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    • 1. 发明授权
    • Trench capacitor cells for a dram having single monocrystalline
capacitor electrode
    • 用于具有单个单晶电容器电极的电容器的沟槽电容器电池
    • US5555520A
    • 1996-09-10
    • US353368
    • 1994-12-02
    • Akira SudoYusuke KohyamaHaruhiko Koyama
    • Akira SudoYusuke KohyamaHaruhiko Koyama
    • H01L27/04H01L21/822H01L21/8242H01L27/10H01L27/108H01L29/94H01L29/68
    • H01L27/10861H01L27/10829H01L29/945
    • The present structure is characterized by the electrode of a trench capacitor of a DRAM and a periphery thereof. A trench is formed adjacent to an N type region in a substrate. An insulating film is formed on the side wall of this trench and only a part of the insulating film around the upper portion of the trench is removed, forming a window. An N type polycrystalline silicon film of a lower capacitor electrode is formed over a region from the bottom of the trench to below the window, and a capacitor insulating film is formed on this polycrystalline silicon film. A polycrystalline silicon film which becomes a first upper capacitor electrode is formed on the capacitor insulating film, filling the trench up to the lower edge of the window. A monocrystalline silicon film which becomes a second upper capacitor electrode is formed on the latter polycrystalline silicon film in such a way as to contact an N type region, filling the upper portion of the trench. An insulating film similar to a gate insulating film on the substrate is formed on the monocrystalline silicon film.
    • 本结构的特征在于DRAM的沟槽电容器的电极及其周边。 在衬底中与N型区域相邻地形成沟槽。 在该沟槽的侧壁上形成绝缘膜,并且除去沟槽上部周围的仅绝缘膜的一部分,形成窗口。 在从沟槽的底部到窗口的下方的区域上形成下部电容电极的N型多晶硅膜,在该多晶硅膜上形成电容绝缘膜。 在电容器绝缘膜上形成成为第一上电容器电极的多晶硅膜,将沟槽填充到窗口的下边缘。 在后面的多晶硅膜上形成成为第二上电容器电极的单晶硅膜,以接触填充沟槽上部的N型区域。 在单晶硅膜上形成与基板上的栅极绝缘膜相似的绝缘膜。
    • 5. 发明授权
    • Semiconductor memory device and its manufacturing method
    • 半导体存储器件及其制造方法
    • US06897502B2
    • 2005-05-24
    • US10620698
    • 2003-07-17
    • Shinichi WatanabeToyota MorimotoTohru OzakiHaruhiko Koyama
    • Shinichi WatanabeToyota MorimotoTohru OzakiHaruhiko Koyama
    • H01L27/105H01L21/8246H01L27/115H01L29/76
    • H01L27/11502H01L27/11507
    • A first impurity diffusion area is formed in the semiconductor substrate at a bottom of the first trench formed in a surface of the semiconductor substrate. A second impurity diffusion area is formed in the surface of the semiconductor substrate, each have one end contacting a first side wall of the first trench, and each have the same conductive type as the first impurity diffusion area. A first gate electrode is provided on the first side wall between the first and second impurity diffusion areas with a gate insulating film interposed therebetween. A first ferroelectric film is provided on a first lower electrode, which is provided on the second impurity area. A first upper electrode is provided on the first ferroelectric film. A first interconnection layer is provided above the first upper electrode. A first contact plug electrically connects the first interconnection layer and first impurity diffusion area.
    • 在形成于半导体衬底的表面中的第一沟槽的底部的半导体衬底中形成第一杂质扩散区。 在半导体基板的表面形成第二杂质扩散区域,每个第一杂质扩散区域的一端与第一沟槽的第一侧壁接触,并且各自具有与第一杂质扩散区域相同的导电类型。 第一栅电极设置在第一和第二杂质扩散区之间的第一侧壁上,其间插入有栅极绝缘膜。 第一铁电体膜设置在设置在第二杂质区域上的第一下部电极上。 第一上电极设置在第一铁电体膜上。 第一互连层设置在第一上电极上方。 第一接触插塞电连接第一互连层和第一杂质扩散区。
    • 6. 发明授权
    • Switchgear control apparatus
    • 开关柜控制装置
    • US07787228B2
    • 2010-08-31
    • US11873076
    • 2007-10-16
    • Haruhiko KoyamaTomohito MoriKenji KameiSadayuki Kinoshita
    • Haruhiko KoyamaTomohito MoriKenji KameiSadayuki Kinoshita
    • H02H7/00
    • H01H9/563H02P13/00
    • A switchgear control apparatus includes main contacts for first to third phases, operating mechanisms for activating the main contacts for the respective phases, voltage sensors for detecting phase voltages of a three-phase power source, and a contact closing control circuit. The contact closing control circuit first outputs a contact closing signal to the first-phase operating mechanism to close the first-phase main contact corresponding to a central leg of a core of a three-phase reactor at a first-phase voltage peak, and then a contact closing signal to the second- and third-phase operating mechanisms to simultaneously close the second- and third-phase main contacts corresponding to two outer legs of the reactor core at a zero-voltage point of the first phase three-quarter cycle later than close of the main contact for the first phase.
