专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07903318B2 MEMS micromirror devices with anti-reflective structures 有权
标题翻译：具有抗反射结构的MEMS微镜器件
公开(公告)号：US07903318B2
公开(公告)日：2011-03-08
申请号：US12360200
申请日：2009-01-27
申请人： Abdul Jaleel K. Moidu , Paul Colbourne , Keith Anderson , John Michael Miller
发明人： Abdul Jaleel K. Moidu , Paul Colbourne , Keith Anderson , John Michael Miller
IPC分类号： G02B26/00
CPC分类号： B32B38/10 , B32B38/145 , B32B2309/105 , B32B2457/00 , B32B2551/08 , G02B26/0808 , G02B26/0833 , Y10T156/10
摘要： Diffractive patterns are disposed on a MEMS substrate in the gaps between the MEMS micromirrors to reduce backreflection of light leaking through the gaps and reflected by the MEMS substrate. The diffractive patterns are silicon surface-relief diffraction gratings or silicon oxide gratings on silicon substrate. Sub-wavelength gratings are used to suppress higher orders of diffraction; 50% duty cycle surface relief gratings on a substrate having index of refraction close to 3 are used to suppress both reflected and transmitted zero orders of diffraction simultaneously. The gratings have lines running parallel or at a slight angle to the gaps, to prevent the diffracted light from re-entering the gaps.
摘要翻译：衍射图案设置在MEMS微镜之间的间隙中的MEMS衬底上，以减少通过间隙泄漏并由MEMS衬底反射的光的反射反射。衍射图案是硅衬底上的硅表面浮雕衍射光栅或氧化硅光栅。亚波长光栅用于抑制较高的衍射级数; 使用折射率接近3的基板上的50％占空比表面浮雕光栅用于同时抑制反射和透射的零级衍射。光栅具有与间隙平行或微小角度的线，以防止衍射光再次进入间隙。

2. 发明申请

US20090190202A1 MEMS MICROMIRROR DEVICES WITH ANTI-REFLECTIVE STRUCTURES 有权
标题翻译：具有抗反射结构的MEMS微镜器件
公开(公告)号：US20090190202A1
公开(公告)日：2009-07-30
申请号：US12360200
申请日：2009-01-27
申请人： Abdul Jaleel K. Moidu , Paul Colbourne , Keith Anderson , John Michael Miller
发明人： Abdul Jaleel K. Moidu , Paul Colbourne , Keith Anderson , John Michael Miller
IPC分类号： G02B26/00 , B32B37/14 , G02B5/18
CPC分类号： B32B38/10 , B32B38/145 , B32B2309/105 , B32B2457/00 , B32B2551/08 , G02B26/0808 , G02B26/0833 , Y10T156/10
摘要： Diffractive patterns are disposed on a MEMS substrate in the gaps between the MEMS micromirrors to reduce backreflection of light leaking through the gaps and reflected by the MEMS substrate. The diffractive patterns are silicon surface-relief diffraction gratings or silicon oxide gratings on silicon substrate. Sub-wavelength gratings are used to suppress higher orders of diffraction; 50% duty cycle surface relief gratings on a substrate having index of refraction close to 3 are used to suppress both reflected and transmitted zero orders of diffraction simultaneously. The gratings have lines running parallel or at a slight angle to the gaps, to prevent the diffracted light from re-entering the gaps.
摘要翻译：衍射图案设置在MEMS微镜之间的间隙中的MEMS衬底上，以减少通过间隙泄漏并由MEMS衬底反射的光的反射反射。衍射图案是硅衬底上的硅表面浮雕衍射光栅或氧化硅光栅。亚波长光栅用于抑制较高的衍射级数; 使用折射率接近3的基板上的50％占空比表面浮雕光栅用于同时抑制反射和透射的零级衍射。光栅具有与间隙平行或微小角度的线，以防止衍射光再次进入间隙。

