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    • 1. 发明授权
    • Method and apparatus for manufacturing superconducting components via
laser ablation followed by laser material processing
    • 通过激光烧蚀制造超导部件的激光材料加工方法和装置
    • US5672210A
    • 1997-09-30
    • US517957
    • 1995-08-22
    • Akihiro MotoTatsuoki NagaishiHideo Itozaki
    • Akihiro MotoTatsuoki NagaishiHideo Itozaki
    • C01B13/14C01G1/00C23C14/28C23C14/58H01B13/00H01L39/24C23C146/00
    • C23C14/28H01L39/2448H01L39/2464Y10S505/732
    • The method for manufacturing superconducting elements according to the present invention include the following steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to face a surface of the target, wherein the target comprises a target material of a complex oxide superconducting compounds; (b) irradiating a laser beam to the surface of the target to vaporize or sublime the target material so that the target material is deposited onto a surface of the substrate, wherein the surface of the substrate maintains the position facing the surface of the target; and (c) fabricating the surface of the target material layer on the substrate to form a superconducting element by irradiating a laser beam to the surface of the substrate, without removing the substrate from the chamber. The laser beam of step (b) used to irradiate may traverse along a first optical path, and the laser beam of step (c) of fabricating the surface used for the target may traverse along a second optical path, which is not consistent with the first optical path.
    • 根据本发明的制造超导元件的方法包括以下步骤:(a)将基板放置在室内,使得基板定位成与靶的表面相对,其中靶包括目标材料 的复合氧化物超导化合物; (b)将激光束照射到所述靶的表面上以使所述靶材料蒸发或升华,使得所述靶材料沉积到所述基板的表面上,其中所述基板的表面保持面向所述目标表面的位置; 和(c)在衬底上制造目标材料层的表面以通过将激光束照射到衬底的表面而形成超导元件,而不从腔室移除衬底。 用于照射的步骤(b)的激光束可以沿第一光路穿过,并且制造用于靶的表面的步骤(c)的激光束可以沿着与第二光路不一致的第二光路 第一光路。
    • 2. 发明授权
    • Method for manufacturing oxide superconducting films via laser ablation
followed by laser material processing
    • 通过激光烧蚀制造氧化物超导膜的激光材料加工方法
    • US5952271A
    • 1999-09-14
    • US813076
    • 1997-03-07
    • Akihiro MotoTatsuoki NagaishiHideo Itozaki
    • Akihiro MotoTatsuoki NagaishiHideo Itozaki
    • C01B13/14C01G1/00C23C14/28C23C14/58H01B13/00H01L39/24B05D3/06
    • C23C14/28H01L39/2448H01L39/2464Y10S505/732
    • The method for manufacturing superconducting elements according to the present invention includes the following steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to face a surface of the target, wherein the target comprises a target material of a complex oxide superconducting compounds; (b) irradiating a laser beam to the surface of the target to vaporize or sublime the target material so that the target material is deposited onto a surface of the substrate, wherein the surface of the substrate maintains the position facing the surface of the target; and (c) fabricating the surface of the target material layer on the substrate to form a superconducting element by irradiating a laser beam to the surface of the substrate, without removing the substrate from the chamber. The laser beam of step (b) used to irradiate may traverse along a first optical path, and the laser beam of step (c) used for fabricating the surface of the target may traverse along a second optical path, which is not consistent with the first optical path.
