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    • 1. 发明授权
    • Connection apparatus and cable assembly for semiconductor-device characteristic measurement apparatus
    • 用于半导体器件特性测量装置的连接装置和电缆组件
    • US07068060B2
    • 2006-06-27
    • US11099201
    • 2005-04-05
    • Yukoh Iwasaki
    • Yukoh Iwasaki
    • G01R31/26G01R31/28
    • G01R31/31723G01R31/2889G01R31/31926
    • A connection apparatus includes a switch; a control signal connector that transmits a switching signal, sent from a controller, to the switching means; a first plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in first measuring apparatus for measuring a first electrical characteristic of the device under test; and a second plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in second measuring apparatus for measuring a second electrical characteristic of the device under test. In accordance with the switching signal sent from the controller via the control-signal connector, the switch performs switching so that either the first plurality of connectors or the second plurality of connectors are electrically connected to the device under test.
    • 连接装置包括开关; 控制信号连接器,其将从控制器发送的切换信号发送到切换装置; 第一多个连接器,其连接到开关并且将被连接到包括在第一测量装置中的多个测量连接器,用于测量被测器件的第一电特性; 以及第二多个连接器,其连接到开关并且将被连接到包括在第二测量装置中的多个测量连接器,用于测量被测器件的第二电特性。 根据从控制器经由控制信号连接器发送的切换信号,开关执行切换,使得第一多个连接器或第二多个连接器电连接到被测器件。
    • 2. 发明授权
    • Current-to-voltage converting apparatus and impedance measuring apparatus
    • 电流 - 电压转换装置和阻抗测量装置
    • US07005918B2
    • 2006-02-28
    • US10809262
    • 2004-03-25
    • Yukoh Iwasaki
    • Yukoh Iwasaki
    • H03F1/36
    • H03F3/602G01R27/02
    • A current-to-voltage converting apparatus connected to an element or a circuit having a first terminal connected to a signal source and comprising a feedback amplifier, which is connected to a second terminal of the element or the circuit and keeps the second terminal at virtual ground, and which converts the current signals that flow to the element or the circuit to voltage signals and outputs these signals; a device for opening the feedback loop of the feedback amplifier and measuring the open-loop loss of the feedback loop; and a compensating amplifier, which compensates for the open-loop loss. It further comprises a device for measuring the open-loop phase shift of the feedback loop when the feedback loop is open and a control unit for keeping the open-loop phase shift at a pre-determined value.
    • 一种连接到元件或电路的电流 - 电压转换装置,所述元件或电路具有连接到信号源的第一端子并且包括反馈放大器,所述反馈放大器连接到元件或电路的第二端子并将第二端子保持虚拟 接地,并将流到元件或电路的电流信号转换为电压信号并输出​​这些信号; 用于打开反馈放大器的反馈回路并测量反馈回路的开环损耗的装置; 以及补偿放大器,其补偿开环损耗。 它还包括一个用于在反馈回路打开时测量反馈回路的开环相移的装置和用于将开环相移保持在预定值的控制单元。
    • 4. 发明授权
    • Connection apparatus and cable assembly for semiconductor-device characteristic measurement apparatus
    • 用于半导体器件特性测量装置的连接装置和电缆组件
    • US07262626B2
    • 2007-08-28
    • US11437362
    • 2006-05-19
    • Yukoh Iwasaki
    • Yukoh Iwasaki
    • G01R31/26G01R31/28
    • G01R31/31723G01R31/2889G01R31/31926
    • A connection apparatus includes a switch; a control signal connector that transmits a switching signal, sent from a controller, to the switching means; a first plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in first measuring apparatus for measuring a first electrical characteristic of the device under test; and a second plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in second measuring apparatus for measuring a second electrical characteristic of the device under test. In accordance with the switching signal sent from the controller via the control-signal connector, the switch performs switching so that either the first plurality of connectors or the second plurality of connectors are electrically connected to the device under test.
    • 连接装置包括开关; 控制信号连接器,其将从控制器发送的切换信号发送到切换装置; 第一多个连接器,其连接到开关并且将被连接到包括在第一测量装置中的多个测量连接器,用于测量被测器件的第一电特性; 以及第二多个连接器,其连接到开关并且将被连接到包括在第二测量装置中的多个测量连接器,用于测量被测器件的第二电特性。 根据从控制器经由控制信号连接器发送的切换信号,开关执行切换,使得第一多个连接器或第二多个连接器电连接到被测器件。
    • 6. 发明申请
    • Connection apparatus and cable assembly for semiconductor - device characteristic measurement apparatus
    • 半导体器件特性测量装置的连接装置和电缆组件
    • US20060208756A1
    • 2006-09-21
    • US11437362
    • 2006-05-19
    • Yukoh Iwasaki
    • Yukoh Iwasaki
    • G01R31/26
    • G01R31/31723G01R31/2889G01R31/31926
    • A connection apparatus includes a switch; a control signal connector that transmits a switching signal, sent from a controller, to the swtiching means; a first plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in first measuring apparatus for measuring a first electrical characteristic of the device under test; and a second plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in second measuring apparatus for measuring a second electrical characteristic of the device under test. In accordance with the switching signal sent from the controller via the control-signal connector, the switch performs switching so that either the first plurality of connectors or the second plurality of connectors are electrically connected to the device under test.
