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1. 发明授权

US6059643A Apparatus and method for polishing a flat surface using a belted polishing pad 失效
标题翻译：使用带状抛光垫对平坦表面进行抛光的装置和方法
公开(公告)号：US6059643A
公开(公告)日：2000-05-09
申请号：US803623
申请日：1997-02-21
申请人： Albert Hu , Burford J. Furman , Mohamed Abushaban
发明人： Albert Hu , Burford J. Furman , Mohamed Abushaban
IPC分类号： B24B21/06 , B24B21/12 , B24B37/04 , G11B5/84 , B24B21/04
CPC分类号： B24B21/12 , B24B21/06 , B24B37/04 , G11B5/84 , G11B5/8404
摘要： The present invention relates to an apparatus and method of Chemical Mechanical Planarization ("CMP") for wafer, flat panel display (FPD), and hard drive disk (HDD). The preferred apparatus comprises a looped belt spatially oriented in a vertical direction with respect to a ground floor. A polishing pad is glued to an outer surface of the belt. At an inner surface of the belt, there are a plurality of wafer supports to support the wafers while they are in polishing process. Wafers are loaded from a wafer station to a wafer head using a handling structure before polishing and are unloaded from the wafer head to the wafer station after polishing. An electric motor or equivalent is used to drive the looped belt running over two pulleys. An adjustment means is used to adjust the tension and position of the belt for smooth running. This new CMP machine can be mounted in multiple orientations to save manufacturing space.
摘要翻译：本发明涉及一种用于晶片，平板显示器（FPD）和硬盘驱动盘（HDD）的化学机械平面化（“CMP”）的设备和方法。优选的装置包括相对于底层在垂直方向上空间取向的环状带。抛光垫胶合到带的外表面。在带的内表面上，存在多个晶片支撑件，以在抛光过程中支撑晶片。在抛光之前，使用处理结构将晶片从晶圆台装载到晶片头，并且在抛光之后从晶片头卸载到晶片台。使用电动机或等效物来驱动环形带运行在两个滑轮上。调节装置用于调节皮带的张力和位置，以使其平稳运行。这种新的CMP机器可以安装在多个方向，以节省制造空间。

2. 发明授权

US6146249A Apparatus and method for polishing a flat surface using a belted polishing pad 有权
公开(公告)号：US6146249A
公开(公告)日：2000-11-14
申请号：US177089
申请日：1998-10-22
申请人： Albert Hu , Burford J. Furman , Mohamed Abushaban
发明人： Albert Hu , Burford J. Furman , Mohamed Abushaban
IPC分类号： B24B21/06 , B24B21/12 , B24B37/04 , G11B5/84 , B24B1/00
CPC分类号： B24B21/12 , B24B21/06 , B24B37/04 , G11B5/84 , G11B5/8404
摘要： The present invention relates to an apparatus and method of Chemical Mechanical Planarization ("CMP") for wafer, flat panel display (FPD), and hard drive disk (HDD). The preferred apparatus comprises a looped belt spatially oriented in a vertical direction with respect to a ground floor. A polishing pad is glued to an outer surface of the belt. At an inner surface of the belt, there are a plurality of wafer supports to support the wafers while they are in polishing process. Wafers are loaded from a wafer station to a wafer head using a handling structure before polishing and are unloaded from the wafer head to the wafer station after polishing. An electric motor or equivalent is used to drive the looped belt running over two pulleys. An adjustment means is used to adjust the tension and position of the belt for smooth running. This new CMP machine can be mounted in multiple orientations to save manufacturing space.

3. 发明授权

US4730227A Disk file actuator with combined carriage rail and isolator mount for drive magnet 失效
标题翻译：磁盘文件执行器，具有组合的托架导轨和用于驱动磁体的隔离器安装
公开(公告)号：US4730227A
公开(公告)日：1988-03-08
申请号：US58075
申请日：1987-06-04
申请人： Darryl G. Chong , Burford J. Furman , Edward L. Mathurin , Thomas J. Rajac
发明人： Darryl G. Chong , Burford J. Furman , Edward L. Mathurin , Thomas J. Rajac
IPC分类号： G11B5/55 , G11B7/08 , G11B21/02 , G11B33/08 , H02K41/035 , G11B21/08
CPC分类号： G11B21/02 , G11B33/08 , G11B5/5521 , G11B7/08 , H02K41/0356
摘要： An apparatus is disclosed for actuating the read-write heads of a disk file in which a plurality of support rails having resilient bushings at either end support on their central portions a carriage for the read-write heads and on their resilient bushings the support structure for the magnets which drive the carriage during operation. Reaction forces arising in the magnets are thereby isolated from the support rails and the frame.
摘要翻译：公开了一种用于致动盘文件的读写头的装置，其中多个具有弹性衬套的支撑轨道在其任一端在其中心部分上支撑用于读写头的托架，并且在其弹性衬套上支撑用于操作时驱动滑架的磁铁。因此，磁体中产生的反作用力与支撑轨和框架隔离。

4. 发明授权

US4526269A Singulator 失效
标题翻译：唱歌机
公开(公告)号：US4526269A
公开(公告)日：1985-07-02
申请号：US505839
申请日：1983-06-20
申请人： Jerald M. Henderson , Burford J. Furman
发明人： Jerald M. Henderson , Burford J. Furman
IPC分类号： B65G47/14 , B65G47/12
CPC分类号： B65G47/1457 , B65G2201/0211
摘要： A rotary turntable has an upward step and a peripheral rim divided into pockets by upstanding radial walls. Objects deposited at random near the center of the turntable move by centrifugal force and some gravitional pull toward the step. They are individually separated by vertically reciprocating radial walls and are lifted up to the step and to the rim by lifters vertically reciprocating in time with the radial walls as the turntable revolves. A peripheral wall or band engages the outer ends of the partitions to retain objects in the pockets except for a small part of the periphery through which the pocketed objects are singly discharged.
摘要翻译：旋转转台具有向上的台阶和通过直立的径向壁划分成凹槽的周缘。在转盘中心附近沉积的物体通过离心力移动，并且一些重力拉动朝向台阶。它们通过垂直往复式径向壁单独分开，并且当转盘旋转时，通过与径向壁垂直往复运动的升降机将其提升到台阶并到达轮辋。周边壁或带与隔板的外端接合，以将物体保持在口袋中，除了外围物体的一小部分外，单个排出物体。

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