3. 发明授权

US08885245B2 Biaxial MEMS mirror with hidden hinge and staggered electrodes 有权
标题翻译：双轴MEMS镜，隐藏铰链和交错电极
公开(公告)号：US08885245B2
公开(公告)日：2014-11-11
申请号：US13358562
申请日：2012-01-26
申请人： Abdul Jaleel K. Moidu , John Michael Miller
发明人： Abdul Jaleel K. Moidu , John Michael Miller
IPC分类号： G02B26/00
CPC分类号： G02B5/003 , G02B5/1861 , G02B26/0841
摘要： A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) including a coarsely aligned orthogonal vertical comb drive and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a reflective body/mirror layer, a ground/hinge layer and a hot electrode/substrate layer. To increase the amount of surface area available for the hot and ground electrodes, the dimensions of the ground/hinge layer are extended longitudinally or laterally across the air gap between reflective layers to beneath the adjacent reflective layer. Ideally, diffraction patterns are formed on the surface of the ground/hinge layer to prevent stray light from reflecting back into the system.
摘要翻译：用于波长选择开关（WSS）的高填充因子双轴MEMS反射镜阵列的多层隐藏的铰链和致动器设计，包括粗对准正交垂直梳驱动和/或平行板致动器。 MEMS线性钢琴微镜阵列中的每个微反射镜包括反射体/镜面层，接地/铰链层和热电极/基底层。为了增加可用于热电极和接地电极的表面积的量，接地/铰链层的尺寸在反射层之间的空气间隙纵向或横向延伸到相邻反射层下方。理想地，在地面/铰链层的表面上形成衍射图案，以防止杂散光反射回系统。

4. 发明申请

US20110149362A1 TILTABLE MEMS MIRROR 有权
标题翻译：可倾斜MEMS镜
公开(公告)号：US20110149362A1
公开(公告)日：2011-06-23
申请号：US12960902
申请日：2010-12-06
申请人： Abdul Jaleel K. Moidu
发明人： Abdul Jaleel K. Moidu
IPC分类号： G02B26/08 , G02B5/10
CPC分类号： G02B26/0841 , G02B26/10 , G02B26/105
摘要： A MEMS mirror is disclosed having thickness correlated with the intensity profile of an impinging optical beam, so as to reduce moment of inertia of the MEMS mirror while preserving optical quality of the reflected beam. It is the mirror edges that contribute the most to the moment of inertia, while it is generally the mirror center that contributes the most to a reduction of the quality of an optical beam reflected from the mirror. Accordingly, by providing a mirror having laterally varying thickness matched to the local variation of the intensity of the optical beam, the quality of the latter may be preserved while the moment of inertia of the mirror may be significantly reduced. The thickness of MEMS mirrors may be varied continuously or stepwise; in one direction or in two mutually orthogonal directions.
摘要翻译：公开了具有与入射光束的强度分布相关的厚度的MEMS反射镜，以便减小MEMS反射镜的转动惯量，同时保持反射光束的光学质量。反射镜边缘对于惯性矩的贡献最大，而通常的反射镜中心最有助于降低从反射镜反射的光束的质量。因此，通过提供具有与光束的强度的局部变化相匹配的横向变化的厚度的反射镜，可以保持后者的质量，同时可以显着减小反射镜的惯性矩。 MEMS反射镜的厚度可以连续或逐步变化; 在一个方向或两个相互正交的方向上。