    • 连接装置包括开关; 控制信号连接器,其将从控制器发送的切换信号发送到所述切换装置; 第一多个连接器,其连接到开关并且将被连接到包括在第一测量装置中的多个测量连接器,用于测量被测器件的第一电特性; 以及第二多个连接器,其连接到开关并且将被连接到包括在第二测量装置中的多个测量连接器,用于测量被测器件的第二电特性。 根据从控制器经由控制信号连接器发送的切换信号,开关执行切换,使得第一多个连接器或第二多个连接器电连接到被测器件。
    • 7. 发明申请
    • Connection apparatus and cable assembly for semiconductor-device characteristic measurement apparatus
    • 用于半导体器件特性测量装置的连接装置和电缆组件
    • US20050225316A1
    • 2005-10-13
    • US11099201
    • 2005-04-05
    • Yukoh Iwasaki
    • Yukoh Iwasaki
    • G01R31/26A61B5/02G01R31/28G01R31/317G01R31/319
    • G01R31/31723G01R31/2889G01R31/31926
    • A connection apparatus includes a switch; a control signal connector that transmits a switching signal, sent from a controller, to the swtiching means; a first plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in first measuring apparatus for measuring a first electrical characteristic of the device under test; and a second plurality of connectors that are connected to the switch and that are to be connected to a plurality of measurement connectors included in second measuring apparatus for measuring a second electrical characteristic of the device under test. In accordance with the switching signal sent from the controller via the control-signal connector, the switch performs switching so that either the first plurality of connectors or the second plurality of connectors are electrically connected to the device under test.
    • 连接装置包括开关; 控制信号连接器,其将从控制器发送的切换信号发送到所述切换装置; 第一多个连接器,其连接到开关并且将被连接到包括在第一测量装置中的多个测量连接器,用于测量被测器件的第一电特性; 以及第二多个连接器,其连接到开关并且将被连接到包括在第二测量装置中的多个测量连接器,用于测量被测器件的第二电特性。 根据从控制器经由控制信号连接器发送的切换信号,开关执行切换,使得第一多个连接器或第二多个连接器电连接到被测器件。
    • 8. 发明申请
    • Current-to-voltage converting apparatus and impedance measuring apparatus
    • 电流 - 电压转换装置和阻抗测量装置
    • US20050218910A1
    • 2005-10-06
    • US11141817
    • 2005-06-01
    • Yukoh Iwasaki
    • Yukoh Iwasaki
    • G01R27/02H01L21/66H03F3/60G01R27/28
    • H03F3/602G01R27/02
    • A current-to-voltage converting apparatus connected to an element or a circuit having a first terminal connected to a signal source and comprising a feedback amplifier, which is connected to a second terminal of the element or the circuit and keeps the second terminal at virtual ground, and which converts the current signals that flow to the element or the circuit to voltage signals and outputs these signals; a device for opening the feedback loop of the feedback amplifier and measuring the open-loop loss of the feedback loop; and a compensating amplifier, which compensates for the open-loop loss. It further comprises a device for measuring the open-loop phase shift of the feedback loop when the feedback loop is open and a control unit for keeping the open-loop phase shift at a pre-determined value.
    • 一种连接到元件或电路的电流 - 电压转换装置,所述元件或电路具有连接到信号源的第一端子并且包括反馈放大器,所述反馈放大器连接到元件或电路的第二端子并将第二端子保持虚拟 接地,并将流到元件或电路的电流信号转换为电压信号并输出​​这些信号; 用于打开反馈放大器的反馈回路并测量反馈回路的开环损耗的装置; 以及补偿放大器,其补偿开环损耗。 它还包括一个用于在反馈回路打开时测量反馈回路的开环相移的装置和用于将开环相移保持在预定值的控制单元。
    • 9. 发明授权
    • Blade-like connecting needle
    • 刀状连接针
    • US06717426B2
    • 2004-04-06
    • US10074202
    • 2002-02-12
    • Yukoh Iwasaki
    • Yukoh Iwasaki
    • G01R1073
    • G01R1/067G01R3/00
    • A blade-like connecting needle for measuring a semiconductor wafer has an increased capability for measuring a small current and also has stable characteristics. The blade-like connecting needle includes a blade signal line for transmitting signal from the semiconductor wafer, a support insulator covering at least a portion of the blade signal line, a plurality of blade guard patterns disposed in or on the support insulator for electromagnetically shielding the blade signal line, and a probe supported on the support insulator and connected to the blade signal line. There are also disclosed processes of producing the blade-like connecting needle. A method for manufacturing a coaxial or hollow blade-like connecting needle is also provided.
    • 用于测量半导体晶片的叶片状连接针具有增加的测量小电流的能力,并且具有稳定的特性。 刀片状连接针包括用于从半导体晶片发送信号的刀片信号线,覆盖刀片信号线的至少一部分的支撑绝缘体,设置在支撑绝缘体中或其上的多个刀片防护图案,用于电磁屏蔽 刀片信号线和支撑在支撑绝缘体上并连接到刀片信号线的探头。 还公开了制造叶片状连接针的方法。 还提供了用于制造同轴或中空的叶片状连接针的方法。