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    • 3. 发明授权
    • Three-dimensional semiconductor memory devices using direct strapping line connections
    • 使用直接捆扎线连接的三维半导体存储器件
    • US08803222B2
    • 2014-08-12
    • US13543312
    • 2012-07-06
    • Bongyong LeeSang-Hoon KimAe-Jeong LeeDongchan Kim
    • Bongyong LeeSang-Hoon KimAe-Jeong LeeDongchan Kim
    • H01L29/792
    • H01L27/11551H01L27/11556H01L27/11578H01L27/11582
    • Memory devices include a plurality of elongate gate stacks extending in parallel on a substrate and at least one insulation region disposed in a trench between adjacent ones of the gate stacks. The at least one insulation region has linear first portions having a first width and widened second portions having a second width greater than the first width. A common source region is disposed in the substrate underlying the at least one insulation region. The devices further include respective conductive plugs passing through respective ones of the widened second portions of the at least one insulation region and electrically connected to the common source region and at least one strapping line disposed on the conductive plugs between the adjacent ones of the gate stacks and in direct contact with the conductive plugs.
    • 存储器件包括在衬底上平行延伸的多个细长栅极叠层和设置在相邻栅极叠层之间沟槽中的至少一个绝缘区域。 所述至少一个绝缘区具有具有第一宽度的线性第一部分和具有大于第一宽度的第二宽度的加宽的第二部分。 公共源极区域设置在至少一个绝缘区域下方的衬底中。 这些器件还包括各自的导电插塞,其穿过至少一个绝缘区域的加宽的第二部分中的相应导电插塞并且电连接到公共源极区域,以及设置在相邻栅极叠层之间的导电插塞上的至少一个捆扎线 并与导电插头直接接触。