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1. 发明申请

US20130081702A1 METHODS FOR IN-SITU CALIBRATION OF A FLOW CONTROLLER 有权
标题翻译：流量控制器的现场校准方法
公开(公告)号：US20130081702A1
公开(公告)日：2013-04-04
申请号：US13627547
申请日：2012-09-26
申请人： APPLIED MATERIALS, INC.
发明人： BALARABE N. MOHAMMED , JOHN W. LANE , MARIUSCH J. GREGOR , DAN JOSEPH HEALY
IPC分类号： F17D3/00
CPC分类号： F17D3/00 , G01F25/003 , G05D7/0635 , Y10T137/0324 , Y10T137/86485
摘要： Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.
摘要翻译：本文提供了用于流量控制器的原位校准的方法和装置。在一些实施例中，流动气体的方法包括提供流量控制器，该流量控制器被配置为基于通过使用标准气体确定的计算的第一关系来提供具有第一流量值的第一气体; 根据在流量控制器的设定点的相应多个值确定的第一气体的流量的多个值来确定第一气体的流量和设定点之间的实际第一关系，其中多个通过流过控制器的第一气体流过用于设定点的多个值中的相应值来确定流量的值; 并且基于实际的第一关系使第一气体以流量的第一值流动。

2. 发明申请

US20130092243A1 METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER 有权
标题翻译：用于监测与过程室耦合的流量控制器的方法
公开(公告)号：US20130092243A1
公开(公告)日：2013-04-18
申请号：US13627659
申请日：2012-09-26
申请人： APPLIED MATERIALS, INC.
发明人： BALARABE N. MOHAMMED , JOHN W. LANE , MARIUSCH J. GREGOR , DAN JOSEPH HEALY
IPC分类号： G01F1/00 , G08B21/00 , F17D1/00
CPC分类号： G05D7/0623 , G01F25/0053 , Y10T137/0324
摘要： Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.
摘要翻译：本文提供了用于流量控制器的原位校准的方法和装置。在一些实施例中，流动气体的方法包括提供流量控制器，该流量控制器被配置为基于通过使用标准气体确定的计算的第一关系来提供具有第一流量值的第一气体; 根据在流量控制器的设定点的相应多个值确定的第一气体的流量的多个值来确定第一气体的流量和设定点之间的实际第一关系，其中多个通过流过控制器的第一气体流过用于设定点的多个值中的相应值来确定流量的值; 并且基于实际的第一关系使第一气体以流量的第一值流动。

3. 发明申请

US20180024573A1 METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER 审中-公开
公开(公告)号：US20180024573A1
公开(公告)日：2018-01-25
申请号：US15687573
申请日：2017-08-28
申请人： APPLIED MATERIALS, INC.
发明人： BALARABE N. MOHAMMED , JOHN W. LANE , MARIUSCH J. GREGOR , DAN JOSEPH HEALY
IPC分类号： G05D7/06 , G01F25/00
CPC分类号： G05D7/0623 , G01F25/0053 , Y10T137/0324
摘要： Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.

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