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1. 发明授权

US09160132B2 Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus 有权
标题翻译：激光装置，光疗装置，曝光装置，装置制造方法以及物体检查装置
公开(公告)号：US09160132B2
公开(公告)日：2015-10-13
申请号：US13029806
申请日：2011-02-17
申请人： Yasutoshi Takada , Akira Tokuhisa
发明人： Yasutoshi Takada , Akira Tokuhisa
IPC分类号： G03B27/42 , H01S3/067 , A61B18/22 , A61F9/008 , G03F7/20 , A61B18/20 , A61B18/00 , H01S3/00 , H01S3/08 , H01S3/13 , H01S3/23 , H01S3/30
CPC分类号： H01S3/06754 , A61B18/20 , A61B18/22 , A61B2018/00636 , A61F9/00804 , A61F9/00819 , A61F2009/00844 , A61F2009/00872 , G03F7/70025 , G03F7/70983 , H01S3/0092 , H01S3/08086 , H01S3/1305 , H01S3/2383 , H01S3/302
摘要： The present invention greatly reduces the likelihood that fiber fusion will occur. A laser apparatus comprises an excitation light source and an optical amplifier unit, which optically amplifies by receiving excitation light that is output from the excitation light source and that transits an optical fiber. A monitor unit monitors the power level of the excitation light transmitted from the excitation light source to the optical amplifier unit side via the optical fiber. At the initial start of the output of the excitation light from the excitation light source, once the excitation light is being output at the prescribed power level by the excitation light source, the control unit performs control such that the excitation light at a power level higher than the prescribed power level is output if the power level monitored by the monitor unit is greater than or equal to a prescribed value when the excitation light at the prescribed power level is being output from the excitation light source and such that the output of the excitation light is stopped if the power level monitored by the monitor unit is less than the prescribed value when the excitation light at the prescribed power level is being output from the excitation light source.
摘要翻译：本发明大大降低了发生纤维融合的可能性。激光装置包括激发光源和光放大器单元，其通过接收从激发光源输出并且转接光纤的激发光而光放大。监视器单元通过光纤监视从激励光源发射到光放大器单元侧的激发光的功率水平。在从激发光源输出激发光的初始开始时，一旦激发光源以激发光源以规定的功率电平输出，则控制部进行控制，使得激发光的功率电平更高如果在从激励光源输出规定功率电平的激励光时，由监视器单元监视的功率电平大于或等于规定值，则输出规定功率电平，如果从激励光源输出规定功率电平的激发光，则监视器单元监视的功率电平小于规定值时，停止光。

2. 发明授权

US09153934B2 Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus 有权
标题翻译：激光装置，光疗装置，曝光装置，装置制造方法以及物体检查装置
公开(公告)号：US09153934B2
公开(公告)日：2015-10-06
申请号：US13075486
申请日：2011-03-30
申请人： Yasutoshi Takada , Akira Tokuhisa
发明人： Yasutoshi Takada , Akira Tokuhisa
IPC分类号： H01S3/00 , A61N5/067 , H01S3/23 , A61F9/008 , G02F1/35 , H01S3/067
CPC分类号： H01S3/2383 , A61F9/008 , A61F9/00804 , A61F2009/00872 , G02F1/3532 , H01S3/0092 , H01S3/06754
摘要： A fundamental wavelength light generating unit generates light of a fundamental wavelength in accordance with an output wavelength instruction signal. An optical amplifier unit amplifies the light of the fundamental wavelength. A wavelength converting part includes nonlinear optical crystals that each perform wavelength conversion and temperature regulators that each regulate the temperature of the corresponding nonlinear optical crystal, wherein the wavelength converting part converts the light amplified by the optical amplifier unit to light of the wavelength indicated by the output wavelength instruction signal. A storage unit stores correspondence information that indicates a correspondence relationship between the wavelength of the output light and the temperature of each of the nonlinear optical crystals based on the corresponding wavelength. A control unit controls each of the temperature regulators such that the temperature of the corresponding nonlinear optical crystal reaches the temperature to be set in accordance with the output wavelength instruction signal.
摘要翻译：基波长发光部根据输出波长指示信号生成基波的光。光放大器单元放大基波的光。波长转换部分包括各自执行波长转换的温度调节器和调节相应的非线性光学晶体的温度的温度调节器的非线性光学晶体，其中波长转换部分将由光放大器单元放大的光转换为由输出波长指令信号。存储单元基于相应的波长存储指示输出光的波长和每个非线性光学晶体的温度之间的对应关系的对应信息。控制单元控制每个温度调节器，使得相应的非线性光学晶体的温度达到根据输出波长指令信号设置的温度。

