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1. 发明授权

US08735855B2 Ion beam irradiation system and ion beam irradiation method 有权
标题翻译：离子束照射系统和离子束照射方法
公开(公告)号：US08735855B2
公开(公告)日：2014-05-27
申请号：US13154913
申请日：2011-06-07
申请人： Shiro Ninomiya , Toshio Yumiyama , Yasuhiko Kimura , Tetsuya Kudo , Akihiro Ochi
发明人： Shiro Ninomiya , Toshio Yumiyama , Yasuhiko Kimura , Tetsuya Kudo , Akihiro Ochi
IPC分类号： H01J3/26
CPC分类号： H01J37/3171 , H01J37/304 , H01J2237/24405 , H01J2237/30483 , H01J2237/31703
摘要： An ion beam irradiation method comprises calculating a scan voltage correction function with the maximum beam scan width depending on the measurement result of a beam current measurement device, calculating each of more than one scan voltage correction functions corresponding to each of scheduled beam scan widths depending on the calculated scan voltage correction functions while satisfying dose uniformity in the horizontal direction, measuring a mechanical Y-scan position during the ion implantation, changing the scan voltage correction function as a function of the measured mechanical Y-scan position so that the beam scan area becomes a D-shaped multistage beam scan area corresponding to an outer periphery of a half of the wafer to thereby reduce the beam scan width, and changing a mechanical Y-scan speed depending on the change of the measurement result of a side cup current measurement device to thereby keep the dose uniformity in the vertical direction.
摘要翻译：离子束照射方法包括根据束电流测量装置的测量结果计算具有最大光束扫描宽度的扫描电压校正函数，计算与根据预定的束扫描宽度相对应的每个扫描电压校正函数计算出的扫描电压校正功能，同时满足水平方向上的剂量均匀性，测量离子注入期间的机械Y扫描位置，根据测量的机械Y扫描位置改变扫描电压校正功能，使得束扫描区域成为与晶片的一半的外周对应的D字状的多级光束扫描区域，从而减小光束扫描宽度，并且根据侧杯电流测量的测量结果的变化来改变机械Y扫描速度从而保持在垂直方向上的剂量均匀性。

2. 发明申请

US20120252194A1 ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS 有权
标题翻译：离子植入方法和离子植入装置
公开(公告)号：US20120252194A1
公开(公告)日：2012-10-04
申请号：US13432936
申请日：2012-03-28
申请人： Shiro NINOMIYA , Akihiro Ochi , Yasuhiko Kimura , Yasuharu Okamoto , Toshio Yumiyama
发明人： Shiro NINOMIYA , Akihiro Ochi , Yasuhiko Kimura , Yasuharu Okamoto , Toshio Yumiyama
IPC分类号： H01L21/265
CPC分类号： H01J37/3171 , H01J37/3023 , H01J37/3172 , H01J2237/30483 , H01J2237/31701 , H01J2237/31706
摘要： An ion implantation method includes reciprocally scanning an ion beam, mechanically scanning a wafer in a direction perpendicular to a beam scanning direction, and implanting ions into the wafer. The wafer is divided into a plurality of implantation regions, a beam scanning speed in the beam scanning direction is set to be varied for each of the implantation regions, an ion implantation amount distribution for each of the implantation regions is controlled by changing and controlling the beam scanning speed, and the ion implantation amount for each of the implantation regions is controlled and a beam scanning frequency and a beam scanning amplitude in the control of the beam scanning speed for each of the implantation regions is made to be constant by setting a wafer mechanical scanning speed and controlling the wafer mechanical scanning speed for each of the implantation regions.
摘要翻译：离子注入方法包括：对离子束进行往复扫描，在垂直于光束扫描方向的方向上机械地扫描晶片，以及将离子注入晶片。将晶片分割为多个注入区域，对于每个注入区域，将波束扫描方向的波束扫描速度设定为变化，通过改变和控制每个注入区域的离子注入量分布来控制光束扫描速度，并且对每个注入区域的离子注入量进行控制，并且通过设置晶片来使每个注入区域的光束扫描速度控制中的光束扫描频率和光束扫描幅度保持恒定机械扫描速度并控制每个注入区域的晶片机械扫描速度。

