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    • 9. 发明授权
    • Optical measurement system for determination of an object's profile or
thickness
    • 用于确定物体轮廓或厚度的光学测量系统
    • US5351126A
    • 1994-09-27
    • US967601
    • 1992-10-28
    • Yuji TakadaHiroshi MatsudaToshiki YamaneYoshihiko Sugimoto
    • Yuji TakadaHiroshi MatsudaToshiki YamaneYoshihiko Sugimoto
    • G01B11/06G01B11/24
    • G01B11/0608G01B11/06
    • An optical measurement system for determination of a profile or thickness of an object includes first and second optical heads directing first and second light beams, respectively on first and second points on the surface of the object. Photo-sensors are included respectively in the first and second optical heads for receiving reflected lights from said first and second points and providing first and second outputs which varies in proportion to perpendicular distances from a reference plane to said first and second points on the object's surface. The first and second outputs are transmitted selectively to a single processing circuit through a switch. The processing circuit operates to process the first and second outputs in sequence to measure by triangulation the perpendicular distance of the first and second points from the reference plane and to analyze a surface or thickness of the object based upon thus measured perpendicular distances. With the use of the single processing circuit, the first and second outputs can be processed in the identical conditions to enable reliable determination of the perpendicular distances of the first and second points from the reference plane and therefore accurate analysis of the surface profile or the thickness of the object.
    • 用于确定物体的轮廓或厚度的光学测量系统包括分别在物体表面上的第一和第二点上引导第一和第二光束的第一和第二光学头。 光传感器分别包括在第一和第二光学头中,用于接收来自所述第一和第二点的反射光,并且提供第一和第二输出,其与从参考平面到物体表面上的所述第一和第二点的垂直距离成比例地变化 。 第一和第二输出通过开关选择性地发送到单个处理电路。 处理电路进行操作以依次对第一和第二输出进行处理,以通过三角测量第一和第二点与参考平面的垂直距离进行测量,并且基于这样测得的垂直距离来分析物体的表面或厚度。 通过使用单个处理电路,可以在相同的条件下处理第一和第二输出,以便能够可靠地确定第一和第二点与参考平面的垂直距离,从而准确地分析表面轮廓或厚度 的对象。