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1. 发明授权

US07180082B1 Method for plasma formation for extreme ultraviolet lithography-theta pinch 有权
标题翻译：用于等离子体形成的方法用于极紫外光刻-θ夹点
公开(公告)号：US07180082B1
公开(公告)日：2007-02-20
申请号：US11066655
申请日：2005-02-22
申请人： Ahmed Hassanein , Isak Konkashbaev , Bryan Rice
发明人： Ahmed Hassanein , Isak Konkashbaev , Bryan Rice
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , H05G2/005
摘要： A device and method for generating extremely short-wave ultraviolet electromagnetic wave, utilizing a theta pinch plasma generator to produce electromagnetic radiation in the range of 10 to 20 nm. The device comprises an axially aligned open-ended pinch chamber defining a plasma zone adapted to contain a plasma generating gas within the plasma zone; a means for generating a magnetic field radially outward of the open-ended pinch chamber to produce a discharge plasma from the plasma generating gas, thereby producing a electromagnetic wave in the extreme ultraviolet range; a collecting means in optical communication with the pinch chamber to collect the electromagnetic radiation; and focusing means in optical communication with the collecting means to concentrate the electromagnetic radiation.
摘要翻译：一种用于产生极短波紫外线电磁波的装置和方法，其利用θ收缩等离子体发生器产生在10至20nm范围内的电磁辐射。所述装置包括轴向对准的开口收缩室，其限定适于在等离子体区域内容纳等离子体产生气体的等离子体区域; 用于产生位于所述开放式收缩室的径向外侧的磁场的装置，以从所述等离子体产生气体产生放电等离子体，由此产生极紫外范围的电磁波; 收集装置，与收集室进行光通信以收集电磁辐射; 以及聚焦装置，与收集装置进行光学通信，以集中电磁辐射。

2. 发明授权

US07115887B1 Method for generating extreme ultraviolet with mather-type plasma accelerators for use in Extreme Ultraviolet Lithography 有权
标题翻译：用于极光紫外光刻的Mather型等离子体加速器产生极紫外线的方法
公开(公告)号：US07115887B1
公开(公告)日：2006-10-03
申请号：US11079238
申请日：2005-03-15
申请人： Ahmed Hassanein , Isak Konkashbaev
发明人： Ahmed Hassanein , Isak Konkashbaev
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： A device and method for generating extremely short-wave ultraviolet electromagnetic wave uses two intersecting plasma beams generated by two plasma accelerators. The intersection of the two plasma beams emits electromagnetic radiation and in particular radiation in the extreme ultraviolet wavelength. In the preferred orientation two axially aligned counter streaming plasmas collide to produce an intense source of electromagnetic radiation at the 13.5 nm wavelength. The Mather type plasma accelerators can utilize tin, or lithium covered electrodes. Tin, lithium or xenon can be used as the photon emitting gas source.
摘要翻译：用于产生极短波紫外电磁波的装置和方法使用由两个等离子体加速器产生的两个相交的等离子体束。两个等离子体束的交点发射电磁辐射，特别是在极紫外波长的辐射。在优选的取向中，两个轴向排列的反流等离子体在13.5nm波长处产生强电磁辐射源。 Mather型等离子体加速器可以使用锡或锂覆盖的电极。锡，锂或氙可用作光子发射气体源。

3. 发明授权

US07651673B1 Method and system for small scale pumping 失效
标题翻译：小规模泵送方法与系统
公开(公告)号：US07651673B1
公开(公告)日：2010-01-26
申请号：US12467987
申请日：2009-05-18
申请人： Zeke Insepov , Ahmed Hassanein
发明人： Zeke Insepov , Ahmed Hassanein
IPC分类号： D01F9/12
CPC分类号： F04B19/006 , A61M5/142 , B82Y15/00
摘要： The present invention relates generally to the field of small scale pumping and, more specifically, to a method and system for very small scale pumping media through microtubes. One preferred embodiment of the invention generally comprises: method for small scale pumping, comprising the following steps: providing one or more media; providing one or more microtubes, the one or more tubes having a first end and a second end, wherein said first end of one or more tubes is in contact with the media; and creating surface waves on the tubes, wherein at least a portion of the media is pumped through the tube.
摘要翻译：本发明一般涉及小规模泵送领域，更具体地，涉及通过微管的非常小规模泵送介质的方法和系统。本发明的一个优选实施例通常包括：小规模泵送方法，包括以下步骤：提供一个或多个介质; 提供一个或多个微管，所述一个或多个管具有第一端和第二端，其中一个或多个管的所述第一端与所述介质接触; 并且在管上产生表面波，其中介质的至少一部分被泵送通过管。

4. 发明授权

US07632482B1 Method for nano-pumping using carbon nanotubes 失效
标题翻译：使用碳纳米管进行纳米泵浦的方法
公开(公告)号：US07632482B1
公开(公告)日：2009-12-15
申请号：US11566362
申请日：2006-12-04
申请人： Zeke Insepov , Ahmed Hassanein
发明人： Zeke Insepov , Ahmed Hassanein
IPC分类号： D01F9/12
CPC分类号： F04B19/006 , A61M5/142 , B82Y15/00 , Y10S977/742 , Y10S977/752
摘要： The present invention relates generally to the field of nanotechnology, carbon nanotubes and, more specifically, to a method and system for nano-pumping media through carbon nanotubes. One preferred embodiment of the invention generally comprises: method for nano-pumping, comprising the following steps: providing one or more media; providing one or more carbon nanotubes, the one or more nanotubes having a first end and a second end, wherein said first end of one or more nanotubes is in contact with the media; and creating surface waves on the carbon nanotubes, wherein at least a portion of the media is pumped through the nanotube.
摘要翻译：本发明一般涉及纳米技术领域，碳纳米管，更具体地，涉及通过碳纳米管的纳米泵送介质的方法和系统。本发明的一个优选实施方案通常包括：纳米泵送方法，包括以下步骤：提供一种或多种介质; 提供一个或多个碳纳米管，所述一个或多个纳米管具有第一端和第二端，其中一个或多个纳米管的所述第一端与介质接触; 以及在所述碳纳米管上产生表面波，其中所述介质的至少一部分被泵送通过所述纳米管。

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