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1. 发明授权

US4910840A Electroacoustic transducer of the so-called "electret" type, and a method of making such a transducer 失效
标题翻译：所谓“驻极体”型的电声换能器，以及制造这种传感器的方法
公开(公告)号：US4910840A
公开(公告)日：1990-03-27
申请号：US385150
申请日：1989-07-26
申请人： Adrianus J. Sprenkels , Piet Bergveld
发明人： Adrianus J. Sprenkels , Piet Bergveld
IPC分类号： H04R19/01
CPC分类号： H04R19/01 , Y10T29/43 , Y10T29/49005
摘要： This invention provides an electroacoustic transducer and a method of making it. The transducer according to the invention comprises a substrate of a semiconductor material with a recessed portion. A membrane is stretched across the recessed portion, which membrane is set in vibration in response to an input signal comprising audio and/or ultrasonorous frequencies. A pair of electrodes is provided, which form a capacitor, and between which an electric field is present. The electrodes are so arranged relatively to the membrane that the capacitance of the capacitor can vary under the influence of vibrations of the membrane, so that acoustic signals are converted into electric signals. A layer of an electrically insulating material functions as a carrier for an electric charge to provide an auxiliary electric field between the electrodes. The transducer is characterized in that the peripheral edge of the substrate, which is raised relatively to the recessed portion, has a set of openings formed in it, each extending through the substrate. The membrane is attached through the openings to the peripheral edge.
摘要翻译：本发明提供一种电声换能器及其制造方法。根据本发明的换能器包括具有凹陷部分的半导体材料的衬底。膜跨过凹部拉伸，该膜响应于包括音频和/或超声频率的输入信号而被设置在振动中。提供一对电极，其形成电容器，并且其间存在电场。这些电极相对于膜布置得如此，电容器的电容可以在膜的振动的影响下变化，从而将声信号转换成电信号。电绝缘材料层用作电荷的载体，以在电极之间提供辅助电场。传感器的特征在于，相对于凹部凸起的衬底的周缘具有形成在其中的一组开口，每个开口延伸穿过衬底。膜通过开口连接到周边边缘。

2. 发明授权

US4908805A Electroacoustic transducer of the so-called "electret" type, and a method of making such a transducer 失效
公开(公告)号：US4908805A
公开(公告)日：1990-03-13
申请号：US263196
申请日：1988-10-27
申请人： Adrianus J. Sprenkels , Piet Bergveld
发明人： Adrianus J. Sprenkels , Piet Bergveld
IPC分类号： H04R19/01
CPC分类号： H04R19/01 , Y10T29/43 , Y10T29/49005
摘要： This invention provides an electroacoustic transducer and a method of making it. The transducer according to the invention comprises a substrate of a semiconductor material with a recessed portion. A membrane is stretched across the recessed portion, which membrane is set in vibration in response to an input signal comprising audio and/or ultrasonorous frequencies. A pair of electrodes is provided, which form a capacitor, and between which an electric field is present. The electrodes are so arranged relatively to the membrane that the capacitance of the capacitor can vary under the influence of vibrations of the membrane, so that acoustic signals are converted into electric signals. A layer of an electrically insulating material functions as a carrier for an electric charge to provide an auxiliary electric field between the electrodes. The transducer is characterized in that the peripheral edge of the substrate, which is raised relatively to the recessed portion, has a set of openings formed in it, each extending through the substrate. The membrane is attached through the openings to the peripheral edge.

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