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    • 6. 发明申请
    • PIEZOELECTRIC MOTOR, LIQUID EJECTING APPARATUS, AND CLOCK
    • 压电电机,液体喷射装置和时钟
    • US20100245517A1
    • 2010-09-30
    • US12732045
    • 2010-03-25
    • Osamu MiyazawaYasuharu HashimotoAkihito MatsumotoAkira Matsuzawa
    • Osamu MiyazawaYasuharu HashimotoAkihito MatsumotoAkira Matsuzawa
    • B41J29/38H02N2/12
    • B41J13/03B41J2/14201B41J11/42B41J23/00G04C3/00G04C3/12H01L41/08H01L41/0913H02N2/004H02N2/0055H02N2/021H02N2/026H02N2/103H02N2/123
    • A piezoelectric motor includes a piezoelectric element having a piezoelectric layer, and a first and a second electrodes, the first electrode provided on one surface side of the piezoelectric layer, and the second electrode provided on the other surface side of the piezoelectric layer; a piezoelectric actuator having a vibrating member anchored to the first electrode of the piezoelectric element; and a rotational shaft with which the vibrating member makes contact and is rotated thereby. The piezoelectric layer includes a vertical vibration excitation region, provided toward the center of the piezoelectric layer in the widthwise direction, that elicits vertical vibrations, and two groups of bending vibration excitation regions, one group disposed on either side of the vertical vibration excitation region so that two opposing diagonal pairs are formed; and the polarization direction of the vertical vibration excitation region and one of the groups of the bending vibration excitation regions in the piezoelectric layer is inverted relative to the other group of the bending vibration excitation regions.
    • 压电电动机包括具有压电层的压电元件和第一和第二电极,设置在压电层的一个表面侧的第一电极和设置在压电层另一表面侧的第二电极; 压电致动器,其具有锚定到所述压电元件的第一电极的振动构件; 以及旋转轴,振动构件与其接触并由此旋转。 压电层包括沿宽度方向朝向压电层的中心设置的垂直振动激励区域,其引起垂直振动,以及两组弯曲振动激励区域,一组设置在垂直振动激励区域的两侧,因此 形成两个相对的对角线对; 并且垂直振动激励区域的偏振方向和压电层中的弯曲振动激励区域中的一个组相对于另一组弯曲振动激励区域反转。
    • 8. 发明授权
    • Method of manufacturing a piezoelectric element
    • 制造压电元件的方法
    • US07841056B2
    • 2010-11-30
    • US12192161
    • 2008-08-15
    • Akihito MatsumotoTakamitsu HiguchiYasuhiro Ono
    • Akihito MatsumotoTakamitsu HiguchiYasuhiro Ono
    • H04R17/00H01L41/053
    • B41J2/161B41J2/1628B41J2/1629B41J2/1631B41J2/1634B41J2/1639B41J2/1642B41J2/1646H01L41/047H01L41/0973H01L41/314H01L41/332Y10T29/42Y10T29/49126
    • A method of manufacturing a piezoelectric element includes: forming a first base substrate having an element to be transferred; forming a second base substrate; and transferring the element to the second base substrate. The forming of the element includes forming a first electrode above a first substrate, forming a piezoelectric layer above the first electrode, forming a second electrode above the piezoelectric layer, crystallizing the piezoelectric layer, forming a dielectric layer above the second electrode, and etching the dielectric layer such that part of the second electrode is exposed and the dielectric layer has a protrusion upwardly protruding relative to the second electrode. Forming the second base substrate includes forming a third electrode above a second substrate. The transferring includes bonding the element and the second base substrate such that the second substrate is in contact with the protrusion and the second electrode is in contact with the third electrode.
    • 一种制造压电元件的方法包括:形成具有待转印元件的第一基底基板; 形成第二基底; 并将元件转移到第二基底基板。 元件的形成包括在第一基板上形成第一电极,在第一电极之上形成压电层,在压电层上方形成第二电极,使压电层结晶,在第二电极上形成电介质层, 电介质层,使得第二电极的一部分被暴露,并且电介质层具有相对于第二电极向上突出的突起。 形成第二基底基底包括在第二基底上形成第三电极。 转印包括将元件和第二基底基板接合,使得第二基板与突起接触并且第二电极与第三电极接触。