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1. 发明申请

US20080280542A1 CLEANING APPARATUS FOR A PROBE 审中-公开
标题翻译：清洁设备探针
公开(公告)号：US20080280542A1
公开(公告)日：2008-11-13
申请号：US12115495
申请日：2008-05-05
申请人： Yuji Miyagi , Tetsuya Iwabuchi , Toshiyuki Kudo
发明人： Yuji Miyagi , Tetsuya Iwabuchi , Toshiyuki Kudo
IPC分类号： B24B7/00
CPC分类号： B24B19/16 , B24B19/226
摘要： The present invention provides a cleaning apparatus capable of removing foreign matters attached to a tip of a probe effectively without impairing the durability of the probe. The cleaning apparatus for the probe comprises a base plate having a rough surface and a surface layer formed to conform to and cover the rough surface for the purpose of providing a polishing surface for the probe and having lower hardness than hardness of the probe tip of the probe.
摘要翻译：本发明提供一种清洁装置，其能够有效地除去附着于探针的尖端的异物，而不会损害探针的耐久性。用于探针的清洁装置包括具有粗糙表面的基板和形成为符合并覆盖粗糙表面的表面层，以提供用于探针的抛光表面，并且具有比硬度更高的探针尖端的硬度探测。

2. 发明申请

US20120126844A1 CHIP STACK DEVICE TESTING METHOD, CHIP STACK DEVICE REARRANGING UNIT, AND CHIP STACK DEVICE TESTING APPARATUS 有权
标题翻译：芯片堆叠设备测试方法，芯片堆叠设备后续单元和芯片堆叠设备测试设备
公开(公告)号：US20120126844A1
公开(公告)日：2012-05-24
申请号：US13293354
申请日：2011-11-10
申请人： Katsuo YASUTA , Yuji Miyagi
发明人： Katsuo YASUTA , Yuji Miyagi
IPC分类号： G01R31/26 , H01L21/66
CPC分类号： G01R31/2893
摘要： A plurality of chip stack devices having different external sizes can be tested accurately and efficiently with low cost. The present invention provides a chip stack device testing method testing a chip stack device configured by stacking a plurality of chips separated by dicing a substrate under test tested in a testing unit. A tray for chip stack devices having equal shape and external dimension to those of the undiced substrate under test is used, one or a plurality of the chip stack devices are attached and supported to an adhesive layer of the tray for chip stack devices to align the chip stack devices with positions of the respective chips of the undiced substrate under test, the tray for chip stack devices is installed in the testing unit in a similar manner to that in a test of the substrate under test, and the respective chip stack devices are tested.
摘要翻译：可以以低成本准确且有效地测试具有不同外部尺寸的多个芯片堆叠装置。本发明提供了一种芯片堆叠器件测试方法，其测试芯片堆叠器件，其通过将通过在测试单元中测试的被测衬底切割而分离的多个芯片进行配置。使用与用于芯片堆叠装置的托盘的粘合剂层相连接并支撑一个或多个芯片堆叠装置的芯片堆叠装置的托盘，其具有与待测试的未开发基板相同形状和外部尺寸的托盘装置，具有被测试的未切割基板的各个芯片的位置的芯片堆叠装置，用于芯片堆叠装置的托盘以与被测试的基板的测试类似的方式安装在测试单元中，并且各个芯片堆叠装置测试。

3. 发明授权

US07602200B2 Probe for electrical test comprising a positioning mark and probe assembly 有权
标题翻译：包括定位标记和探头组件的电气测试探头
公开(公告)号：US07602200B2
公开(公告)日：2009-10-13
申请号：US12160199
申请日：2006-03-15
申请人： Yuji Miyagi , Tetsuya Iwabuchi
发明人： Yuji Miyagi , Tetsuya Iwabuchi
IPC分类号： G01R31/02
CPC分类号： G01R1/06733 , G01R1/06727 , G01R1/06738
摘要： A probe for electrical test provided with positioning marks parallel to a plane where tips are provided and at a height position lower than the plane on a plane directed in the same direction as the plane, the positioning marks are in a predetermined positional relation to said tips. The positioning marks contain information indicating an existing direction of the tips when the positioning marks are observed from the projecting direction of the tips.
摘要翻译：一种用于电测试的探针，其具有与提供尖端的平面平行的定位标记，并且在与所述平面相同的方向指向的平面上的平面的高度位置处，所述定位标记与所述尖端成预定的位置关系。当从尖端的投影方向观察定位标记时，定位标记包含指示尖端的现有方向的信息。

