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1. 发明申请

US20050268716A1 BUILT IN TEST FOR MEMS VIBRATORY TYPE INERTIAL SENSORS 审中-公开
标题翻译：建立MEMS振动式惯性传感器的测试
公开(公告)号：US20050268716A1
公开(公告)日：2005-12-08
申请号：US11160062
申请日：2005-06-07
申请人： Albert Hrovat , Randolph Hartman , Thomas Savard , William Platt
发明人： Albert Hrovat , Randolph Hartman , Thomas Savard , William Platt
IPC分类号： G01C19/56 , G01P15/08
CPC分类号： G01C19/5719
摘要： The present invention provides a MEMS vibratory type inertial sensor that has some level of built in test to help improve the reliability by helping to identify erroneous or misleading data provided by the inertial sensor. In one illustrative embodiment, a test signal is injected into one or more of the inputs of the MEMS vibratory type inertial sensor, where the test signal produces a test signal component at one or more of the MEMS vibratory type inertial sensor outputs. The test signal component is then monitored at one or more of the outputs. If the test signal component matches at least predetermined characteristics of the original test signal, it is more likely that the MEMS vibratory type inertial sensor is operating properly and not producing erroneous or misleading data. In some embodiments, the test signal is provided and monitored during the normal functional operation of the MEMS vibratory type inertial sensor, thereby providing on-going built in test.
摘要翻译：本发明提供一种具有一定程度的内置测试的MEMS振动型惯性传感器，以通过帮助识别由惯性传感器提供的错误或误导数据来提高可靠性。在一个说明性实施例中，将测试信号注入到MEMS振动型惯性传感器的一个或多个输入中，其中测试信号在一个或多个MEMS振动型惯性传感器输出端产生测试信号分量。然后在一个或多个输出端监测测试信号分量。如果测试信号分量与原始测试信号的至少预定特性匹配，则MEMS振动式惯性传感器更可能正常运行并且不产生错误或误导性的数据。在一些实施例中，在MEMS振动型惯性传感器的正常功能操作期间提供和监视测试信号，从而提供正在进行的内置测试。

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