A z-axis gyroscope design is presented with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. By decoupling the frame connecting the sense system to a central anchor, x-y symmetry is preserved while enabling a fully coupled 2-DOF sense mode providing control over both the bandwidth and the amount of coupling independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system.
摘要翻译： Z轴陀螺仪设计具有2自由度（DOF）感测模式，允许在精度（模式匹配）或强大（宽带宽）模式下进行可互换操作。这是使用完整的2-DOF耦合系统实现的，其允许规范感测模式谐振频率和独立于频率的耦合。通过将连接感测系统的帧解耦到中心锚点，保持x-y对称性，同时实现完全耦合的2自由度感测模式，提供对带宽和独立于操作频率的耦合量的控制。鲁棒模式对应于提供响应增益的2-DOF感测模式谐振频率与由频率间隔控制的带宽之间的操作。然而，精确的操作模式依赖于驱动器与第二个反相感应模式谐振频率的模式匹配，该频率可以被设计为相对于类似的1自由度系统提供增益优势。

6. 发明授权

US08549915B2 Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation 有权
标题翻译：具有2自由度感应模式的微加工陀螺仪允许可互换的稳健和精确的操作
公开(公告)号：US08549915B2
公开(公告)日：2013-10-08
申请号：US12605178
申请日：2009-10-23
申请人： Adam Schofield , Alexander Trusov , Andrei Shkel
发明人： Adam Schofield , Alexander Trusov , Andrei Shkel
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5733
摘要： A z-axis gyroscope design is presented with a 2-degree of freedom (DOF) sense mode allowing interchangeable operation in either precision (mode-matched) or robust (wide-bandwidth) modes. This is accomplished using a complete 2-DOF coupled system which allows for the specification of the sense mode resonant frequencies and coupling independent of frequency. By decoupling the frame connecting the sense system to a central anchor, x-y symmetry is preserved while enabling a fully coupled 2-DOF sense mode providing control over both the bandwidth and the amount of coupling independent of operational frequency. The robust mode corresponds to operation between the 2-DOF sense mode resonant frequencies providing a response gain and bandwidth controlled by frequency spacing. Precision mode of operation, however, relies on mode-matching the drive to the second, anti-phase sense mode resonant frequency which can be designed to provide a gain advantage over a similar 1-DOF system.
摘要翻译： Z轴陀螺仪设计具有2自由度（DOF）感测模式，允许在精度（模式匹配）或强大（宽带宽）模式下进行可互换操作。这是使用完整的2-DOF耦合系统实现的，其允许规范感测模式谐振频率和独立于频率的耦合。通过将连接感测系统的帧解耦到中心锚点，保持x-y对称性，同时实现完全耦合的2自由度感测模式，提供对带宽和独立于操作频率的耦合量的控制。鲁棒模式对应于提供响应增益的2-DOF感测模式谐振频率与由频率间隔控制的带宽之间的操作。然而，精确的操作模式依赖于驱动器与第二个反相感应模式谐振频率的模式匹配，该频率可以被设计为相对于类似的1自由度系统提供增益优势。

7. 发明申请

US20100319451A1 Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwith and Gain 有权
标题翻译：具有2自由度感应模式的温度稳定的MEMS陀螺仪解决带宽与增益之间的权衡
公开(公告)号：US20100319451A1
公开(公告)日：2010-12-23
申请号：US12918284
申请日：2009-02-12
申请人： Alexander Trusov , Adam Schofield , Andrei Shkel
发明人： Alexander Trusov , Adam Schofield , Andrei Shkel
IPC分类号： G01C19/56 , B23P19/04
CPC分类号： G01C19/56 , B23Q17/00 , G01C19/5719
摘要： The current invention is a novel gyroscope design, which yields devices robust to fabrication and environmental variations, allows flexible selection of operational parameters, and provides increased bandwidth minimized sacrifice in gain regardless of the selected frequency of operation. The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections.
摘要翻译：本发明是一种新颖的陀螺仪设计，其产生对制造和环境变化坚固的装置，允许灵活地选择操作参数，并且不管选择的操作频率如何，都可以提供增加的带宽最小化牺牲牺牲。陀螺仪具有单自由度（DOF）驱动模式和2自由度感测模式。驱动模式工作频率和感测模式带宽可以在所提出的设计中任意选择，放宽增益，晶粒尺寸和检测电容之间的折衷。即使存在制造缺陷，结构的对称性确保了驱动模式谐振相对于感测模式操作区域的最佳位置。