3. 发明授权

US07213515B2 Data creating device for a printing plates 失效
标题翻译：印版数据创建装置
公开(公告)号：US07213515B2
公开(公告)日：2007-05-08
申请号：US10992476
申请日：2004-11-18
申请人： Kozo Shimokawa , Yasuhiko Kimura
发明人： Kozo Shimokawa , Yasuhiko Kimura
IPC分类号： B41C3/08
CPC分类号： B41C1/1075
摘要： A data creating device for printing plates optimizes image data for use in forming printing plates using a printing press having a feed reel for feeding printing film onto a circumference of a plate cylinder from a circumference recess formed in the plate cylinder, a rewind reel for rewinding the printing film fed from the feed reel so as to draw the printing film from the circumference of the plate cylinder, and an image forming device for forming an image on the printing film placed on the circumference of the plate cylinder. The data creating device detects a maximum position of the image data in a plate transfer direction. The data creating device deletes data downstream of the maximum position in the plate transfer direction, thereby creating optimized image data. The data creating device stores the optimized image data in a memory to be used in forming the printing plate.
摘要翻译：用于印版的数据创建装置优化使用印刷机形成印刷版的图像数据，所述印刷机具有用于从形成在印版滚筒中的圆周凹部将印刷胶片供给到印版滚筒的圆周上的馈送卷轴，用于重绕的重绕卷轴从馈送卷轴馈送以从印版滚筒的圆周拉出印刷膜的印刷膜，以及用于在放置在印版滚筒的圆周上的印刷膜上形成图像的图像形成装置。数据创建装置检测图像数据在印版传送方向上的最大位置。数据创建装置删除板传送方向上的最大位置下游的数据，从而创建优化的图像数据。数据创建装置将优化的图像数据存储在用于形成印版的存储器中。

4. 发明授权

US07138641B2 Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system 有权
标题翻译：光束偏转方法，扫描光束偏转器，离子注入法和离子注入系统
公开(公告)号：US07138641B2
公开(公告)日：2006-11-21
申请号：US11139490
申请日：2005-05-31
申请人： Hiroshi Matsushita , Mitsuaki Kabasawa , Yoshitaka Amano , Yasuhiko Kimura , Mitsukuni Tsukihara , Junichi Murakami
发明人： Hiroshi Matsushita , Mitsuaki Kabasawa , Yoshitaka Amano , Yasuhiko Kimura , Mitsukuni Tsukihara , Junichi Murakami
IPC分类号： G01N23/00 , G21K7/00 , G21G5/00
CPC分类号： H01J37/1477 , H01J37/3171
摘要： A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.
摘要翻译：用于扫描的光束偏转器执行在真空空间中具有规则轨迹的带电粒子束的偏转，从而周期性地改变带电粒子束的轨迹。光束偏转器包括一对偏转电极，其设置成面对每个内电极表面，其具有沿光束轨迹的方向延伸的对称凹部。

5. 发明申请

US20060102031A1 Data creating apparatus for a printing plate 失效
标题翻译：用于印版的数据生成装置
公开(公告)号：US20060102031A1
公开(公告)日：2006-05-18
申请号：US10992476
申请日：2004-11-18
申请人： Kozo Shimokawa , Yasuhiko Kimura
发明人： Kozo Shimokawa , Yasuhiko Kimura
IPC分类号： B41C3/08
CPC分类号： B41C1/1075
摘要： It is an object of the present invention to provide a data creating device for printing plates that optimizes image data so as to enable printing operation by using a minimum amount of a printing film. According to the present invention, there is provided a data creating device for printing plates that optimizes image data for use in forming printing plates, the data creating device being characterized in that a maximum position of the image data with respect to a plate transfer direction is detected; and data downstream to the maximum position with respect to the plate transfer direction is deleted, thereby creating optimized image data.
摘要翻译：本发明的目的是提供一种用于印版的数据创建装置，其优化图像数据，以便通过使用最少量的印刷胶片来实现打印操作。根据本发明，提供了一种用于印刷板的数据创建装置，其优化用于形成印版的图像数据，该数据创建装置的特征在于，图像数据相对于印版传送方向的最大位置为检测到并且相对于板传送方向下游到最大位置的数据被删除，从而创建优化的图像数据。

