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    • 8. 发明授权
    • Solid state imaging device, method for producing the same, and portable electronic device
    • 固态成像装置及其制造方法以及便携式电子装置
    • US07052928B2
    • 2006-05-30
    • US10778655
    • 2004-02-12
    • Takefumi KonishiKazuhiro Kawajiri
    • Takefumi KonishiKazuhiro Kawajiri
    • H01L21/00
    • H01L27/14689H01L27/14609H01L27/1463H01L27/14687
    • A method for producing a solid-state imaging device comprising a plurality of unit pixel sections, including a first unit pixel section, is provided. The method includes the steps of forming a first conductivity type well region of the first unit pixel section on a second conductivity type semiconductor layer provided on a first conductivity type semiconductor layer, the first conductivity type well region including a light receiving region for generating charges corresponding to an amount of light incident thereon and a charge transfer region capable of transferring the charges; and generating a charge accumulation region, for accumulating the charges generated in the light receiving region, in the charge transfer region. The step of forming the first conductivity type well region includes the step of implanting impurities such that the light receiving region and the charge transfer region in the first conductivity type well region have a substantially uniform impurity concentration.
    • 提供了一种用于制造固态成像装置的方法,所述固态成像装置包括包括第一单位像素部分的多个单位像素部分。 该方法包括以下步骤:在设置在第一导电类型半导体层上的第二导电类型半导体层上形成第一单位像素部分的第一导电类型阱区,该第一导电类型阱区包括用于产生电荷的光接收区 到入射到其上的光量和能够传送电荷的电荷转移区域; 以及产生用于在电荷转移区域中积累在光接收区域中产生的电荷的电荷累积区域。 形成第一导电型阱区域的步骤包括注入杂质的步骤,使得第一导电类型阱区域中的光接收区域和电荷转移区域具有基本均匀的杂质浓度。