4. 发明授权

US07586316B2 Probe board mounting apparatus 有权
标题翻译：探针板安装装置
公开(公告)号：US07586316B2
公开(公告)日：2009-09-08
申请号：US12039027
申请日：2008-02-28
申请人： Shinji Kuniyoshi , Hidehiro Kiyofuji , Yuji Miyagi , Kiyotoshi Miura
发明人： Shinji Kuniyoshi , Hidehiro Kiyofuji , Yuji Miyagi , Kiyotoshi Miura
IPC分类号： G01R31/02
CPC分类号： G01R1/07307
摘要： A mounting apparatus that does not compromise the strength of a probe board. The apparatus comprises a probe board spaced from a support member by a spacer. A fixed portion with a female screw hole is mounted on one surface of the probe board. A male screw member is threaded into the screw hole for the purpose of tightening the support member to the probe board at a fixed distance defined by the length of the spacer. The probe board has a support plate. Pluralities of conductive paths penetrate the support plate. A wiring plate wherein wiring paths are connected to corresponding conductive paths, and whose one surface is fixed to the support plate. The other surface is provided with probes corresponding to the wiring paths. The fixed portion includes a female screw member at an area where no conductive paths are formed.
摘要翻译：不影响探针板强度的安装装置。该装置包括通过间隔件与支撑构件间隔开的探针板。具有内螺纹孔的固定部分安装在探针板的一个表面上。外螺纹部件被拧入螺丝孔中，用于将支撑构件以间隔件的长度限定的固定距离紧固到探针板。探针板有一个支撑板。多个导电路径穿透支撑板。布线板，其中布线路径连接到相应的导电路径，并且其一个表面固定到支撑板。另一个表面设置有与布线路径相对应的探针。固定部分包括在不形成导电路径的区域处的阴螺纹构件。

5. 发明申请

US20090058440A1 PROBE ASSEMBLY, METHOD OF PRODUCING IT AND ELECTRICAL CONNECTING APPARATUS 有权
标题翻译：探头组件，生产电气连接装置的方法
公开(公告)号：US20090058440A1
公开(公告)日：2009-03-05
申请号：US11912872
申请日：2005-05-23
申请人： Kiyotoshi Miura , Hidehiro Kiyofuji , Yuji Miyagi , Shinji Kuniyoshi , Hitoshi Sato
发明人： Kiyotoshi Miura , Hidehiro Kiyofuji , Yuji Miyagi , Shinji Kuniyoshi , Hitoshi Sato
IPC分类号： G01R1/073 , G01R3/00
CPC分类号： G01R31/2889 , G01R1/07314 , Y10T29/49204
摘要： A probe assembly for use in electrical measurement of a device under test. The probe assembly comprises a plate-like probe base plate with bending deformation produced in a free state without load, and a plurality of probes formed on one face of the probe base plate to project from the face. All the tips of the probes are positioned on the same plane parallel to an imaginary reference plane of the probe base plate.
摘要翻译：用于被测设备的电测量的探针组件。探针组件包括在空载状态下产生的具有弯曲变形的板状探针基板，以及形成在探针基板的一个面上的多个探针，以从面部突出。探针的所有尖端位于平行于探针基板的虚拟参考平面的同一平面上。