5. 发明申请

US20090180169A1 BIAXIAL MEMS MIRROR WITH HIDDEN HINGE 有权
标题翻译：具有隐藏式铰链的双向MEMS镜
公开(公告)号：US20090180169A1
公开(公告)日：2009-07-16
申请号：US12353475
申请日：2009-01-14
申请人： Abdul Jaleel K. Moidu , Wenlin Jin
发明人： Abdul Jaleel K. Moidu , Wenlin Jin
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a micro-mirror layer, a hinge layer and an electrode/substrate layer. Preferably, the roll and tilt electrodes are substantially disposed along the roll axis to provide a high fill factor. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.
摘要翻译：基于具有晶片接合和粗对准正交垂直梳状和/或平行板的绝缘体上硅（SOI）工艺的用于波长选择开关（WSS）的高填充因子双轴MEMS反射镜阵列的多层隐藏的铰链和致动器设计执行器。 MEMS线性钢琴微镜阵列中的每个微镜包括微镜层，铰链层和电极/基底层。优选地，辊和倾斜电极基本上沿着辊轴设置以提供高填充因子。该结构通过在SOI结构中单独制造层然后将它们结合在一起而形成。

6. 发明授权

US06962338B2 Hermetic seal and a method of making such a hermetic seal 有权
标题翻译：密封和密封的方法
公开(公告)号：US06962338B2
公开(公告)日：2005-11-08
申请号：US10369663
申请日：2003-02-21
申请人： Abdul Jaleel K. Moidu
发明人： Abdul Jaleel K. Moidu
IPC分类号： B65D43/02 , B65D53/00 , B65D85/38 , F16J15/14 , E04B1/682
CPC分类号： F16J15/14 , B65D43/0216 , B65D53/00 , B65D85/38 , B65D2543/0024 , B65D2543/00277 , B65D2543/00425 , B65D2543/00472 , B65D2543/00527 , B65D2543/00546 , B65D2543/00972
摘要： The invention provides a hermetic seal and a method of making a hermetic seal having the steps of providing a first member of a first material having a flange thereon, providing a second member of a second material having a slot thereon for accommodating the flange in said slot such that there is a gap between the slot and the flange, providing a sealant in the slot, and heating the sealant such that the sealant fills at least a portion of the gap between the flange and the slot for forming a hermetic seal therebetween. Advantageously, the slot and flange design of the inventive hermetic seal produces a three-dimensional compressive state of stress thereby providing a joint design of improved reliability.
摘要翻译：本发明提供了一种气密密封件和一种制造气密密封件的方法，该方法具有以下步骤：在其上提供具有凸缘的第一材料的第一构件，提供第二材料的第二构件，该第二材料在其上具有用于将所述凸缘容纳在所述槽使得槽和凸缘之间存在间隙，在槽中提供密封剂，并加热密封剂，使得密封剂填充凸缘和槽之间的间隙的至少一部分，以在其间形成气密密封。有利地，本发明的气密密封件的槽和凸缘设计产生应力的三维压缩状态，从而提供改进的可靠性的接头设计。

7. 发明授权

US08134277B2 Electrostatic comb actuator 有权
标题翻译：静电梳子执行机构
公开(公告)号：US08134277B2
公开(公告)日：2012-03-13
申请号：US12638160
申请日：2009-12-15
申请人： Abdul Jaleel K. Moidu
发明人： Abdul Jaleel K. Moidu
IPC分类号： H02N1/00
CPC分类号： H02N1/006
摘要： An electrostatic comb actuator having reduced in-plane rotation of a tiltable element is disclosed. The actuator has a stator comb electrode and a tiltable rotor comb electrode. The rotor comb electrode fingers extend from an anchor wall running parallel to the axis of rotation of the rotor at a first distance from the axis of rotation. The rotor comb electrode fingers extend towards the axis of rotation for a length that is smaller than the first distance. The stator electrodes are shifted towards the axis of rotation, so that the stator electrode fingers are only partially overlapping with the rotor electrodes fingers.
摘要翻译：公开了一种具有减小的可倾斜元件的平面内旋转的静电梳状致动器。致动器具有定子梳电极和可倾斜的转子梳电极。转子梳电极指从平行于转子旋转轴线的锚壁延伸离开旋转轴线的第一距离。转子梳电极指沿着旋转轴线延伸一个小于第一距离的长度。定子电极朝向旋转轴线移动，使得定子电极指只与转子电极指部分重叠。

