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    • 3. 发明申请
    • Manufacture method for ZnO based semiconductor crystal and light emitting device using same
    • 基于ZnO的半导体晶体的制造方法和使用它的发光器件
    • US20100181550A1
    • 2010-07-22
    • US12749401
    • 2010-03-29
    • Hiroshi KOTANIMichihiro SANOHiroyuki KATOAkio OGAWA
    • Hiroshi KOTANIMichihiro SANOHiroyuki KATOAkio OGAWA
    • H01L33/00
    • H01L21/02576H01L21/0237H01L21/02403H01L21/02433H01L21/02472H01L21/02554H01L21/02565H01L21/02579H01L21/02631H01L33/0083
    • A manufacture method for zinc oxide (ZnO) based semiconductor crystal includes providing a substrate having a Zn polarity plane; and reacting at least zinc (Zn) and oxygen (O) on the Zn polarity plane of said substrate to grow ZnO based semiconductor crystal on the Zn polarity plane of said substrate in a Zn rich condition. (a) An n-type ZnO buffer layer is formed on a Zn polarity plane of a substrate. (b) An n-type ZnO layer is formed on the surface of the n-type ZnO buffer layer. (c) An n-type ZnMgO layer is formed on the surface of the n-type ZnO layer. (d) A ZnO/ZnMgO quantum well layer is formed on the surface of the n-type ZnMgO layer, by alternately laminating a ZnO layer and a ZnMgO layer. @(e) A p-type ZnMgO layer is formed on the surface of the ZnO/ZnMgO quantum well layer. (f) A p-type ZnO layer is formed on the surface of the p-type ZnMgO layer. @(g) An electrode is formed on the n-type ZnO layer and p-type ZnO layer. The n-type ZnO layer is formed under a Zn rich condition at the step (b).
    • 一种氧化锌(ZnO)系半导体晶体的制造方法,其特征在于,提供具有Zn极性面的基板, 并且在所述衬底的Zn极性平面上使至少锌(Zn)和氧(O)反应,以在富锌条件下在所述衬底的Zn极性平面上生长ZnO基半导体晶体。 (a)在基板的Zn极性平面上形成n型ZnO缓冲层。 (b)在n型ZnO缓冲层的表面上形成n型ZnO层。 (c)在n型ZnO层的表面上形成n型ZnMgO层。 (d)通过交替层叠ZnO层和ZnMgO层,在n型ZnMgO层的表面上形成ZnO / ZnMgO量子阱层。 (e)在ZnO / ZnMgO量子阱层的表面上形成p型ZnMgO层。 (f)在p型ZnMgO层的表面上形成p型ZnO层。 (g)在n型ZnO层和p型ZnO层上形成电极。 在步骤(b),在富锌条件下形成n型ZnO层。