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    • 1. 发明申请
    • Linear Jet Ionizer
    • 线性喷射离子发生器
    • US20130307405A1
    • 2013-11-21
    • US13947456
    • 2013-07-22
    • Aleksey KLOCHKOVPeter GEFTERSteven Bernard HEYMANNLeslie W. PARTRIDGEGreenberry Bedford BROWNMatthew T. ANTONELLI
    • Aleksey KLOCHKOVPeter GEFTERSteven Bernard HEYMANNLeslie W. PARTRIDGEGreenberry Bedford BROWNMatthew T. ANTONELLI
    • H01T23/00
    • H01T23/00H01T19/00H05F3/04
    • A multi-sectional linear ionizing bar with at least four elements is disclosed. First, disclosed bars may include at least one ionization cell with at least one axis-defining linear ion emitter for establishing an ion cloud along the length thereof. Second, disclosed bars may include at least one reference electrode. Third, disclosed bars may include a manifold for receiving gas or air from a source and for delivering same past the linear emitter(s) such that substantially none of the gas/air flows into the ion cloud. Fourth, disclosed bars may include means for receiving the ionizing voltage and for delivering same to the linear emitter(s) to thereby establish the ion cloud. In this way, disclosed ionizing bars may transport ions from the plasma region toward a charge neutralization target without inducing substantial vibration of the linear emitter and without substantial contaminants from the gas/air flow reaching the linear emitter.
    • 公开了具有至少四个元件的多截面线性离子棒。 首先,公开的条可以包括至少一个具有至少一个轴定义的线性离子发射器的离子化电池,用于沿其长度建立离子云。 第二,公开的条可以包括至少一个参考电极。 第三,所公开的杆可以包括用于从源接收气体或空气并且用于将其传送通过线性发射器的歧管,使得基本上没有气体/空气流入离子云。 第四,公开的条可以包括用于接收电离电压并将其传送到线性发射器从而建立离子云的装置。 以这种方式,公开的电离棒可以将离子从等离子体区域运送到电荷中和靶,而不会引起线性发射器的实质振动,并且没有来自气体/空气流的实质污染物到达线性发射器。