    • 根据本发明的制造超导元件的方法包括以下步骤:(a)将基板放置在室内,使得基板定位成与靶的表面相对,其中靶包括目标材料 的复合氧化物超导化合物; (b)将激光束照射到所述靶的表面上以使所述靶材料蒸发或升华,使得所述靶材料沉积到所述基板的表面上,其中所述基板的表面保持面向所述目标表面的位置; 和(c)在衬底上制造目标材料层的表面以通过将激光束照射到衬底的表面而形成超导元件,而不从腔室移除衬底。 用于照射的步骤(b)的激光束可以沿着第一光路穿过,用于制造靶的表面的步骤(c)的激光束可以沿着与第二光路不一致的第二光路 第一光路。
    • 4. 发明授权
    • Apparatus for cooling superconductor
    • 超导体冷却装置
    • US06334313B1
    • 2002-01-01
    • US09458695
    • 1999-12-13
    • Tatsuoki NagaishiHideo Itozaki
    • Tatsuoki NagaishiHideo Itozaki
    • F25B4106
    • F17C13/007F17C2201/0119F17C2203/0391F17C2203/0629F17C2203/0687F17C2227/0337
    • In the apparatus for cooling a superconductor in accordance with the present invention, a male thread portion of an inner container engages a female thread portion of an outer container so as to connect the inner and outer containers to each other. Also, the bottom wall of the inner container is provided with a thermal conductor penetrating therethrough. Further, a sapphire sheet is joined to peripheral portions of an opening of the bottom wall of the outer container facing the thermal conductor, so as to block the opening. As the distance between the bottom wall of the outer container and the bottom wall of the inner container is freely adjusted by changing the engaging position between the thread portions, the gap between a high transition temperature (high Tc) superconducting magnetic sensor and the sapphire sheet is adjusted.
    • 在根据本发明的用于冷却超导体的设备中,内部容器的阳螺纹部分与外部容器的阴螺纹部分接合,以将内外容器彼此连接。 此外,内部容器的底壁设置有贯穿其中的热导体。 此外,蓝宝石板与面向热导体的外容器的底壁的开口的周边部分接合,以阻挡开口。 由于通过改变螺纹部分之间的接合位置来自由地调节外部容器的底壁和内部容器的底壁之间的距离,所以高转变温度(高Tc)超导磁性传感器和蓝宝石板之间的间隙 被调整。
    • 7. 发明授权
    • Apparatus and method for depositing films on substrate via on-axis laser
ablation
    • 通过轴上激光烧蚀在衬底上沉积膜的装置和方法
    • US5624722A
    • 1997-04-29
    • US609248
    • 1996-03-01
    • Tatsuoki NagaishiHideo Itozaki
    • Tatsuoki NagaishiHideo Itozaki
    • C23C14/08C23C14/28H01L39/24C23C8/00
    • C23C14/087C23C14/28H01L39/2448
    • An apparatus and a method are provided for depositing both surfaces of the substrate in one deposition process via on-axis oriented laser ablation. For example, the first apparatus for depositing thin films according to the present invention comprises (1) a vacuum chamber, said chamber having (a) a first target supported by a first target holder, (b) a second target supported by a second target holder so as to face the first target, (c) a substrate holder for holding a substrate such that first and second surfaces of the substrate face the first and second targets, respectively, (d) a heating means for heating the substrate, (e) a first entrance window through which a first laser beam passes and strikes on the first target with a predetermined angle, and (f) a second entrance window through which a second laser beam passes and strikes on the second target with a predetermined angle and (2) a laser optical system comprising at least one laser beam source and optical path system including mirror for reflecting the laser beam from the laser beam source into the first and second targets respectively with the predetermined angles through the first and second entrance windows of the chamber.
    • 提供了一种装置和方法,用于通过基于轴的定向激光烧蚀在一个沉积工艺中沉积衬底的两个表面。 例如,根据本发明的用于沉积薄膜的第一装置包括(1)真空室,所述室具有(a)由第一目标保持器支撑的第一目标,(b)由第二目标支撑的第二目标 (c)用于保持基板的基板保持器,使得基板的第一和第二表面分别面对第一和第二靶,(d)加热基板的加热装置,(e )第一入口窗口,第一激光束通过该入口窗口以预定角度通过并撞击在第一目标上,以及(f)第二入口窗口,第二激光束通过第二入口窗口以预定角度通过并撞击在第二目标上, 2)激光光学系统,其包括至少一个激光束源和光路系统,该光路系统包括用于将激光束从激光束源反射到第一和第二目标中的预定角度的反射镜 gh房间的第一个和第二个入口窗口。