8. 发明授权

US08049944B2 MEMS device and a MEMS device array 有权
标题翻译： MEMS器件和MEMS器件阵列
公开(公告)号：US08049944B2
公开(公告)日：2011-11-01
申请号：US12389399
申请日：2009-02-20
申请人： Abdul Jaleel K. Moidu
发明人： Abdul Jaleel K. Moidu
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/045 , B81B2203/058 , G02B6/2931 , G02B6/3518 , G02B6/356 , G02B6/357 , G02B6/3584
摘要： A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.
摘要翻译：描述了MEMS微镜的两轴可倾斜线性阵列。通过使用由万向环联接的两对蛇形铰链，阵列的各个微镜可以灵活地悬挂在共同的基板上，并通过使用倾斜和滚动电极来驱动。微镜的倾斜致动器区域设置在万向环内，辊铰链将倾斜致动器区域连接到微镜，其提供微镜的倾斜和辊的解耦。该结构允许倾斜和辊的显着解耦，或者在微镜驱动时观察到的活塞效应。该结构适用于波长选择光开关。

9. 发明授权

US08547619B2 Tiltable MEMS mirror 有权
标题翻译：可倾倒MEMS镜
公开(公告)号：US08547619B2
公开(公告)日：2013-10-01
申请号：US12960902
申请日：2010-12-06
申请人： Abdul Jaleel K. Moidu
发明人： Abdul Jaleel K. Moidu
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G02B26/10 , G02B26/105
摘要： A MEMS mirror is disclosed having thickness correlated with the intensity profile of an impinging optical beam, so as to reduce moment of inertia of the MEMS mirror while preserving optical quality of the reflected beam. It is the mirror edges that contribute the most to the moment of inertia, while it is generally the mirror center that contributes the most to a reduction of the quality of an optical beam reflected from the mirror. Accordingly, by providing a mirror having laterally varying thickness matched to the local variation of the intensity of the optical beam, the quality of the latter may be preserved while the moment of inertia of the mirror may be significantly reduced. The thickness of MEMS mirrors may be varied continuously or stepwise; in one direction or in two mutually orthogonal directions.
摘要翻译：公开了具有与入射光束的强度分布相关的厚度的MEMS反射镜，以便减小MEMS反射镜的转动惯量，同时保持反射光束的光学质量。反射镜边缘对于惯性矩的贡献最大，而通常的反射镜中心最有助于降低从反射镜反射的光束的质量。因此，通过提供具有与光束的强度的局部变化相匹配的横向变化的厚度的反射镜，可以保持后者的质量，同时可以显着减小反射镜的惯性矩。 MEMS反射镜的厚度可以连续或逐步变化; 在一个方向或两个相互正交的方向上。

10. 发明授权

US08274722B2 Counter-balanced MEMS mirror with hidden hinge 有权
标题翻译：平衡式MEMS镜与隐形铰链
公开(公告)号：US08274722B2
公开(公告)日：2012-09-25
申请号：US12652073
申请日：2010-01-05
申请人： Abdul Jaleel K. Moidu
发明人： Abdul Jaleel K. Moidu
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) based on a silicon-on-insulator (SOI) process with wafer bonding and coarsely aligned orthogonal vertical comb and/or parallel plate actuator. The present invention relates to a micro-mirror in a MEMS linear piano micro-mirror array comprising a micro-mirror layer, a hinge layer and an electrode/substrate layer. The structure is formed by fabricating the layers separately in SOI structure and then bonding them together.
摘要翻译：基于具有晶片接合和粗对准正交垂直梳状和/或平行板的绝缘体上硅（SOI）工艺的用于波长选择开关（WSS）的高填充因子双轴MEMS反射镜阵列的多层隐藏的铰链和致动器设计执行器。本发明涉及一种包括微镜层，铰链层和电极/衬底层的MEMS线性钢琴微镜阵列中的微镜。该结构通过在SOI结构中单独制造层然后将它们结合在一起而形成。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式