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1. 发明授权

US08884520B2 Impedance matching apparatus 有权
标题翻译：阻抗匹配装置
公开(公告)号：US08884520B2
公开(公告)日：2014-11-11
申请号：US13571167
申请日：2012-08-09
申请人： Jae Hyun Kim , Sang Won Lee , Yong Gwan Lee
发明人： Jae Hyun Kim , Sang Won Lee , Yong Gwan Lee
IPC分类号： H01J19/78 , H05H1/46 , H03H7/40 , H01J37/32
CPC分类号： H05H1/46 , H01J37/32091 , H01J37/32183 , H03H7/40 , H05H2001/4682
摘要： Provided is an impedance matching apparatus for matching impedance to a plasma load. The impedance matching apparatus includes a first frequency impedance matching circuit unit that transfers an output of a first frequency RF power source unit, operating at a first frequency, to the plasma load; and a second frequency impedance matching circuit unit that transfers an output of a second frequency RF power source unit, operating at a second frequency higher than the first frequency, to the plasma load. The first frequency impedance matching circuit unit includes a T-type matching circuit, and the second frequency impedance matching circuit unit includes a standard L-type matching circuit or Π-type matching circuit.
摘要翻译：提供了一种用于将阻抗匹配到等离子体负载的阻抗匹配装置。阻抗匹配装置包括第一频率阻抗匹配电路单元，其将以第一频率工作的第一频率RF电源单元的输出传送到等离子体负载; 以及第二频率阻抗匹配电路单元，其将以比第一频率高的第二频率工作的第二频率RF电源单元的输出传送到等离子体负载。第一频率阻抗匹配电路单元包括T型匹配电路，第二频率阻抗匹配电路单元包括标准L型匹配电路或“P”型匹配电路。

2. 发明授权

US08466623B2 Impedance matching methods and systems performing the same 有权
标题翻译：阻抗匹配方法和系统执行相同
公开(公告)号：US08466623B2
公开(公告)日：2013-06-18
申请号：US13243398
申请日：2011-09-23
申请人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
发明人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
IPC分类号： H01J7/24 , H03H7/38
CPC分类号： H03H7/40
摘要： Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line including the matching system and the load; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system by using the control parameter. The extracting of the control parameter comprises utilizing an analytic coordinate system that quantitatively relates the electrical characteristic of the matching system to the electrical characteristic of the power transmission line.
摘要翻译：提供阻抗匹配方法和执行该阻抗匹配方法的匹配系统。该方法包括：测量包括匹配系统和负载的输电线路的电气特性; 从电力传输线的电气特性中提取阻抗匹配的控制参数; 并通过使用控制参数来控制匹配系统。提取控制参数包括利用将匹配系统的电特性定量地与输电线的电气特性相关联的分析坐标系。

3. 发明申请

US20080258836A1 Impedance matching methods and systems performing the same 有权
标题翻译：阻抗匹配方法和系统执行相同
公开(公告)号：US20080258836A1
公开(公告)日：2008-10-23
申请号：US12072991
申请日：2008-02-29
申请人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
发明人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
IPC分类号： H03H7/40
CPC分类号： H03H7/40
摘要： Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line including the matching system and the load; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system by using the control parameter. The extracting of the control parameter comprises utilizing an analytic coordinate system that quantitatively relates the electrical characteristic of the matching system to the electrical characteristic of the power transmission line.
摘要翻译：提供阻抗匹配方法和执行该阻抗匹配方法的匹配系统。该方法包括：测量包括匹配系统和负载的输电线路的电气特性; 从电力传输线的电气特性中提取阻抗匹配的控制参数; 并通过使用控制参数来控制匹配系统。提取控制参数包括利用将匹配系统的电特性定量地与输电线的电气特性相关联的分析坐标系。

4. 发明申请

US20090066438A1 IMPEDANCE MATCHING METHODS AND SYSTEMS PERFORMING THE SAME 有权
标题翻译：阻抗匹配方法和系统执行相同
公开(公告)号：US20090066438A1
公开(公告)日：2009-03-12
申请号：US12270431
申请日：2008-11-13
申请人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
发明人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
IPC分类号： H03H7/38
CPC分类号： H03H7/40
摘要： Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line; determining a pulse mode of the power source; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system through the control parameter, wherein the matching system is controlled differently according to the pulse mode.
摘要翻译：提供阻抗匹配方法和执行该阻抗匹配方法的匹配系统。该方法包括：测量输电线路的电气特性; 确定电源的脉冲模式; 从电力传输线的电气特性中提取阻抗匹配的控制参数; 以及通过所述控制参数来控制所述匹配系统，其中所述匹配系统根据所述脉冲模式被不同地控制。

