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    • 8. 发明授权
    • Method and apparatus for stabilizing aluminum metal layers in aluminum
electrolytic cells
    • 用于稳定铝电解槽中的铝金属层的方法和装置
    • US4425200A
    • 1984-01-10
    • US309066
    • 1981-10-06
    • Yoji Arita
    • Yoji Arita
    • C25C3/16C25C3/06C25C3/08C25C3/20
    • C25C3/08C25C3/06
    • In an aluminum electrolytic cell in which alumina is electrolyzed by electric current flowing between an anode electrode and a cathode electrode, ferromagnetic rods are disposed on the anode electrode in parallel with a shorter end wall of the cell. The ferromagnetic rod is magnetized by a horizontal component of a magnetic field created in the cell by the current to produce a magnetic field containing a vertical component that decreases a gradient of a vertical component of the magnetic field created by the current. The magnetic member may be disposed above or below an aluminum metal layer or above the anode electrode. In the last mentioned case, a ferromagnetic bar may be wound about an anode supporting rod to form a coil having opposite terminals extending in the horizontal direction.
    • 在氧化铝通过在阳极电极和阴极之间流动的电流进行电解的铝电解槽中,铁电棒与电池的较短端壁平行地设置在阳极电极上。 铁磁棒通过电流在电池中产生的磁场的水平分量来磁化,以产生包含降低由电流产生的磁场的垂直分量的梯度的垂直分量的磁场。 磁性构件可以设置在铝金属层的上方或下方或者阳极电极上方。 在最后提到的情况下,可以在阳极支撑杆周围缠绕铁磁棒,以形成具有在水平方向上延伸的相对端子的线圈。
    • 10. 发明授权
    • Magnetron sputtering apparatus
    • 磁控溅射装置
    • US4964968A
    • 1990-10-23
    • US321210
    • 1989-03-09
    • Yoji Arita
    • Yoji Arita
    • C23C14/35H01J37/34
    • H01J37/347C23C14/35H01J37/3408H01J37/3452H01J37/3458
    • A magnetron sputtering apparatus has a target disposed above an inner magnetic pole surrounded by an outer magnetic pole of opposite polarity and a gradient adjusting means mounted underneath the target and interposed between the inner and outer magnetic poles. The gradient adjusting means operates such that the gradient of the component of the leakage magnetic field vertical to the target is reduced over the middle portion of the target, between the inner and outer magnetic poles, and is increased at portions closer to the magnetic poles. The gradient adjusting means may be made of a soft magnetic material or a permanent magnet material, and the soft magnetic material may be used alone or in combination with the permanent magnet material. A second permanent magnet may be used in conjunction with the use of a permanent magnet as the gradient adjusting means. The magnetron sputtering apparatus prevents localized erosion of the target, thus making the area of erosion on the target more uniform, prolonging the life of the target, and providing for more even sputtered films.
    • 磁控管溅射装置具有设置在由相反极性的外磁极围绕的内磁极上方的靶和安装在靶下方并插入在内磁极与外磁极之间的梯度调节装置。 梯度调整装置的操作使得垂直于目标的泄漏磁场的分量的梯度在目标的中间部分之间在内部和外部磁极之间减小,并且在更靠近磁极的部分处增加。 梯度调节装置可以由软磁材料或永磁材料制成,并且软磁材料可以单独使用或与永久磁铁材料组合使用。 结合使用永磁体作为梯度调节装置,可以使用第二永久磁铁。 磁控溅射装置防止靶材的局部侵蚀,从而使目标上的侵蚀面积更均匀,延长靶材的寿命,并提供更均匀的溅射膜。