3. 发明授权

US09083151B2 Method for having laser light source in standby status 有权
标题翻译：激光光源处于待机状态的方法
公开(公告)号：US09083151B2
公开(公告)日：2015-07-14
申请号：US13154705
申请日：2011-06-07
申请人： Akira Tokuhisa , Yasutoshi Takada
发明人： Akira Tokuhisa , Yasutoshi Takada
IPC分类号： H01S3/10 , H01S3/23 , G02F1/35 , H01S3/00 , H01S3/067 , H01S5/06
CPC分类号： H01S3/2383 , G02F1/3532 , G02F1/3534 , G02F2001/354 , H01S3/005 , H01S3/06754 , H01S3/10007 , H01S3/10015 , H01S5/0612
摘要： When the laser light source is caused to standby, the temperatures of semiconductor lasers are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by the semiconductor lasers change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifiers, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.
摘要翻译：当使激光光源处于待机状态时，半导体激光器的温度从始终使用激光光源时的温度改变约3℃。在温度变化约为3℃的情况下，由半导体激光器产生的激光的波长变化约为0.3nm。这种变化在光纤放大器上几乎没有任何效果，但是波长转换光学系统的各个波长转换元件的转换效率改变，特别是几乎不会再产生深紫外光。因此，即使当激光入射到波长转换光学系统时，也不再有波长转换元件的损坏。因此，可以提供能够缩短激光源的启动时间的激光源备用方法。

4. 发明申请

US20140036944A1 METHOD FOR ADJUSTING ELECTRO-OPTIC MODULATOR IN LASER DEVICE, AND LASER DEVICE 有权
标题翻译：用于调节激光器件中的电光调制器的方法和激光器件
公开(公告)号：US20140036944A1
公开(公告)日：2014-02-06
申请号：US13981187
申请日：2012-02-10
申请人： Akira Tokuhisa , Yasutoshi Takada
发明人： Akira Tokuhisa , Yasutoshi Takada
IPC分类号： H01S3/10
CPC分类号： H01S3/10015 , G02F1/37 , H01S3/0085 , H01S3/0092 , H01S3/06754 , H01S3/1301
摘要： A laser device includes: a signal light source that outputs seed light; an electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light; an optical amplifier that amplifies the signal light outputted from the electro-optic modulator; a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier; a converted light detector that detects the signal light that has been wavelength converted by the wavelength conversion optical element; and an EU control unit that controls the operation of the electro-optic modulator, wherein the EU control unit is adapted, in the state in which the seed light is being outputted, to adjust bias voltage of the electro-optic modulator on the basis of the applied voltage when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum.
摘要翻译：激光装置包括：输出种子光的信号光源; 电光调制器，其切断从信号光源输出的种子光的一部分并输出信号光; 放大从电光调制器输出的信号光的光放大器; 波长转换光学元件，其波长转换由所述光放大器放大的信号光; 转换光检测器，其检测由波长转换光学元件波长转换的信号光; 以及EU控制单元，其控制所述电光调制器的操作，其中所述EU控制单元适于在所述输出种子光的状态下，基于所述电光调制器的偏置电压来调整所述电光调制器的偏置电压当由转换的光检测器检测的波长转换后的信号光的强度变得基本上最大时，施加的电压。

5. 发明授权

US09172204B2 Method for adjusting electro-optic modulator in laser device, and laser device 有权
标题翻译：激光装置电光调制器调光方法及激光装置
公开(公告)号：US09172204B2
公开(公告)日：2015-10-27
申请号：US13981187
申请日：2012-02-10
申请人： Akira Tokuhisa , Yasutoshi Takada
发明人： Akira Tokuhisa , Yasutoshi Takada
IPC分类号： H01S3/10 , G02F1/37 , H01S3/067 , H01S3/13 , H01S3/00
CPC分类号： H01S3/10015 , G02F1/37 , H01S3/0085 , H01S3/0092 , H01S3/06754 , H01S3/1301
摘要： A laser device includes: a signal light source that outputs seed light; an electro-optic modulator that chops a portion of the seed light outputted from the signal light source and outputs signal light; an optical amplifier that amplifies the signal light outputted from the electro-optic modulator; a wavelength conversion optical element that wavelength converts the signal light amplified by the optical amplifier; a converted light detector that detects the signal light that has been wavelength converted by the wavelength conversion optical element; and an EU control unit that controls the operation of the electro-optic modulator, wherein the EU control unit is adapted, in the state in which the seed light is being outputted, to adjust bias voltage of the electro-optic modulator on the basis of the applied voltage when the intensity of the signal light after wavelength conversion detected by the converted light detector becomes substantially maximum.
摘要翻译：激光装置包括：输出种子光的信号光源; 电光调制器，其切断从信号光源输出的种子光的一部分并输出信号光; 放大从电光调制器输出的信号光的光放大器; 波长转换光学元件，其波长转换由所述光放大器放大的信号光; 转换光检测器，其检测由波长转换光学元件波长转换的信号光; 以及EU控制单元，其控制所述电光调制器的操作，其中所述EU控制单元适于在所述输出种子光的状态下，基于所述电光调制器的偏置电压来调整所述电光调制器的偏置电压当由转换的光检测器检测的波长转换后的信号光的强度变得基本上最大时，施加的电压。