6. 发明授权

US06498504B2 Wafer inspection device and wafer inspection method 失效
标题翻译：晶圆检查装置和晶圆检查方法
公开(公告)号：US06498504B2
公开(公告)日：2002-12-24
申请号：US09938662
申请日：2001-08-27
申请人： Yuji Miyagi
发明人： Yuji Miyagi
IPC分类号： G01R3102
CPC分类号： G01R1/07314 , G01R31/2831 , G01R31/31905
摘要： The wafer inspection device carries out inspection of a plurality of integrated circuits provided with a plurality of electrode pads, respectively, in a condition where the integrated circuits are formed on a wafer. The wafer inspection device is provided with a test head for outputting a test pattern from a plurality of tester pogo pins, a test board to which the tester pogo pins are connected, and a substrate. A plurality of contact pins that correspond to the tester pogo pins, respectively, and are arranged in a matrix form are provided on the test board. A plurality of first terminals, which are connected, respectively, to the plurality of electrode pads, are provided on a first main surface of the substrate. A plurality of second terminals, which comprise terminal groups for each integrated circuit, are provided on a second main surface of the substrate. The terminal groups are arranged in a matrix form, and the second terminals are connected to the contact pins for each terminal group. Furthermore, inner wiring that connects the first and second terminals is provided in the substrate.
摘要翻译：晶片检查装置在集成电路形成在晶片上的状态下分别对设置有多个电极焊盘的多个集成电路进行检查。晶圆检查装置设置有用于从多个测试器弹簧销输出测试图案的测试头，测试器弹簧销连接到的测试板和基板。分别对应于测试器弹簧销并且以矩阵形式布置的多个接触针被提供在测试板上。分别连接到多个电极焊盘的多个第一端子设置在衬底的第一主表面上。包括用于每个集成电路的端子组的多个第二端子设置在衬底的第二主表面上。端子组以矩阵形式布置，并且第二端子连接到每个端子组的接触针。此外，在基板中设置连接第一和第二端子的内部布线。

7. 发明授权

US07525329B2 Electrical connecting apparatus 有权
标题翻译：电气连接装置
公开(公告)号：US07525329B2
公开(公告)日：2009-04-28
申请号：US11929005
申请日：2007-10-30
申请人： Yuji Miyagi , Kiyotoshi Miura , Hidehiro Kiyofuji , Akihisa Akahira , Tatsuo Inoue
发明人： Yuji Miyagi , Kiyotoshi Miura , Hidehiro Kiyofuji , Akihisa Akahira , Tatsuo Inoue
IPC分类号： G01R31/02
CPC分类号： G01R31/2889 , G01R1/07378
摘要： A wiring path of a circuit board has a first vertical path portion penetrating the circuit board at its outer edge in its thickness direction and connected to a connector on one surface, a second vertical path portion penetrating the circuit board in its thickness direction and connected to the electric coupler on the other surface, and a lateral path portion connecting both vertical portions, and the second vertical path portion is formed within an arrangement area (S1) of a reinforcing plate. One connecting end portion (electric coupler side) of the wiring path of the circuit board is disposed within the arrangement area (S1) of the reinforcing plate. On the other hand, the other connecting end portion (probe side) of the wiring path of the circuit board is disposed to be dispersed in an arrangement area (S2) wider than the arrangement area (S1) of the reinforcing plate.
摘要翻译：电路板的布线路径具有第一垂直路径部分，该第一垂直路径部分沿着其厚度方向在其外边缘处穿过电路板，并且连接到一个表面上的连接器，第二垂直路径部分沿厚度方向穿透电路板，并连接到在另一个表面上的电耦合器和连接两个垂直部分的横向路径部分和第二垂直路径部分形成在加强板的布置区域（S1）内。电路板的布线路径的一个连接端部（电耦合器侧）设置在加强板的布置区域（S1）内。另一方面，电路板的布线路径的另一个连接端部（探针侧）被配置为分散在比加强板的布置区域（S1）宽的布置区域（S2）中。

8. 发明申请

US20090009201A1 Probe for Electrical Test and Probe Assembly 有权
标题翻译：电气测试和探头组装探头
公开(公告)号：US20090009201A1
公开(公告)日：2009-01-08
申请号：US12160199
申请日：2006-03-15
申请人： Yuji Miyagi , Tetsuya Iwabuchi
发明人： Yuji Miyagi , Tetsuya Iwabuchi
IPC分类号： G01R1/073
CPC分类号： G01R1/06733 , G01R1/06727 , G01R1/06738
摘要： A probe for electrical test provided with positioning marks parallel to a plane where tips are provided and at a height position lower than the plane on a plane directed in the same direction as the plane, the positioning marks are in a predetermined positional relation to said tips. The positioning marks contain information indicating an existing direction of the tips when the positioning marks are observed from the projecting direction of the tips.
摘要翻译：一种用于电测试的探针，其具有与提供尖端的平面平行的定位标记，并且在与所述平面相同的方向指向的平面上的平面的高度位置处，所述定位标记与所述尖端成预定的位置关系。当从尖端的投影方向观察定位标记时，定位标记包含指示尖端的现有方向的信息。

