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1. 发明申请

US20110062327A1 Charged Particle Beam Device 失效
标题翻译：带电粒子束装置
公开(公告)号：US20110062327A1
公开(公告)日：2011-03-17
申请号：US12906361
申请日：2010-10-18
申请人： Akiko FUJISAWA , Eiko Nakazawa , Isao Nagaoki
发明人： Akiko FUJISAWA , Eiko Nakazawa , Isao Nagaoki
IPC分类号： G01N23/00
CPC分类号： G01N23/04
摘要： There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, in which each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. When the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to another gradation scale and a scanning transmission electron microscope image is obtained.
摘要翻译：提供了一种带电粒子束装置，其可以防止由于在扫描透射电子显微镜图像的每个像素是视场中的网格的一部分网格进入而不能观察到样本基于预定灰度级的灰度值显示。在预定灰度值的像素数不小于预定百分比的情况下，判断网格图像包含在扫描透射电子显微镜图像中。当扫描透射电子显微镜图像中不再包括网格图像时，将预定灰度级别转换为另一灰度级，并获得扫描透射电子显微镜图像。

2. 发明授权

US08288725B2 Charged particle beam device 失效
标题翻译：带电粒子束装置
公开(公告)号：US08288725B2
公开(公告)日：2012-10-16
申请号：US12906361
申请日：2010-10-18
申请人： Akiko Fujisawa , Eiko Nakazawa , Isao Nagaoki
发明人： Akiko Fujisawa , Eiko Nakazawa , Isao Nagaoki
IPC分类号： G01N23/00
CPC分类号： G01N23/04
摘要： There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, in which each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. When the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to another gradation scale and a scanning transmission electron microscope image is obtained.
摘要翻译：提供了一种带电粒子束装置，其可以防止由于在扫描透射电子显微镜图像的每个像素是视场中的网格的一部分网格进入而不能观察到样本基于预定灰度级的灰度值显示。在预定灰度值的像素数不小于预定百分比的情况下，判断网格图像包含在扫描透射电子显微镜图像中。当扫描透射电子显微镜图像中不再包括网格图像时，将预定灰度级别转换为另一灰度级，并获得扫描透射电子显微镜图像。

3. 发明授权

US07838829B2 Charged particle beam device 有权
标题翻译：带电粒子束装置
公开(公告)号：US07838829B2
公开(公告)日：2010-11-23
申请号：US12046159
申请日：2008-03-11
申请人： Akiko Fujisawa , Eiko Nakazawa , Isao Nagaoki
发明人： Akiko Fujisawa , Eiko Nakazawa , Isao Nagaoki
IPC分类号： G01N23/00
CPC分类号： G01N23/04
摘要： There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of a predetermined gray value is less than a predetermined percentage, it is decided that a mesh image is not included in the scanning transmission electron microscope image. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. In the case where the mesh image is included in the scanning transmission electron microscope image, a magnification is increased, a specimen stage is moved, or beam deflection is performed, and when the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to other gradation scale and a scanning transmission electron microscope image is obtained.
摘要翻译：提供一种带电粒子束装置，其能够防止由于在视场中进入网格的一部分网格而不能观察到样本，扫描透射电子显微镜图像的每个像素显示在是预定灰度级的灰度值的基础。在预定灰度值的像素数小于预定百分比的情况下，确定扫描透射电子显微镜图像中不包括网格图像。在预定灰度值的像素数不小于预定百分比的情况下，判断网格图像包含在扫描透射电子显微镜图像中。在扫描透射电子显微镜图像中包含网格图像的情况下，增大放大率，移动样本台或进行光束偏转，并且当扫描透射电子显微镜图像中不再包括网格图像时，将预定的灰度等级转换为其他灰度级，并获得扫描透射电子显微镜图像。

