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1. 发明授权

US4425146A Method of making glass waveguide for optical circuit 失效
标题翻译：制造光路的玻璃波导的方法
公开(公告)号：US4425146A
公开(公告)日：1984-01-10
申请号：US213069
申请日：1980-12-04
申请人： Tatsuo Izawa , Hidefumi Mori , Nobuo Shimizu , Yasuji Murakami
发明人： Tatsuo Izawa , Hidefumi Mori , Nobuo Shimizu , Yasuji Murakami
IPC分类号： C03C15/00 , C03C17/02 , C03C17/34 , G02B6/136 , C03B19/00
CPC分类号： C03C17/3411 , C03C15/00 , C03C17/02 , G02B6/136 , C03C2217/42 , Y10S65/16
摘要： Halides of Si and Ti, B, P, or Ge and oxygen or steam are introduced into a reaction vessel and heated in a vapor phase to form fine glass particles by oxidation or hydrolysis. The fine glass particles are deposited on a substrate. The deposited fine glass particles are heated and vitrified into a transparent glass layer, which is etched to form a core having a desired pattern by a reactive sputter etching process using Freon gas. The core is coated by a clad. In a waveguide thus formed, the cross sectional configuration and dimensions of the core layer and the refractive index difference are precisely controlled. The waveguide is manufactured with good reproducibility. The fabrication method is suitable for mass production of waveguides. An expansion coefficient transient layer is provided between the core layer and the substrate to prevent a crack in the waveguide. The glass softening temperature of the cladding layer is set lower than that of the core layer, so that the cross sectional configuration and dimensions of the core layer is unchanged against the heat in the vitrification process of the cladding layer. The refractive index is reduced in the vicinity of the boundary between the core and clad to prevent the loss of light due to light scattering on the core side faces.
摘要翻译：将Si和Ti，B，P或Ge和氧气或蒸汽的卤化物引入反应容器中并在汽相中加热以通过氧化或水解形成细玻璃颗粒。细玻璃颗粒沉积在基底上。将沉积的细玻璃颗粒加热并玻璃化成透明玻璃层，其通过使用氟利昂气体的反应溅射蚀刻工艺被蚀刻以形成具有所需图案的芯。芯由涂层涂覆。在如此形成的波导中，芯层的横截面形状和尺寸以及折射率差被精确地控制。制造的波导具有良好的再现性。该制造方法适用于大规模生产波导。在芯层和衬底之间提供膨胀系数瞬变层以防止波导中的裂纹。包覆层的玻璃软化温度设定为低于芯层的玻璃软化温度，使得芯层的截面形状和尺寸相对于包覆层的玻璃化过程中的热量而变化。在芯和包层之间的边界附近，折射率降低，以防止由于芯侧面上的光散射引起的光的损失。

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