8. 发明申请

US20130098153A1 HIGH RANGE DIGITAL ANGULAR RATE SENSOR BASED ON FREQUENCY MODULATION 有权
标题翻译：基于频率调制的高范围数字角速率传感器
公开(公告)号：US20130098153A1
公开(公告)日：2013-04-25
申请号：US13279212
申请日：2011-10-21
申请人： Alexander Trusov , Sergei Zotov , Andrei Shkel
发明人： Alexander Trusov , Sergei Zotov , Andrei Shkel
IPC分类号： G01C19/5607 , G01C19/56
CPC分类号： G01C19/5719
摘要： A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off.
摘要翻译：基于频率调制（FM）的数字角速率传感器系统。新方法依赖于在MEMS振动陀螺仪中跟踪两个高Q机械振动模式的谐振频率，以产生输入角速率的固有数字测量。所公开的系统通过MEMS振动高Q陀螺仪和新的信号处理方案的组合来实现，其利用先前忽略的陀螺仪动力学效应。该系统的FM性质消除了传统振动速率陀螺仪的噪声对带宽和分辨率与动态范围的折衷。 FM方法允许通过使用超高Q（100万）机械结构实现优异的信噪比，而不会限制测量带宽。在FM系统中可以实现1e-9的稳定性，与使用电容式传感器的现有技术的常规AM陀螺仪相比提供了1000倍的改进。

9. 发明授权

US08991247B2 High range digital angular rate sensor based on frequency modulation 有权
标题翻译：基于频率调制的高范围数字角速率传感器
公开(公告)号：US08991247B2
公开(公告)日：2015-03-31
申请号：US13279212
申请日：2011-10-21
申请人： Alexander Trusov , Sergei Zotov , Andrei Shkel
发明人： Alexander Trusov , Sergei Zotov , Andrei Shkel
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off.
摘要翻译：基于频率调制（FM）的数字角速率传感器系统。新方法依赖于在MEMS振动陀螺仪中跟踪两个高Q机械振动模式的谐振频率，以产生输入角速率的固有数字测量。所公开的系统通过MEMS振动高Q陀螺仪和新的信号处理方案的组合来实现，其利用先前忽略的陀螺仪动力学效应。该系统的FM性质消除了传统振动速率陀螺仪的噪声对带宽和分辨率与动态范围的折衷。 FM方法允许通过使用超高Q（100万）机械结构实现优异的信噪比，而不会限制测量带宽。在FM系统中可以实现1e-9的稳定性，与使用电容式传感器的现有技术的常规AM陀螺仪相比提供了1000倍的改进。

10. 发明授权

US11015934B2 Vibrating-mass gyroscope systems and method 有权
公开(公告)号：US11015934B2
公开(公告)日：2021-05-25
申请号：US15717544
申请日：2017-09-27
申请人： Alexander Trusov , David M. Rozelle
发明人： Alexander Trusov , David M. Rozelle
IPC分类号： G01C19/5726 , G01C25/00 , G01C19/574 , G01C19/5755
摘要： One embodiment of the invention includes a vibrating-mass gyroscope system. The system includes a sensor system comprising a vibrating-mass and a plurality of electrodes coupled to the vibrating-mass that are configured to facilitate in-plane motion of the vibrating-mass. The system also includes a gyroscope controller configured to generate a drive signal that is provided to a first set of the plurality of electrodes to provide an in-plane periodic oscillatory motion of the vibrating-mass along a drive axis, to generate a force-rebalance signal that is provided to a second set of the plurality of electrodes to calculate a rotation of the vibrating-mass gyroscope system about an input axis, and to generate a quadrature signal that is provided to a third set of the plurality of electrodes to substantially mitigate quadrature effects associated with the vibrating-mass.

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