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1. 发明授权

US08908255B2 Fabrication of a high fill ratio silicon spatial light modulator 有权
标题翻译：高填充率硅空间光调制器的制造
公开(公告)号：US08908255B2
公开(公告)日：2014-12-09
申请号：US13418186
申请日：2012-03-12
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
IPC分类号： G02B26/08 , G02B26/00 , G02F1/29
CPC分类号： G02B26/0841
摘要： A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.
摘要翻译：一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。上表面区域包括一个或多个图案化结构区域和至少一个开放区域，以暴露上表面区域的一部分以形成所得表面区域。该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域，并且使用填充材料形成上部平坦化层。该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

2. 发明授权

US08314984B2 Method and system for optical MEMS with flexible landing structures 有权
标题翻译：具有柔性着陆结构的光学MEMS的方法和系统
公开(公告)号：US08314984B2
公开(公告)日：2012-11-20
申请号：US12031388
申请日：2008-02-14
申请人： Xiao Yang , Ye Wang , Yuxiang Wang , Justin Payne , Wook Ji
发明人： Xiao Yang , Ye Wang , Yuxiang Wang , Justin Payne , Wook Ji
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , Y10T29/49826
摘要： An optical deflection device for a display application includes a semiconductor substrate comprising an upper surface region defining an upper surface plane. The optical deflection device also includes one or more electrode devices provided overlying the upper surface region and a hinge device including a silicon material and coupled to the upper surface region at a predetermined height above the upper surface plane. The optical deflection device further comprises a plurality of landing pads including a silicon material and coupled to the upper surface region at the predetermined height from the upper surface plane and a mirror structure. The mirror structure includes a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion.
摘要翻译：用于显示器应用的光学偏转装置包括：半导体衬底，其包括限定上表面的上表面区域。光学偏转装置还包括设置在上表面区域上的一个或多个电极装置和包括硅材料的铰链装置，并且在上表面平面上方的预定高度处联接到上表面区域。光学偏转装置还包括多个着陆焊盘，其包括硅材料，并且在与上表面平面预定高度处的上表面区域和反射镜结构相耦合。镜结构包括联接到铰链装置的柱部分和联接到柱部分的镜板部分。

3. 发明申请

US20100112492A1 FABRICATION OF A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 有权
标题翻译：高比例硅太阳能光调制器的制造
公开(公告)号：US20100112492A1
公开(公告)日：2010-05-06
申请号：US12690878
申请日：2010-01-20
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
IPC分类号： G03F7/20 , B05D5/06 , C23F1/00
CPC分类号： G02B26/0841
摘要： A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.
摘要翻译：一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。上表面区域包括一个或多个图案化结构区域和至少一个开放区域，以暴露上表面区域的一部分以形成所得表面区域。该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域，并且使用填充材料形成上部平坦化层。该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

4. 发明授权

US07565455B2 System and method of accessing and transmitting different data frames in a digital transmission network 有权
标题翻译：在数字传输网络中访问和传输不同数据帧的系统和方法
公开(公告)号：US07565455B2
公开(公告)日：2009-07-21
申请号：US10765205
申请日：2004-01-28
申请人： Zhiqun He , Yuxiang Wang , Qian Qiao
发明人： Zhiqun He , Yuxiang Wang , Qian Qiao
IPC分类号： G06F15/16 , G06F15/173 , H04L12/28 , H04L12/56 , H04J3/02
CPC分类号： H04L12/4625 , H04L12/4641 , H04L69/08
摘要： A system accessing and transmitting different data frames in a digital transmission network, for accessing and transmitting different data frames, said system comprises: at least a user-network interface (UNI), which is used to couple with the subscriber's network; and/or at least a network-network interface (NNI), which is used to couple with said digital transmission network to transfer data; and a data converting device, coupled with said UNIs and said NNIs, which is used to convert data formats between said UNIs or data formats between said NNIs or data formats between said UNIs and said NNIs; said data converting device comprises a virtual bridge device and an interface device, said virtual bridge device switches data between said UNIs and said NNIs, and said virtual bridge device detects control messages, and transmits the control messages to control system of the device to process via the control interface unit; and data frames of message except control messages are switched, so as to overcome the limitation of address space of Ethernet data frames.
摘要翻译：一种在数字传输网络中访问和发送不同数据帧的系统，用于访问和发送不同的数据帧，所述系统包括：至少一个用户网络接口（UNI），用于与用户网络耦合; 和/或至少网络网络接口（NNI），其用于与所述数字传输网络耦合以传送数据; 以及与所述UNI和所述NNI相耦合的数据转换装置，其用于在所述UNI或所述NNI之间的所述NNI或数据格式之间的所述UNI或数据格式之间转换数据格式; 所述数据转换装置包括虚拟桥接设备和接口设备，所述虚拟桥接设备在所述UNI与所述NNI之间切换数据，所述虚拟桥接设备检测控制消息，并将所述控制消息发送到所述设备的控制系统以经过控制接口单元; 并且除了控制消息之外的消息的数据帧被切换，以便克服以太网数据帧的地址空间的限制。