4. 发明申请

US20080224037A1 Charged Particle Beam Device 有权
标题翻译：带电粒子束装置
公开(公告)号：US20080224037A1
公开(公告)日：2008-09-18
申请号：US12046159
申请日：2008-03-11
申请人： Akiko FUJISAWA , Eiko Nakazawa , Isao Nagaoki
发明人： Akiko FUJISAWA , Eiko Nakazawa , Isao Nagaoki
IPC分类号： G01N23/04
CPC分类号： G01N23/04
摘要： There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of a predetermined gray value is less than a predetermined percentage, it is decided that a mesh image is not included in the scanning transmission electron microscope image. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. In the case where the mesh image is included in the scanning transmission electron microscope image, a magnification is increased, a specimen stage is moved, or beam deflection is performed, and when the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to other gradation scale and a scanning transmission electron microscope image is obtained.
摘要翻译：提供一种带电粒子束装置，其能够防止由于在视场中进入网格的一部分网格而不能观察到样本，扫描透射电子显微镜图像的每个像素显示在是预定灰度级的灰度值的基础。在预定灰度值的像素数小于预定百分比的情况下，确定扫描透射电子显微镜图像中不包括网格图像。在预定灰度值的像素数不小于预定百分比的情况下，判断网格图像包含在扫描透射电子显微镜图像中。在扫描透射电子显微镜图像中包含网格图像的情况下，增大放大率，移动样本台或进行光束偏转，并且当扫描透射电子显微镜图像中不再包括网格图像时，将预定的灰度等级转换为其他灰度级，并获得扫描透射电子显微镜图像。

5. 发明授权

US06875983B2 Electron microscope and means to set observation conditions 有权
标题翻译：电子显微镜和设置观察条件的手段
公开(公告)号：US06875983B2
公开(公告)日：2005-04-05
申请号：US10098774
申请日：2002-03-19
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： H01J37/265 , H01J37/28
摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.
摘要翻译：本发明的目的是提供一种能够在重新开始样品观察时提高工作效率的电子显微镜。一种用于控制观察条件设置装置的控制单元，包括电子枪控制单元，照射透镜控制单元，物镜控制单元，放大透镜系统控制单元和样本台控制单元，被提供。当指定某个样品的图像数据时，检索样品的观察条件数据。然后，根据观察条件数据，在电子显微镜上自动恢复与保存样品的图像数据时相同的观察条件。结果，与存储的图像相同的图像被忠实地恢复。

6. 发明授权

US06982420B2 Sample observation method and transmission electron microscope 失效
公开(公告)号：US06982420B2
公开(公告)日：2006-01-03
申请号：US10720251
申请日：2003-11-25
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： G21K7/00
CPC分类号： G06K9/00147 , H01J37/26 , H01J2237/221
摘要： Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.

7. 发明授权

US07041977B2 Electron microscope 失效
公开(公告)号：US07041977B2
公开(公告)日：2006-05-09
申请号：US11052200
申请日：2005-02-08
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/26
CPC分类号： H01J37/265 , H01J37/28
摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.

8. 发明申请

US20060011838A1 Sample observation method and transmission electron microscope 有权
标题翻译：样品观察法和透射电子显微镜
公开(公告)号：US20060011838A1
公开(公告)日：2006-01-19
申请号：US11228400
申请日：2005-09-19
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： G21K7/00
CPC分类号： G06K9/00147 , H01J37/26 , H01J2237/221
摘要： Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
摘要翻译：对作为参考图像倾斜的物体的透射图像和通过该透射图像的极坐标变换获得的图像进行准备，并且通过样本中的物体的透射图像的极坐标变换获得的图像建立相关性。

9. 发明授权

US07214938B2 Sample observation method and transmission electron microscope 有权
标题翻译：样品观察法和透射电子显微镜
公开(公告)号：US07214938B2
公开(公告)日：2007-05-08
申请号：US11228400
申请日：2005-09-19
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/26 , G21K7/00
CPC分类号： G06K9/00147 , H01J37/26 , H01J2237/221
摘要： Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
摘要翻译：对于作为参考图像倾斜的物体的透射图像和通过该透射图像的极坐标变换而获得的图像进行准备，并且通过样本中的物体的透射图像的极坐标变换获得的图像建立相关性。

10. 发明申请

US20050145792A1 Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US20050145792A1
公开(公告)日：2005-07-07
申请号：US11052200
申请日：2005-02-08
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28 , G21K7/00 , G01N23/00
CPC分类号： H01J37/265 , H01J37/28
摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.
摘要翻译：本发明的目的是提供一种能够在重新开始样品观察时提高工作效率的电子显微镜。一种用于控制观察条件设置装置的控制单元，包括电子枪控制单元，照射透镜控制单元，物镜控制单元，放大透镜系统控制单元和样本台控制单元，被提供。当指定某个样品的图像数据时，检索样品的观察条件数据。然后，根据观察条件数据，在电子显微镜上自动恢复与保存样品的图像数据时相同的观察条件。结果，与存储的图像相同的图像被忠实地恢复。

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