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1. 发明申请

US20090316256A1 CHROMATICALLY CORRECTED OBJECTIVE AND PROJECTION EXPOSURE APPARATUS INCLUDING THE SAME 审中-公开
标题翻译：经修正的目标和投影曝光装置包括其中
公开(公告)号：US20090316256A1
公开(公告)日：2009-12-24
申请号：US12143598
申请日：2008-06-20
申请人： Alexander EPPLE , Heiko FELDMANN
发明人： Alexander EPPLE , Heiko FELDMANN
IPC分类号： G03B27/54 , G02B3/00 , G02B17/08
CPC分类号： G02B17/0892 , G02B17/08 , G02B27/0012 , G02B27/0025 , G03F7/70225
摘要： An objective having a plurality of optical elements arranged to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA>0.8 with electromagnetic radiation from a wavelength band around a wavelength λ, includes a number N of dioptric optical elements, each dioptric optical element i made from a transparent material having a normalized optical dispersion Δni=ni(λ0)−ni(λ0+1 pm) for a wavelength variation of 1 pm from a wavelength λ0. The objective satisfies the relation  ∑ i = 1 N  Δ   n i  ( s i - d i )  λ 0  NA 4 ≤ A for any ray of an axial ray bundle originating from a field point on an optical axis in the object field, where si is a geometrical path length of a ray in an ith dioptric optical element having axial thickness di and the sum extends on all dioptric optical elements of the objective. Where A=0.2 or below, spherochromatism is sufficiently corrected
摘要翻译：具有多个光学元件的目标，该多个光学元件布置成将物体的物体表面中的物体的图案成像到图像侧数值孔径NA> 0.8的物镜的图像表面区域中的图像场，其中电磁辐射来自围绕波长λ的波长带包括N个度数光学元件，每个度数光学元件i由具有用于波长变化的归一化光学色散Deltani = ni（λ0）-ni（λ0+1μm）的透明材料制成从波长λ0下午1点。目标满足源自物场中光轴上的场点的轴射线束的任何射线的关系ΣΣifield field field field field field field field field field field field field field field field field field field field field field 其中，si是具有轴向厚度di的第i个屈光光学元件中的光线的几何路径长度，并且在该物镜的所有光度光学元件上延伸。如果A = 0.2或更低，则反射色素得到充分校正

2. 发明申请

US20110007387A1 CHROMATICALLY CORRECTED CATADIOPTRIC OBJECTIVE AND PROJECTION EXPOSURE APPARATUS INCLUDING THE SAME 有权
标题翻译：显色校正阴性对象和投影曝光装置，包括其中
公开(公告)号：US20110007387A1
公开(公告)日：2011-01-13
申请号：US12834485
申请日：2010-07-12
申请人： Alexander EPPLE
发明人： Alexander EPPLE
IPC分类号： G02B17/08 , G02B13/14
CPC分类号： G03F7/70225 , G02B17/0892 , G02B27/0025
摘要： A catadioptric objective includes a plurality of optical elements arranged along an optical axis to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA with electromagnetic radiation from a wavelength band around a central wavelength λ
摘要翻译：反射折射物镜包括沿着光轴布置的多个光学元件，用于将物镜的物体表面中的物场的图案成像到在像侧数值孔径NA处的物镜的图像表面区域中的图像场，来自中心波长λ<300nm附近的波长带的电磁辐射。光学元件包括凹面镜和多个透镜。对于波长带的每个波长λ，投影物镜在相应的Petzval表面中形成图案的图像，Petzval表面对于不同的波长彼此偏离。多个透镜包括由具有基本不同的阿贝数的不同材料制成的透镜。在与图像表面区域中的光轴平行测量的图像场（最大图像高度y'）的边缘场点处的平面参考表面处的给定波长处的Petzval表面的纵向离开p随波长 λ根据：dp /dλ<（15λ/ NA2）/ nm。