5. 发明授权

US07505481B2 System and method of accessing and transmitting different data frames in a digital transmission network 有权
标题翻译：在数字传输网络中访问和传输不同数据帧的系统和方法
公开(公告)号：US07505481B2
公开(公告)日：2009-03-17
申请号：US10765204
申请日：2004-01-28
申请人： Zhiqun He , Yuxiang Wang
发明人： Zhiqun He , Yuxiang Wang
IPC分类号： H04J3/22
CPC分类号： H04L12/2898 , H04L12/4625 , H04L12/4633 , H04L12/4641 , H04L49/351 , H04L49/354 , H04L69/08
摘要： A system accessing and transmitting different data frames in a digital transmission network for accessing and transmitting different data frames, including: at least a user-network interface (UNI), which is used to couple with the user's network; at least a network-network interface (NNI), which is used to couple with the digital transmission network to transfer data; a data converting device, which is coupled with the UNIs and the NNIs to convert data formats between the UNIs, data formats between the NNIs, or data formats between the NNIs and the UNIs; wherein the data converting device includes a virtual interface device, the virtual interface device includes: at least two device interfaces, a virtual interface processing unit, a rule database, a control interface unit and an inter-device interface, so as to improve access ability of the device.
摘要翻译：一种在数字传输网络中访问和发送不同数据帧以访问和发送不同数据帧的系统，包括：用于与用户网络耦合的至少一个用户网络接口（UNI）; 至少一个网络接口（NNI），用于与数字传输网络耦合传输数据; 一个数据转换设备，与UNI和NNI相结合，以在UNI之间转换数据格式，NNI之间的数据格式，或NNI和UNI之间的数据格式; 其中所述数据转换装置包括虚拟接口设备，所述虚拟接口设备包括：至少两个设备接口，虚拟接口处理单元，规则数据库，控制接口单元和设备间接口，以便提高接入能力的设备。

6. 发明申请

US20090002805A1 PROJECTION DISPLAY SYSTEM INCLUDING A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 审中-公开
标题翻译：投影显示系统，包括高比例硅太阳能调光器
公开(公告)号：US20090002805A1
公开(公告)日：2009-01-01
申请号：US12210119
申请日：2008-09-12
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
IPC分类号： G02B26/08 , G06F3/038
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译：显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。显示系统还包括位于照明路径中的空间光调制器。空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。铰链结构包括硅材料。空间光调制器还包括耦合到铰链结构并且延伸到半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极器件的镜板。显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

7. 发明授权

US07369551B2 System and method of accessing and transmitting different data frames in a digital transmission network 有权
标题翻译：在数字传输网络中访问和传输不同数据帧的系统和方法
公开(公告)号：US07369551B2
公开(公告)日：2008-05-06
申请号：US10765283
申请日：2004-01-28
申请人： Zhiqun He , Yuxiang Wang
发明人： Zhiqun He , Yuxiang Wang
IPC分类号： H04L12/28 , H04J3/16 , G06F15/173
CPC分类号： H04L12/2898 , H04L12/4625 , H04L12/4633 , H04L12/4641 , H04L69/08
摘要： A system accessing and transmitting data frames includes: at least one subscriber network interface, and/or at least one inter-network interface, and a data converting device coupled with the subscriber network interface and the inter-network interface. The data converting device includes: a virtual private device, an interface device, and a processing device. The virtual private device is configured for exchanging data frames between the subscriber network interface and the inter-network interface via interface device. The virtual private device includes an inter-device interface, coupled with the processing device; a virtual private processing unit, coupled with the inter-device interface and adapted for detecting control messages and converging or diverging data frames; a rule database, coupled with the virtual private processing unit and adapted for storing rules, according to which data frames are processed; and a control interface unit, coupled with and adapted for controlling the rule database and the virtual private processing unit.
摘要翻译：访问和发送数据帧的系统包括：至少一个用户网络接口和/或至少一个网络间接口，以及与用户网络接口和网络间接口耦合的数据转换设备。数据转换装置包括：虚拟专用设备，接口设备和处理设备。虚拟专用设备被配置为经由接口设备在用户网络接口和网络间接口之间交换数据帧。虚拟专用设备包括与处理设备耦合的设备间接口; 虚拟专用处理单元，与设备间接口耦合，适用于检测控制消息和收敛或分散数据帧; 与所述虚拟专用处理单元耦合并适于存储规则的规则数据库，根据哪些数据帧被处理; 以及控制接口单元，耦合并适于控制规则数据库和虚拟专用处理单元。