6. 发明申请

US20050012423A1 Dynamo electric machine and method of manufacturing the same 失效
标题翻译：发电机及其制造方法
公开(公告)号：US20050012423A1
公开(公告)日：2005-01-20
申请号：US10914284
申请日：2004-08-10
申请人： Takashi Yasuhara , Toshiaki Ueda , Yasuhiko Kimura , Sanshiro Obara , Suetaro Shibukawa
发明人： Takashi Yasuhara , Toshiaki Ueda , Yasuhiko Kimura , Sanshiro Obara , Suetaro Shibukawa
IPC分类号： H02K3/04 , H02K3/12 , H02K3/48 , H02K3/50 , H02K15/04 , H02K15/085 , H02K21/12 , H02K1/00
CPC分类号： H02K3/12 , Y10T29/49009 , Y10T29/49073
摘要： Each of a plurality of unit windings 41 is formed by being divided into a first winding section 42 having opened end portions and a second winding section 43, and the first winding section 42 is shaped in such a manner that a step in radial direction of a stator core 2 is formed between opposing side sections 46 and 47 and the opened end sections are bent in the crossing over direction of the winding so that open ends 443 and 444 of the opened end sections 44 oppose each other in the radial direction of the stator core 2, then the open ends 443 and 444 are connected by winding conductor pieces 431 and 432 of the second winding section to complete the unit winding 41, thereby, end sections of a stator winding are shortened and a small size dynamo electric machine is realized.
摘要翻译：多个单位绕组41分别形成为具有开口端部的第一卷绕部42和第二卷绕部43，第一卷绕部42成形为使得沿径向方向的台阶定子铁心2形成在相对的侧部46和47之间，并且开放的端部在与绕组的方向交叉的地方弯曲，使得开口端部分44的开口端443和444在定子的径向上彼此相对芯2，则开路端443,444通过第二绕组部的绕组导体片431,432连接，以完成单元绕组41，从而缩短定子绕组的端部，实现小型发电机。

7. 发明授权

US08772741B2 Ion implantation method and ion implantation apparatus 有权
标题翻译：离子注入法和离子注入装置
公开(公告)号：US08772741B2
公开(公告)日：2014-07-08
申请号：US13432936
申请日：2012-03-28
申请人： Shiro Ninomiya , Akihiro Ochi , Yasuhiko Kimura , Yasuharu Okamoto , Toshio Yumiyama
发明人： Shiro Ninomiya , Akihiro Ochi , Yasuhiko Kimura , Yasuharu Okamoto , Toshio Yumiyama
IPC分类号： H01J37/317
CPC分类号： H01J37/3171 , H01J37/3023 , H01J37/3172 , H01J2237/30483 , H01J2237/31701 , H01J2237/31706
摘要： An ion implantation method includes reciprocally scanning an ion beam, mechanically scanning a wafer in a direction perpendicular to a beam scanning direction, and implanting ions into the wafer. The wafer is divided into a plurality of implantation regions, a beam scanning speed in the beam scanning direction is set to be varied for each of the implantation regions, an ion implantation amount distribution for each of the implantation regions is controlled by changing and controlling the beam scanning speed, and the ion implantation amount for each of the implantation regions is controlled and a beam scanning frequency and a beam scanning amplitude in the control of the beam scanning speed for each of the implantation regions is made to be constant by setting a wafer mechanical scanning speed and controlling the wafer mechanical scanning speed for each of the implantation regions.
摘要翻译：离子注入方法包括：对离子束进行往复扫描，在垂直于光束扫描方向的方向上机械地扫描晶片，以及将离子注入晶片。将晶片分割为多个注入区域，对于每个注入区域，将波束扫描方向的波束扫描速度设定为变化，通过改变和控制每个注入区域的离子注入量分布来控制光束扫描速度，并且对每个注入区域的离子注入量进行控制，并且通过设置晶片来使每个注入区域的光束扫描速度控制中的光束扫描频率和光束扫描幅度保持恒定机械扫描速度并控制每个注入区域的晶片机械扫描速度。

