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    • 6. 发明授权
    • Probe card and manufacturing method thereof
    • 探针卡及其制造方法
    • US09052341B2
    • 2015-06-09
    • US13403227
    • 2012-02-23
    • Akinori ShiraishiHideaki SakaguchiMitsutoshi Higashi
    • Akinori ShiraishiHideaki SakaguchiMitsutoshi Higashi
    • G01R3/00G01R1/073G01R31/28
    • G01R3/00G01R1/07378G01R31/2889Y10T29/49117
    • In one embodiment, a probe card is provided. The probe card includes: a substrate having a first surface and a second surface opposite to the first surface; a through hole formed through the substrate and extending between the first surface and the second surface; an elastic member formed in the through hole to extend to the first surface; a through electrode formed in through hole to extend to the second surface; a first trace on a surface of the elastic member to be electrically connected to the through electrode; and a contact bump on the elastic member via the first trace to be electrically connected to the first trace, wherein the contact bump is electrically connected to an electrode pad formed on a DUT (device under test) when an electrical testing is performed on the DUT using the probe card.
    • 在一个实施例中,提供探针卡。 探针卡包括:具有第一表面和与第一表面相对的第二表面的基底; 穿过所述基板形成并在所述第一表面和所述第二表面之间延伸的通孔; 形成在所述通孔中以延伸到所述第一表面的弹性构件; 形成在通孔中以延伸到第二表面的通孔; 所述弹性构件的表面上的与所述贯通电极电连接的第一迹线; 以及经由所述第一迹线在所述弹性构件上的接触凸块以电连接到所述第一迹线,其中当对所述DUT进行电测试时,所述接触凸块电连接到形成在DUT(待测器件)上的电极焊盘) 使用探针卡。