8. 发明申请

US20050287771A1 Liquid precursors for the CVD deposition of amorphous carbon films 有权
标题翻译：用于CVD沉积无定形碳膜的液体前体
公开(公告)号：US20050287771A1
公开(公告)日：2005-12-29
申请号：US11065464
申请日：2005-02-24
申请人： Martin Seamons , Wendy Yeh , Sudha Rathi , Deenesh Padhi , Andy Luan , Sum-Yee Tang , Priya Kulkarni , Visweswaren Sivaramakrishnan , Bok Kim , Hichem M'Saad , Yuxiang Wang , Michael Kwan
发明人： Martin Seamons , Wendy Yeh , Sudha Rathi , Deenesh Padhi , Andy Luan , Sum-Yee Tang , Priya Kulkarni , Visweswaren Sivaramakrishnan , Bok Kim , Hichem M'Saad , Yuxiang Wang , Michael Kwan
IPC分类号： C23C16/505 , H01L21/314 , H01L21/768 , H01L21/20 , H01L21/205 , H01L21/36
CPC分类号： C23C16/505 , H01L21/3146 , H01L21/76801 , H01L21/76802 , H01L21/7681 , H01L21/76829
摘要： Methods are provided for depositing amorphous carbon materials. In one aspect, the invention provides a method for processing a substrate including positioning the substrate in a processing chamber, introducing a processing gas into the processing chamber, wherein the processing gas comprises a carrier gas, hydrogen, and one or more precursor compounds, generating a plasma of the processing gas by applying power from a dual-frequency RF source, and depositing an amorphous carbon layer on the substrate.
摘要翻译：提供用于沉积无定形碳材料的方法。一方面，本发明提供了一种处理衬底的方法，包括将衬底定位在处理室中，将处理气体引入处理室，其中处理气体包括载气，氢气和一种或多种前体化合物，产生处理气体的等离子体，通过从双频RF源施加电力，以及在基板上沉积无定形碳层。

9. 发明授权

US08119432B2 Method and apparatus for MEMS oscillator 有权
标题翻译： MEMS振荡器的方法和装置
公开(公告)号：US08119432B2
公开(公告)日：2012-02-21
申请号：US12944982
申请日：2010-11-12
申请人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
发明人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
IPC分类号： G04C3/08 , H01L21/00
CPC分类号： H03H3/0072 , H03H3/0073 , H03H9/02244 , H03H9/2463 , H03H2009/02511 , H03H2009/02519
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
摘要翻译：谐振器包括具有第一电极和第二电极的CMOS衬底。 CMOS衬底被配置为向第一电极提供一个或多个控制信号。谐振器还包括包括硅材料层的谐振器结构。谐振器结构耦合到CMOS衬底并且被配置为响应于一个或多个控制信号而谐振。

10. 发明授权

US07678288B2 Method and structure for manufacturing bonded substrates using multiple photolithography tools 有权
标题翻译：使用多个光刻工具制造粘结衬底的方法和结构
公开(公告)号：US07678288B2
公开(公告)日：2010-03-16
申请号：US11004588
申请日：2004-12-03
申请人： Xiao Yang , Kegang Huang , Yuxiang Wang , Howard Woo
发明人： Xiao Yang , Kegang Huang , Yuxiang Wang , Howard Woo
IPC分类号： H01L21/302
CPC分类号： G03F7/70525 , G03F9/7046 , H01L21/2007
摘要： A method of manufacturing bonded substrate structures. The method includes providing a first substrate comprising a first surface region and processing the first surface region to form a first pattern region using a first photolithographic stepper characterized by a first tolerance criteria for alignment. The method also includes providing a second substrate comprising a second surface region and processing the second surface region through at least one masking process to form a second pattern region using a second photolithographic stepper characterized by a second tolerance criteria for alignment. Further, the method includes determining a masking process having a third tolerance criteria for alignment, the third tolerance criteria allowing for a change from the second to the first photographic stepper, processing the second substrate for at least the determined masking process using the first photolithographic stepper, and joining the first substrate to the second substrate to form a composite substrate structure.
摘要翻译：制造键合衬底结构的方法。该方法包括提供包括第一表面区域的第一基底和使用第一光刻步进器处理第一表面区域以形成第一图案区域，其特征在于用于对准的第一公差标准。该方法还包括提供包括第二表面区域的第二基底并通过至少一个掩模过程处理第二表面区域，以使用第二光刻步进器形成第二图案区域，其特征在于用于对准的第二容限标准。此外，该方法包括确定具有用于对准的第三公差准则的掩蔽处理，第三公差准则允许从第二照相步骤器改变到第一照相步进器，使用第一光刻步进器处理至少所确定的掩蔽处理的第二衬底并且将第一基板接合到第二基板以形成复合基板结构。

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