6. 发明申请

US20110268142A1 METHOD FOR HAVING LASER LIGHT SOURCE IN STANDBY STATUS 审中-公开
标题翻译：在待机状态下具有激光光源的方法
公开(公告)号：US20110268142A1
公开(公告)日：2011-11-03
申请号：US13154705
申请日：2011-06-07
申请人： Akira Tokuhisa , Yasutoshi Takada
发明人： Akira Tokuhisa , Yasutoshi Takada
IPC分类号： H01S3/13
CPC分类号： H01S3/2383 , G02F1/3532 , G02F1/3534 , G02F2001/354 , H01S3/005 , H01S3/06754 , H01S3/10007 , H01S3/10015 , H01S5/0612
摘要： When the laser light source is caused to standby, the temperatures of semiconductor lasers are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by the semiconductor lasers change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifiers, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.
摘要翻译：当使激光光源处于待机状态时，半导体激光器的温度从始终使用激光光源时的温度改变约3℃。在温度变化约为3℃的情况下，由半导体激光器产生的激光的波长变化约为0.3nm。这种变化在光纤放大器上几乎没有任何效果，但是波长转换光学系统的各个波长转换元件的转换效率改变，特别是几乎不会再产生深紫外光。因此，即使当激光入射到波长转换光学系统时，也不再有波长转换元件的损坏。因此，可以提供能够缩短激光源的启动时间的激光源备用方法。

7. 发明授权

US07974320B2 Method for having laser light source in standby status 有权
标题翻译：激光光源处于待机状态的方法
公开(公告)号：US07974320B2
公开(公告)日：2011-07-05
申请号：US11992321
申请日：2006-10-27
申请人： Akira Tokuhisa , Yasutoshi Takada
发明人： Akira Tokuhisa , Yasutoshi Takada
IPC分类号： H01S3/10
CPC分类号： H01S3/2383 , G02F1/3532 , G02F1/3534 , G02F2001/354 , H01S3/005 , H01S3/06754 , H01S3/10007 , H01S3/10015 , H01S5/0612
摘要： When the laser light source is caused to standby, the temperatures of semiconductor laser 1 and semiconductor laser 9 are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by semiconductor lasers 1 and 9 change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifier 2 and optical fiber amplifier 10, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.
摘要翻译：当使激光源处于待机状态时，半导体激光器1和半导体激光器9的温度从始终使用激光光源的温度改变约3℃。在大约3℃的温度变化下，由半导体激光器1和9产生的激光的波长变化大约为0.3nm。这种变化对光纤放大器2和光纤放大器10几乎没有任何影响，但波长转换光学系统的各波长转换元件的转换效率发生变化，特别是几乎不产生深紫外光更长因此，即使当激光入射到波长转换光学系统时，也不再有波长转换元件的损坏。因此，可以提供能够缩短激光源的启动时间的激光源备用方法。

8. 发明申请

US20090110012A1 Method for Having Laser Light Source in Standby Status 有权
标题翻译：激光光源处于待机状态的方法
公开(公告)号：US20090110012A1
公开(公告)日：2009-04-30
申请号：US11992321
申请日：2006-10-27
申请人： Akira Tokuhisa , Yasutoshi Takada
发明人： Akira Tokuhisa , Yasutoshi Takada
IPC分类号： H01S3/106
CPC分类号： H01S3/2383 , G02F1/3532 , G02F1/3534 , G02F2001/354 , H01S3/005 , H01S3/06754 , H01S3/10007 , H01S3/10015 , H01S5/0612
摘要： When the laser light source is caused to standby, the temperatures of semiconductor laser 1 and semiconductor laser 9 are changed by approximately 3° C. from the temperature when the laser light source is always being used. With a temperature change of approximately 3° C., the wavelengths of the laser light generated by semiconductor lasers 1 and 9 change approximately 0.3 nm. This change hardly has any effect at all on optical fiber amplifier 2 and optical fiber amplifier 10, but the conversion efficiencies at the respective wavelength conversion elements of the wavelength conversion optical system change, and, particularly, deep ultraviolet light is hardly generated at all any longer. Therefore, even while the laser light has been made incident to the wavelength conversion optical system, there is no longer damaging of the wavelength conversion elements. Therefore, it is possible to provide a laser light source standby method that is able to shorten the start up time of the laser light source.
摘要翻译：当使激光源处于待机状态时，半导体激光器1和半导体激光器9的温度从始终使用激光光源的温度改变约3℃。在大约3℃的温度变化下，由半导体激光器1和9产生的激光的波长变化大约为0.3nm。这种变化对光纤放大器2和光纤放大器10几乎没有任何影响，但波长转换光学系统的各波长转换元件的转换效率发生变化，特别是几乎不产生深紫外光更长因此，即使当激光入射到波长转换光学系统时，也不再有波长转换元件的损坏。因此，可以提供能够缩短激光源的启动时间的激光源备用方法。

