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    • 4. 发明授权
    • Catalyst-containing photo-oxidation device, and water treatment system
of a semiconductor device fabrication line employing said device
    • 含有催化剂的光氧化装置,以及采用所述装置的半导体装置制造线的水处理系统
    • US06129845A
    • 2000-10-10
    • US167669
    • 1998-10-07
    • Sue-ryeon KimHyeon-jun KimYoun-chul OhSeung-un Kim
    • Sue-ryeon KimHyeon-jun KimYoun-chul OhSeung-un Kim
    • C02F1/44B01J19/12B01J21/06B01J35/02C02F1/20C02F1/28C02F1/32C02F1/42C02F1/72C02F9/00H01L21/304
    • C02F1/725B01J19/123C02F1/32Y10S210/90
    • A photo-oxidation device of a water treatment system photo-oxidizes organic material, in particular, aromatic organic material, in the water to facilitate its removal from the water. The photo-oxidation device includes a UV lamp, a flow channel in which the UV lamp is disposed, and a catalyst of an oxidation reaction between an organic material and the UV radiation emitted by the UV lamp. The UV radiation emitted from the UV lamp illuminates the flow channel while the water passes through the flow channel. The catalyst, on the other hand, is fixed to an inner wall of the flow channel to foster the oxidation of the organic material by the UV radiation. The water treatment system in which the photo-oxidation device is incorporated, includes a pre-treatment unit having particle filters, a first treatment section, and a second treatment section. The first treatment section has a reverse osmosis unit in which salts are removed from the water, a gas treatment unit in which gases are removed form the water, a first one of the photo-oxidation devices, and an ion-exchange unit in which ions are removed from the water. The second treatment section has a second photo-oxidation device, a second ion-exchange unit, and a particle-removing filter.
    • 水处理系统的光氧化装置在水中光氧化有机材料,特别是芳族有机材料,以便于其从水中除去。 光氧化装置包括UV灯,其中设置有UV灯的流动通道,以及有机材料与由UV灯发射的UV辐射之间的氧化反应的催化剂。 从UV灯发射的紫外线辐射照射流道,同时水通过流道。 另一方面,催化剂被固定到流动通道的内壁,以通过UV辐射促进有机材料的氧化。 包含光氧化装置的水处理系统包括具有颗粒过滤器的预处理单元,第一处理部和第二处理部。 第一处理部具有反渗透单元,其中从水中除去盐,从水中除去气体的气体处理单元,第一个光氧化装置,以及离子交换单元,其中离子 从水中取出。 第二处理部分具有第二光氧化装置,第二离子交换单元和颗粒除去过滤器。