3. 发明申请

US20090086338A1 High Aperture Folded Catadioptric Projection Objective 审中-公开
标题翻译：高孔径折射反射折射投影目标
公开(公告)号：US20090086338A1
公开(公告)日：2009-04-02
申请号：US11864490
申请日：2007-09-28
申请人： Alexander EPPLE
发明人： Alexander EPPLE
IPC分类号： G02B17/08
CPC分类号： G02B13/22 , G02B17/08 , G02B17/0892 , G03F7/70225 , G03F7/70275
摘要： A catadioptric projection objective with telecentric image space has a first objective part configured to image the pattern from the object surface into a first intermediate image, and having a first pupil surface, a second objective part configured to image the first intermediate image into a second intermediate image, and having a second pupil surface optically conjugate to the first pupil surface, the second objective part including a concave mirror having a reflective mirror surface positioned at or close to the second pupil surface, and a third objective part configured to image the second intermediate image into the image surface, and having a third pupil surface optically conjugate to the first and second pupil surface. The concave mirror is arranged coaxial with the first objective part to receive radiation from the object surface, a first deflecting mirror is arranged to deflect radiation reflected from the concave mirror towards a second deflecting mirror, and the second deflecting mirror is arranged to deflect radiation from the first deflecting mirror towards the image surface such that the image surface is parallel to the object surface. The projection objective has an immersion lens group having a convex object-side entry surface bounding at a gas or vacuum and an image-side exit surface in contact with an immersion liquid in operation, wherein the immersion lens group is at least partly made of a high-index material with refractive index n≧1.6 at the operating wavelength.
摘要翻译：具有远心图像空间的反折射投影物镜具有第一物镜部分，被配置为将图案从物体表面成像为第一中间图像，并具有第一光瞳表面，第二物镜部分被配置为将第一中间图像成像为第二中间图像图像，并且具有与第一光瞳表面光学共轭的第二光瞳表面，第二物镜部分包括具有位于第二光瞳表面或接近第二瞳孔表面的反射镜表面的凹面镜，以及第三物镜部分，图像进入图像表面，并且具有与第一和第二光瞳表面光学共轭的第三光瞳表面。所述凹面镜与所述第一物镜部分同轴地布置以接收来自所述物体表面的辐射，第一偏转镜布置成将来自所述凹面镜的反射的辐射偏转到第二偏转镜，并且所述第二偏转镜被布置成使来自第一偏转镜朝向图像表面，使得图像表面平行于物体表面。投影物镜具有浸没透镜组，其具有在气体或真空处界定的凸面物体入射面和在操作中与浸没液体接触的像侧出射面，其中浸没透镜组至少部分地由在工作波长处折射率n> = 1.6的高折射率材料。

4. 发明申请

US20120162625A1 CATADIOPTRIC PROJECTION OBJECTIVE WITH INTERMEDIATE IMAGES 有权
标题翻译：具有中间图像的目标投影
公开(公告)号：US20120162625A1
公开(公告)日：2012-06-28
申请号：US13361707
申请日：2012-01-30
申请人： Aurelian DODOC , Wilhelm ULRICH , Alexander EPPLE
发明人： Aurelian DODOC , Wilhelm ULRICH , Alexander EPPLE
IPC分类号： G03F7/20 , G03B27/70 , G02B17/08
CPC分类号： G03F7/70058 , G02B17/06 , G02B17/08 , G02B17/0804 , G02B17/0892 , G03F7/7015 , G03F7/70225 , G03F7/70275
摘要： A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.
摘要翻译：反射折射投射物镜具有第一物镜部分，限定光轴的第一部分并对物场进行成像以形成第一实际中间图像。它还具有使用来自第一目标部分的辐射形成第二实际中间图像的第二反射折射物镜部分。第二目标部分具有凹面镜并且限定光轴的第二部分。第三目标部分将第二实际中间图像成像到图像平面中并且限定光轴的第三部分。折叠镜将物体平面上的辐射偏转到凹面镜; 并将来自凹面镜的辐射偏转到图像平面。由第一目标部分限定的光轴的第一部分与光轴的第三部分横向偏移并与其平行。