9. 发明申请

US20080197869A1 ELECTRICAL CONNECTING APPARATUS 审中-公开
标题翻译：电气连接装置
公开(公告)号：US20080197869A1
公开(公告)日：2008-08-21
申请号：US12025631
申请日：2008-02-04
申请人： Yuji MIYAGI , Hitoshi SATO , Kiyotoshi MIURA
发明人： Yuji MIYAGI , Hitoshi SATO , Kiyotoshi MIURA
IPC分类号： G01R1/067
CPC分类号： G01R1/44 , G01R1/07342
摘要： To restrain misregistration of tips due to change in temperature, an electrical connecting apparatus is used for connection of a tester, and electrical connection terminals of a device under test to undergo electrical test by the tester. The electrical connecting apparatus comprises a probe board having a plurality of probe lands on its underside; and a plurality of contacts having tip portions to be brought into contact with a base end portion fixed at the respective probe lands and the connection terminals of the device under test. The measure from the tip of each contact and the probe land ranges from 1.1 to 1.3 mm, and the coefficient of thermal expansion of the probe board is greater than the coefficient of thermal expansion of the device under test within the range from 1 to 2 ppm/° C.
摘要翻译：为了抑制由于温度变化引起的尖端的配准错误，使用电气连接装置来连接测试仪和被测器件的电连接端子以进行测试仪的电气测试。电气连接装置包括探针板，其底面上具有多个探测台面; 以及多个触头，其具有与固定在各探测台的基端部和被测器件的连接端子接触的尖端部。每个触点尖端和探头焊盘的测量范围为1.1〜1.3mm，探针板的热膨胀系数大于被测设备的热膨胀系数在1〜2ppm的范围内 /C。

10. 发明申请

US20080122466A1 ELECTRICAL CONNECTING APPARATUS 有权
标题翻译：电气连接装置
公开(公告)号：US20080122466A1
公开(公告)日：2008-05-29
申请号：US11871765
申请日：2007-10-12
申请人： Yuji MIYAGI , Hidehiro KIYOFUJI , Akihisa AKAHIRA , Yoshinori KIKUCHI
发明人： Yuji MIYAGI , Hidehiro KIYOFUJI , Akihisa AKAHIRA , Yoshinori KIKUCHI
IPC分类号： G01R1/04 , G01R1/067 , G01R31/26
CPC分类号： G01R31/2889 , G01R31/2891
摘要： An electrical connecting apparatus comprising: a circuit board on which a reinforcing plate is mounted and a plurality of first electric connections are provided; a probe board on which second electric connections corresponding to the first electric connections are provided, with a plurality of probes electrically connected to the corresponding second electric connections; an elastic connector having plural pairs of both contacts capable of contacting the first and second electric connections corresponding to each other of both boards therebetween and receiving a biasing force in directions for both contacts to separate from each other; screw members for integrally combining them; and a spacer member for holding the probe tips substantially on the same plane by tightening of the screw members. Between the reinforcing plate and the probe board, a spacer plate is inserted for adjusting a distance from the other surface of the probe board to the probe tips.
摘要翻译：一种电连接装置，包括：电路板，其上安装有加强板，并且设置有多个第一电连接; 探针板，其上设置有与第一电连接相对应的第二电连接，多个探针电连接到对应的第二电连接; 弹性连接器，其具有能够接触彼此之间的两个电极彼此之间的第一和第二电连接的两对触点，并且在两个触点彼此分离的方向上接收偏压力; 用于整体组合它们的螺钉构件; 以及用于通过拧紧螺钉构件将探针尖端基本保持在同一平面上的间隔构件。在加强板和探针板之间，插入间隔板以调节距离探针板的另一个表面到探针尖端的距离。

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