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    • 1. 发明申请
    • METHODS FOR SURFACE EVALUATION
    • US20190145878A1
    • 2019-05-16
    • US16308262
    • 2017-07-06
    • ANTON PAAR TRITEC SA
    • Pierre-Jean COUDERTNicholas RANDALLGregory FAVAROBertrand BELLATON
    • G01N3/46
    • Method of evaluation a performance of a surface of a material, the method comprising steps of: measuring a first surface profile of a material sample along a predetermined track by bringing a tip of a stylus into contact with a surface of the sample and traversing said tip across the surface of the sample in a direction tangential to the tip of the stylus while recording said first surface profile, subsequently; applying a normal force to the surface of the sample with the stylus, said normal force being in a direction substantially perpendicular to the surface of the sample, subsequently; moving said tip across the surface of the sample following at least part of said predetermined track while applying said normal force, subsequently; measuring a second surface profile of said sample along at least part of said predetermined track by bringing said tip into contact with the surface of the sample and traversing said tip across the surface of the sample along said track while recording said second surface profile, calculating a first residual depth profile as a difference of said first surface profile and said second surface profile. According an aspect of the invention, the method comprises a step of determining a failure point of the surface of the sample by identifying when at least one value of a function of said first residual depth profile deviates from an expected magnitude value by at least a predetermined amount.