9. 发明授权

US07369731B2 Optical fiber for amplification, optical amplifying apparatus, light source apparatus, photo-therapy apparatus, and exposure apparatus 失效
标题翻译：用于放大的光纤，光学放大装置，光源装置，光疗装置和曝光装置
公开(公告)号：US07369731B2
公开(公告)日：2008-05-06
申请号：US11130410
申请日：2005-05-17
申请人： Masahiro Takagi , Motoki Kakui , Akira Tokuhisa , Soichi Owa
发明人： Masahiro Takagi , Motoki Kakui , Akira Tokuhisa , Soichi Owa
IPC分类号： G02B6/02
CPC分类号： H01S3/06754 , G02B6/02009 , H01S3/005 , H01S3/06729 , H01S3/06758 , H01S3/1608 , H01S3/1693 , H01S2301/02
摘要： The present invention relates to an optical fiber for amplification, an optical amplifying apparatus, and so on, having a structure for enabling increase of power of output light, suppression of occurrence of nonlinear optical phenomena, and compact storage all together. The optical amplifying apparatus comprises an optical fiber for amplification amplifying input light inputted together with pumping light from a pumping light source. The optical fiber for amplification comprises a core region doped with a rare-earth element, and a cladding region provided on an outer periphery of the core region and having a refractive index lower than that of the core region. The core region has an outer diameter of 10 μm or more but 30 μm or less, and has a relative refractive index difference of 0.5% or more but 2.0% or less with respect to the cladding region. The cladding region has an outer diameter of 75 μm or more but 200 μm or less.
摘要翻译：本发明涉及一种用于放大的光纤，光放大装置等，具有能够增加输出光功率，抑制非线性光学现象的发生和小型存储的结构。光放大装置包括用于放大放大与泵浦光源的泵浦光一起输入的输入光的光纤。用于放大的光纤包括掺杂有稀土元素的芯区域和设置在芯区域的外周上并且折射率低于芯区域的折射率的包层区域。芯区域的外径为10μm以上且30μm以下，相对折射率差为0.5％以上且2.0％以下。包层区域的外径为75μm以上且200μm以下。

10. 发明申请

US20050259314A1 Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source 有权
标题翻译：紫外光源，包括紫外光源的激光治疗装置和包括紫外光源的曝光装置
公开(公告)号：US20050259314A1
公开(公告)日：2005-11-24
申请号：US11148428
申请日：2005-06-09
申请人： Akira Tokuhisa , Hiroshi Kitano
发明人： Akira Tokuhisa , Hiroshi Kitano
IPC分类号： A61F9/01 , G01N21/956 , G02F1/35 , G03F7/20 , H01S3/067 , H01S3/094 , H01S3/108 , H01S3/23 , H01S3/30 , G02F2/02
CPC分类号： G02F1/353 , A61F9/00804 , A61F9/00817 , A61F2009/00872 , G01N21/956 , G01N2021/95676 , G02F2001/354 , G03F7/70025 , G03F7/70575 , H01S3/067 , H01S3/06758 , H01S3/094046 , H01S3/108 , H01S3/2375 , H01S3/302
摘要： An ultraviolet light source (1) comprises a laser light source (10) for generating a signal light in the infrared region, a optical amplifier (20) which comprises fiber optical amplifiers (21, 22) and amplifies the signal light generated by the laser light source (10), and a wavelength converting optical system (30) which coverts the signal light amplified by the light amplifier (20) into an ultraviolet light and outputs the converted light. The ultraviolet light source (1) uses a single-mode fiber laser (26) as an excitation light source for at least the fiber optical amplifier (22) at one stage of the optical amplifier (20).
摘要翻译：紫外光源（1）包括用于产生红外区域中的信号光的激光源（10），包括光纤放大器（21,22）的光放大器（20），并放大由激光器产生的信号光光源（10）和将由光放大器（20）放大的信号光覆盖成紫外光的波长转换光学系统（30），并输出转换的光。紫外光源（1）在光放大器（20）的一级使用单模光纤激光器（26）作为至少光纤放大器（22）的激发光源。

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