8. 发明授权

US07417351B2 Rotary machine 失效
标题翻译：旋转机
公开(公告)号：US07417351B2
公开(公告)日：2008-08-26
申请号：US11067736
申请日：2005-03-01
申请人： Yoshimi Mori , Toshiaki Ueda , Takeshi Sakai , Yasuhiko Kimura , Shin Onose , Hiroshi Kanazawa , Masahiko Honma
发明人： Yoshimi Mori , Toshiaki Ueda , Takeshi Sakai , Yasuhiko Kimura , Shin Onose , Hiroshi Kanazawa , Masahiko Honma
IPC分类号： H02K1/00
CPC分类号： H02K3/12 , H02K3/50 , H02K2203/09
摘要： A rotary machine having a stator composed of a stator iron core having a plurality of slots formed in the direction of the rotation axis and stator windings inserted into the plurality of slots, wherein the stator windings are composed of a plurality of conductors respectively inserted into the plurality of slots in the direction of the rotation axis and the stator has a connection ring having slots into which the plurality of conductors are inserted in the direction of the rotation axis.
摘要翻译：一种旋转机械，具有定子，所述定子由定子铁心构成，所述定子铁芯具有沿所述旋转轴线的方向形成的多个槽和插入到所述多个槽中的定子绕组，其中所述定子绕组由分别插入在旋转轴线方向上的多个狭槽和定子具有连接环，该连接环具有槽，多个导体沿旋转轴线的方向插入该槽中。

9. 发明申请

US20050194857A1 Rotary machine 失效
标题翻译：旋转机
公开(公告)号：US20050194857A1
公开(公告)日：2005-09-08
申请号：US11067736
申请日：2005-03-01
申请人： Yoshimi Mori , Toshiaki Ueda , Takeshi Sakai , Yasuhiko Kimura , Shin Onose , Hiroshi Kanazawa , Masahiko Honma
发明人： Yoshimi Mori , Toshiaki Ueda , Takeshi Sakai , Yasuhiko Kimura , Shin Onose , Hiroshi Kanazawa , Masahiko Honma
IPC分类号： H02K3/04 , H02K3/12 , H02K3/28 , H02K3/38 , H02K3/46 , H02K3/50
CPC分类号： H02K3/12 , H02K3/50 , H02K2203/09
摘要： A rotary machine comprising a stator 2 composed of a stator iron core 3 having a plurality of slots formed in the direction of the rotation axis and stator windings inserted into the plurality of slots, wherein the stator windings are composed of a plurality of conductors 4 respectively inserted into the plurality of slots in the direction of the rotation axis and the stator 2 has a connection ring 1 having slots 13 into which the plurality of conductors 4 are inserted in the direction of the rotation axis.
摘要翻译：一种旋转机械，其特征在于，具有由定子铁心3构成的定子2，所述定子铁芯3具有沿着旋转轴线的方向形成的多个槽和插入到所述多个槽中的定子绕组，其中，所述定子绕组分别由多个导体4 在旋转轴线的方向插入多个槽中，定子2具有连接环1，该连接环1具有槽13，多个导体4沿旋转轴线方向插入该槽中。

10. 发明申请

US20060113490A1 Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system 有权
公开(公告)号：US20060113490A1
公开(公告)日：2006-06-01
申请号：US11139490
申请日：2005-05-31
申请人： Hiroshi Matsushita , Mitsuaki Kabasawa , Yoshitaka Amano , Yasuhiko Kimura , Mitsukuni Tsukihara , Junichi Murakami
发明人： Hiroshi Matsushita , Mitsuaki Kabasawa , Yoshitaka Amano , Yasuhiko Kimura , Mitsukuni Tsukihara , Junichi Murakami
IPC分类号： H01J37/317 , H01J37/147
CPC分类号： H01J37/1477 , H01J37/3171
摘要： A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.

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