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    • 3. 发明授权
    • Photosensitive composition remover
    • 感光组合物去除剂
    • US08153357B2
    • 2012-04-10
    • US10582787
    • 2004-12-14
    • Masato KanedaYasuhiro MikawaKoji ShimizuKouichi Terao
    • Masato KanedaYasuhiro MikawaKoji ShimizuKouichi Terao
    • G03F7/30G03F7/32C11D7/50
    • G03F7/168G03F7/0007G03F7/325
    • A photosensitive composition remover used for removal of an uncured photosensitive composition, which remover comprises 1 to 80 percent by mass of at least one type of aromatic hydrocarbon having 9 carbon atoms or more within the molecule. The photosensitive composition remover further comprises an aprotic polar solvent and/or another solvent other than aprotic polar solvents. The photosensitive composition remover is effective for removal of an uncured photosensitive composition film deposited at the periphery, edges, or back of a substrate or removal of an uncured photosensitive composition deposited at the surface of system members or equipment in a process for forming a photosensitive composition film on a glass substrate, a semiconductor wafer, or the like. It is preferably used for removal of a photosensitive composition containing a pigment.
    • 用于除去未固化的光敏组合物的光敏组合物去除剂,该除去剂包含1至80质量%的至少一种在分子内具有9个或更多个碳原子的芳族烃。 光敏组合物去除剂还包含非质子极性溶剂和/或非质子极性溶剂以外的其它溶剂。 光敏组合物去除剂对于去除沉积在基材的周边,边缘或背面的未固化光敏组合物薄膜或去除沉积在系统构件或设备的表面上的未固化光敏组合物在用于形成光敏组合物的方法中是有效的 玻璃基板上的薄膜,半导体晶片等。 优选用于除去含有颜料的感光性组合物。
    • 5. 发明授权
    • Method for removing an uncured photosensitive composition
    • 去除未固化的光敏组合物的方法
    • US08431333B2
    • 2013-04-30
    • US13243090
    • 2011-09-23
    • Masato KanedaYasuhiro MikawaKoji ShimizuKouichi Terao
    • Masato KanedaYasuhiro MikawaKoji ShimizuKouichi Terao
    • G03F7/30G03F7/32B08B3/00
    • G03F7/168G03F7/0007G03F7/325
    • A photosensitive composition remover used for removal of an uncured photosensitive composition, which remover includes 1 to 80 percent by mass of at least one type of aromatic hydrocarbon having 9 carbon atoms or more within the molecule. The photosensitive composition remover further includes an aprotic polar solvent and/or another solvent other than aprotic polar solvents. The photosensitive composition remover is effective for removal of an uncured photosensitive composition film deposited at the periphery, edges, or back of a substrate or removal of an uncured photosensitive composition deposited at the surface of system members or equipment in a process for forming a photosensitive composition film on a glass substrate, a semiconductor wafer, or the like.
    • 用于去除未固化的光敏组合物的光敏组合物去除剂,该去除剂包括1至80质量%的至少一种在分子内具有9个或更多碳原子的芳族烃。 光敏组合物去除剂还包括非质子极性溶剂和/或非质子极性溶剂以外的其它溶剂。 光敏组合物去除剂对于去除沉积在基材的周边,边缘或背面的未固化光敏组合物薄膜或去除沉积在系统构件或设备的表面上的未固化光敏组合物在用于形成光敏组合物的方法中是有效的 玻璃基板上的薄膜,半导体晶片等。
    • 6. 发明申请
    • Photosensitive composition remover
    • 感光组合物去除剂
    • US20070161530A1
    • 2007-07-12
    • US10582787
    • 2004-12-14
    • Masato KanedaYasuhiro MikawaKoji Shimizu
    • Masato KanedaYasuhiro MikawaKoji Shimizu
    • G03F7/42
    • G03F7/168G03F7/0007G03F7/325
    • A photosensitive composition remover used for removal of an uncured photosensitive composition, which remover comprises 1 to 80 percent by mass of at least one type of aromatic hydrocarbon having 9 carbon atoms or more within the molecule. The photosensitive composition remover further comprises an aprotic polar solvent and/or another solvent other than aprotic polar solvents. The photosensitive composition remover is effective for removal of an uncured photosensitive composition film deposited at the periphery, edges, or back of a substrate or removal of an uncured photosensitive composition deposited at the surface of system members or equipment in a process for forming a photosensitive composition film on a glass substrate, a semiconductor wafer, or the like. It is preferably used for removal of a photosensitive composition containing a pigment in a process for forming a photosensitive composition film on a substrate in the process of production of a liquid crystal or an organic EL display.
    • 用于除去未固化的光敏组合物的光敏组合物去除剂,该除去剂包含1至80质量%的至少一种在分子内具有9个或更多个碳原子的芳族烃。 光敏组合物去除剂还包含非质子极性溶剂和/或非质子极性溶剂以外的其它溶剂。 光敏组合物去除剂对于去除沉积在基材的周边,边缘或背面的未固化光敏组合物薄膜或去除沉积在系统构件或设备的表面上的未固化光敏组合物在用于形成光敏组合物的方法中是有效的 玻璃基板上的薄膜,半导体晶片等。 在制造液晶或有机EL显示器的过程中,优选用于在基材上形成感光性组合物膜的方法中除去含有颜料的感光性组合物。