5. 发明申请

US20120306367A1 IMPEDANCE MATCHING APPARATUS 有权
标题翻译：阻抗匹配装置
公开(公告)号：US20120306367A1
公开(公告)日：2012-12-06
申请号：US13571167
申请日：2012-08-09
申请人： Jae Hyun Kim , Sang Won Lee , Yong Gwan Lee
发明人： Jae Hyun Kim , Sang Won Lee , Yong Gwan Lee
IPC分类号： H01J19/78
CPC分类号： H05H1/46 , H01J37/32091 , H01J37/32183 , H03H7/40 , H05H2001/4682
摘要： Provided is an impedance matching apparatus for matching impedance to a plasma load. The impedance matching apparatus includes a first frequency impedance matching circuit unit that transfers an output of a first frequency RF power source unit, operating at a first frequency, to the plasma load; and a second frequency impedance matching circuit unit that transfers an output of a second frequency RF power source unit, operating at a second frequency higher than the first frequency, to the plasma load. The first frequency impedance matching circuit unit includes a T-type matching circuit, and the second frequency impedance matching circuit unit includes a standard L-type matching circuit or Π-type matching circuit.
摘要翻译：提供了一种用于将阻抗匹配到等离子体负载的阻抗匹配装置。阻抗匹配装置包括第一频率阻抗匹配电路单元，其将以第一频率工作的第一频率RF电源单元的输出传送到等离子体负载; 以及第二频率阻抗匹配电路单元，其将以比第一频率高的第二频率工作的第二频率RF电源单元的输出传送到等离子体负载。第一频率阻抗匹配电路单元包括T型匹配电路，第二频率阻抗匹配电路单元包括标准L型匹配电路或“P”型匹配电路。

6. 发明授权

US08053991B2 Impedance matching methods and systems performing the same 有权
标题翻译：阻抗匹配方法和系统执行相同
公开(公告)号：US08053991B2
公开(公告)日：2011-11-08
申请号：US12072991
申请日：2008-02-29
申请人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
发明人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
IPC分类号： H01J7/24
CPC分类号： H03H7/40
摘要： Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line including the matching system and the load; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system by using the control parameter. The extracting of the control parameter comprises utilizing an analytic coordinate system that quantitatively relates the electrical characteristic of the matching system to the electrical characteristic of the power transmission line.
摘要翻译：提供阻抗匹配方法和执行该阻抗匹配方法的匹配系统。该方法包括：测量包括匹配系统和负载的输电线路的电气特性; 从电力传输线的电气特性中提取阻抗匹配的控制参数; 并通过使用控制参数来控制匹配系统。提取控制参数包括利用将匹配系统的电特性定量地与输电线的电气特性相关联的分析坐标系。

7. 发明授权

US08120259B2 Impedance matching methods and systems performing the same 有权
标题翻译：阻抗匹配方法和系统执行相同
公开(公告)号：US08120259B2
公开(公告)日：2012-02-21
申请号：US12270431
申请日：2008-11-13
申请人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
发明人： Jae-Hyun Kim , Sang-Won Lee , Yong-Gwan Lee
IPC分类号： H01J7/24 , H03H7/38
CPC分类号： H03H7/40
摘要： Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line; determining a pulse mode of the power source; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system through the control parameter, wherein the matching system is controlled differently according to the pulse mode.
摘要翻译：提供阻抗匹配方法和执行该阻抗匹配方法的匹配系统。该方法包括：测量输电线路的电气特性; 确定电源的脉冲模式; 从电力传输线的电气特性中提取阻抗匹配的控制参数; 以及通过所述控制参数来控制所述匹配系统，其中所述匹配系统根据所述脉冲模式被不同地控制。

8. 发明申请

US20120013416A1 IMPEDANCE MATCHING METHODS AND SYSTEMS PERFORMING THE SAME 有权
标题翻译：阻抗匹配方法和系统执行相同
公开(公告)号：US20120013416A1
公开(公告)日：2012-01-19
申请号：US13243398
申请日：2011-09-23
申请人： JAE-HYUN KIM , Sang-Won Lee , Yong-Gwan Lee
发明人： JAE-HYUN KIM , Sang-Won Lee , Yong-Gwan Lee
IPC分类号： H03H7/40
CPC分类号： H03H7/40
摘要： Provided are an impedance matching method and a matching system performing the same. The method includes: measuring an electrical characteristic of the power transmission line including the matching system and the load; extracting a control parameter for impedance matching from the electrical characteristic of the power transmission line; and controlling the matching system by using the control parameter. The extracting of the control parameter comprises utilizing an analytic coordinate system that quantitatively relates the electrical characteristic of the matching system to the electrical characteristic of the power transmission line.
摘要翻译：提供阻抗匹配方法和执行该阻抗匹配方法的匹配系统。该方法包括：测量包括匹配系统和负载的输电线路的电气特性; 从电力传输线的电气特性中提取阻抗匹配的控制参数; 并通过使用控制参数来控制匹配系统。提取控制参数包括利用将匹配系统的电特性定量地与输电线的电气特性相关联的分析坐标系。

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