    • 开关控制装置包括用于第一至第三相的主触点,用于激活各相的主触头的操作机构,用于检测三相电源的相电压的电压传感器和触点闭合控制电路。 接触闭合控制电路首先向第一相操作机构输出接点闭合信号,以将第一相电压峰值的三相电抗器的铁芯的中心支路对应的第一相主触点闭合,然后 接触关闭信号到第二和第三相操作机构,以在第一阶段的四个周期的零电压点同时闭合对应于反应堆堆芯的两个外部柱的第二和第三相主触头 比第一阶段的主要联系人接近。
    • 8. 发明授权
    • Switchgear control apparatus
    • 开关柜控制装置
    • US07616419B2
    • 2009-11-10
    • US11907054
    • 2007-10-09
    • Haruhiko KoyamaTomohito MoriKenji KameiSadayuki Kinoshita
    • Haruhiko KoyamaTomohito MoriKenji KameiSadayuki Kinoshita
    • H02H3/12
    • H01H9/56H01H9/563
    • A switchgear control apparatus includes a zero point interval detecting circuit, an interruption time judgment circuit and a reclosing time decision circuit. The zero point interval detecting circuit detects time intervals between successive zero points of a main circuit current. The interruption time judgment circuit judges that interruption time of the main circuit current is time of a zero point immediately preceding a zero point at which a difference between the time interval between two successive zero points and half the period of a commercial AC voltage exceeds a specific value. Upon detecting the gradient of the main circuit current at the interruption time, the reclosing time decision circuit sets reclosing time at a point in phase where the AC voltage has a maximum negative value if the gradient is positive, and at a point in phase where the AC voltage has a maximum positive value if the gradient is negative.
    • 一种开关设备控制装置,包括零点间隔检测电路,中断时间判断电路和重合闸时间判定电路。 零点间隔检测电路检测主电路电流的连续零点之间的时间间隔。 中断时间判断电路判断主电路电流的中断时间是紧邻零点之间的零点的时间,在该零点之间,两个连续的零点之间的时间间隔与商用交流电压的一半的时间间隔之间的差超过特定的 值。 在检测到中断时的主电路电流的梯度时,重合闸时间决定电路将梯形为正的交流电压为最大负值的同相位置的重新闭合时间设定在同相位置 如果梯度为负,则交流电压具有最大正值。
    • 10. 发明授权
    • Semiconductor memory device
    • 半导体存储器件
    • US08189360B2
    • 2012-05-29
    • US12725640
    • 2010-03-17
    • Haruhiko Koyama
    • Haruhiko Koyama
    • G11C5/02G11C5/06G11C16/04H01L29/788
    • G11C8/14G11C5/02G11C5/063G11C16/04H01L27/11519H01L27/11521
    • A semiconductor memory device includes first and second element regions having a rectangular bent portion and a pair of straight line portions connected to both ends of the bent portions, respectively. The pair of straight line portions extends in an opposite direction each other along a first direction. A first element region is arranged in parallel with the second element region so that the first and second element regions are isolated by an element isolation region, and the first and second bent portions are arranged along a second direction in which the first direction intersects with the second direction at an acute angle. A select gate line connected to select transistors extends in the second direction. A plurality of word lines connected to the memory cells are arranged in parallel with the select gate line in an opposite side of the bent portions with respect to the select gate line.
    • 半导体存储器件包括分别具有矩形弯曲部分和连接到弯曲部分两端的一对直线部分的第一和第二元件区域。 一对直线部沿着第一方向彼此相反的方向延伸。 第一元件区域与第二元件区域平行地布置,使得第一和第二元件区域被元件隔离区域隔离,并且第一和第二弯曲部分沿着第一方向与第一元件区域相交的第二方向 第二方向为锐角。 连接到选择晶体管的选择栅极线沿第二方向延伸。 连接到存储器单元的多个字线相对于选择栅极线在弯曲部分的相对侧与选择栅极线平行布置。