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    • 1. 发明申请
    • PROCESS FOR PRODUCING SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRATE FOR SOLAR APPLICATION AND ETCHING SOLUTION
    • 用于生产半导体基板的工艺,用于太阳能应用和蚀刻解决方案的半导体基板
    • US20090166780A1
    • 2009-07-02
    • US12394402
    • 2009-02-27
    • Masato TsuchiyaIkuo MashimoYoshimichi Kimura
    • Masato TsuchiyaIkuo MashimoYoshimichi Kimura
    • H01L31/0236H01L21/306
    • C30B33/10H01L31/02363H01L31/18Y02E10/50
    • Provided is: a process for producing safely at low cost a semiconductor substrate excellent in photoelectric transduction efficiency, in which a fine uneven structure suitable for a solar cell can be formed uniformly with desired size on the surface of the semiconductor substrate; a semiconductor substrate for solar application in which a uniform and fine pyramid-shaped uneven structure is provided uniformly within the surface thereof, and an etching solution for forming a semiconductor substrate having a uniform and fine uneven structure. A semiconductor substrate is etched with the use of an alkali etching solution containing at least one kind selected from the group consisting of carboxylic acids having a carbon number of 1 to 12 and having at least one carboxyl group in a molecule, and salts thereof, to thereby form an uneven structure on the surface of the semiconductor substrate.
    • 提供:以低成本安全地制造具有优异的光电转换效率的半导体衬底的方法,其中可以在半导体衬底的表面上均匀地形成适合于太阳能电池的精细不均匀结构以期望的尺寸; 用于太阳能应用的半导体衬底,其均匀且精细的棱锥形不均匀结构在其表面内均匀地提供,以及用于形成具有均匀和细微不均匀结构的半导体衬底的蚀刻溶液。 使用碱性蚀刻溶液蚀刻半导体衬底,所述碱蚀刻溶液含有选自碳数为1至12的羧酸和分子中至少一个羧基的羧酸及其盐,至少一种, 从而在半导体衬底的表面上形成不均匀的结构。
    • 4. 发明申请
    • PROCESS FOR PRODUCING POLYCRYSTALLINE SILICON INGOT
    • 生产多晶硅硅胶的方法
    • US20090139446A1
    • 2009-06-04
    • US11719675
    • 2005-11-30
    • Yoshimichi KimuraYuichi Sakai
    • Yoshimichi KimuraYuichi Sakai
    • C30B9/00
    • C30B29/06C30B11/002C30B11/003
    • Provided is a process in which a polycrystalline silicon ingot improved in life time characteristics, which are correlated with the conversion efficiency of solar wafers, is inexpensively produced by the ordinary-pressure hydrogen-atmosphere melting method. In the process, the generation of oxygen and impurities in the silicon melt is inhibited and light-element impurities are removed through reaction or crystallization. Fine crystal grains can be grown at a high rate, and a high-purity polycrystalline silicon ingot having a crystal structure reduced in crystal defect can be grown.A silicon raw material is melted in an atmosphere of 100% hydrogen at ordinary pressure or an elevated pressure to prepare a silicon melt and simultaneously dissolve hydrogen in the silicon melt. The silicon melt containing hydrogen dissolved therein is solidified. Thereafter, the solid is held at a high temperature around the solidification temperature to grow silicon crystal grains in the solid phase and thereby obtain a polycrystalline silicon ingot.
    • 提供了通过普通氢气氛围熔化法廉价地生产与太阳能晶片的转换效率相关的寿命特性提高的多晶硅锭的方法。 在此过程中,硅熔体中氧和杂质的产生被抑制,轻元素杂质通过反应或结晶除去。 可以高速生长细晶粒,并且可以生长晶体结构减小晶体缺陷的高纯度多晶硅锭。 硅原料在常压或高压下在100%氢气气氛中熔融以制备硅熔体并同时将氢溶解在硅熔体中。 含有溶解在其中的氢的硅熔体固化。 然后,将固体保持在固化温度附近的高温下,使固相中的硅晶粒生长,得到多晶硅锭。
    • 5. 发明申请
    • PROCESS FOR PRODUCING SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRATE FOR SOLAR APPLICATION AND ETCHING SOLUTION
    • 用于生产半导体基板的工艺,用于太阳能应用和蚀刻解决方案的半导体基板
    • US20090266414A1
    • 2009-10-29
    • US12296648
    • 2007-04-20
    • Masato TsuchiyaIkuo MashimoYoshimichi Kimura
    • Masato TsuchiyaIkuo MashimoYoshimichi Kimura
    • H01L31/04H01L21/465H01L31/18C09K13/00
    • H01L31/18H01L31/02363Y02E10/50
    • Provided are: a process for producing safely at low cost a semiconductor substrate excellent in photoelectric conversion efficiency, and stable in an etching rate and a pyramid shape, which is capable of uniformly forming a fine uneven structure with desired size suitable for a solar cell on the surface thereof; a semiconductor substrate for solar application having a uniform and fine pyramid-shaped uneven structure in a plane; and an etching solution for forming a semiconductor substrate having a uniform and fine uneven structure, which has a high stability at initial use. The process comprises etching a semiconductor substrate with the use of an alkaline etching solution containing at least one kind selected from the group consisting of carboxylic acids having a carbon number of 1 to 12 and having at least one carboxyl group in a molecule, salts thereof, and silicon, to thereby form an uneven structure on the surface of the semiconductor substrate.
    • 提供:以低成本安全地生产光电转换效率优异的半导体基板,蚀刻速度和金字塔形状稳定的方法,其能够均匀地形成具有适合于太阳能电池的所需尺寸的精细不均匀结构 其表面; 一种用于太阳能应用的半导体衬底,其在平面中具有均匀且精细的棱锥形不均匀结构; 以及用于形成具有均匀且精细不均匀结构的半导体衬底的蚀刻溶液,其在初始使用时具有高稳定性。 该方法包括使用含有选自碳数为1至12的羧酸和分子中至少一个羧基的羧酸中的至少一种的碱性蚀刻溶液蚀刻半导体衬底,其盐, 和硅,从而在半导体衬底的表面上形成不均匀的结构。