5. 发明申请

US20090091728A1 Compact High Aperture Folded Catadioptric Projection Objective 审中-公开
标题翻译：紧凑高孔径折射反射折射投影目标
公开(公告)号：US20090091728A1
公开(公告)日：2009-04-09
申请号：US11864423
申请日：2007-09-28
申请人： Alexander EPPLE
发明人： Alexander EPPLE
IPC分类号： G03B27/54 , G02B17/08
CPC分类号： G02B17/08 , G02B17/0892 , G03F7/70225 , G03F7/70341
摘要： A catadioptric projection objective has a plurality of optical elements arranged along an optical axis to image a pattern from an object field in an object surface of the objective to an image field in an image surface region of the objective at an image-side numerical aperture NA≧1.35 with electromagnetic radiation defining an operating wavelength λ. The optical elements form a first objective part configured to image the pattern from the object surface into a first intermediate image, a second objective part configured to image the first intermediate image into a second intermediate image, the second objective part including a concave mirror having a reflective mirror surface positioned at or close to a pupil surface; and a third objective part configured to image the second intermediate image into the image surface. A first deflecting mirror is arranged to deflect radiation from the object surface towards the concave mirror, and a second deflecting mirror is arranged to deflect radiation from the concave mirror towards the image surface such that the image surface is parallel to the object surface. A geometrical distance L between the object surface and the image surface is smaller than or equal to 1950 mm.
摘要翻译：反折射投影物镜具有沿着光轴布置的多个光学元件，用于将物体的物体表面中的物场的图案成像到图像侧数值孔径NA处的物镜的图像表面区域中的图像场 > = 1.35，其中电磁辐射限定了工作波长λ。所述光学元件形成第一物镜部分，被配置为将所述图案从所述物体表面成像为第一中间图像;第二物镜部分，被配置为将所述第一中间图像成像为第二中间图像，所述第二物镜部分包括凹面镜，位于或靠近瞳孔表面的反射镜表面; 以及构造成将所述第二中间图像成像到所述图像表面中的第三目标部分。第一偏转镜布置成将来自物体表面的辐射偏转到凹面镜，并且布置第二偏转镜以将来自凹面镜的辐射偏转到图像表面，使得图像表面平行于物体表面。物体表面和图像表面之间的几何距离L小于或等于1950mm。

6. 发明申请

US20110038061A1 CATADIOPTRIC PROJECTION OBJECTIVE 有权
标题翻译：目标投影目标
公开(公告)号：US20110038061A1
公开(公告)日：2011-02-17
申请号：US12562693
申请日：2009-09-18
申请人： Alexander EPPLE , Vladimir Kamenov , Toralf Gruner , Thomas Schicketanz
发明人： Alexander EPPLE , Vladimir Kamenov , Toralf Gruner , Thomas Schicketanz
IPC分类号： G02B17/00 , G03B27/52
CPC分类号： G02B17/0892 , G02B1/11 , G02B17/08 , G02B17/0896 , G03F7/70 , G03F7/70225 , G03F7/70275
摘要： Catadioptric projection objective (1) for microlithography for imaging an object field (3) in an object plane (5) onto an image field (7) in an image plane (9). The objective includes a first partial objective (11) imaging the object field onto a first real intermediate image (13), a second partial objective (15) imaging the first intermediate image onto a second real intermediate image (17), and a third partial objective (19) imaging the second intermediate image onto the image field. The second partial objective is a catadioptric objective having exactly one concave mirror and having at least one lens (L21, L22). A first folding mirror (23) deflects the radiation from the object plane toward the concave mirror and a second folding mirror (25) deflects the radiation from the concave mirror toward the image plane. At least one surface of a lens (L21, L22) of the second partial objective has an antireflection coating having a reflectivity of less than 0.2% for an operating wavelength of between 150 nm and 250 nm and for an angle-of-incidence range of between 0° and 30°. As an alternative or in addition, all the surfaces of the lenses of the second partial objective are configured such that the deviation from the marginal ray concentricity is greater than or equal to 20°.
摘要翻译：用于微光刻的反折射投影物镜（1），用于将物平面（5）中的物场（3）成像到图像平面（9）中的图像场（7）上。该目的包括将对象场成像到第一实际中间图像（13）上的第一部分目标（11），将第一中间图像成像到第二实际中间图像（17）上的第二部分目标（15）物镜（19）将第二中间图像成像到图像场上。第二部分目标是具有恰好一个凹面镜并具有至少一个透镜（L21，L22）的反射折射物镜。第一折叠镜（23）将来自物体平面的辐射偏转到凹面镜，并且第二折叠镜（25）将来自凹面镜的辐射偏转到图像平面。第二部分物镜的透镜（L21，L22）的至少一个表面具有对于150nm至250nm的工作波长具有小于0.2％的反射率的抗反射涂层，并且对于介于0°和30°之间。作为替代或另外，第二部分物镜的透镜的所有表面被配置为使得与边缘射线同心度的偏差大于或等于20°。

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