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1. 发明申请

US20210063470A1 FUNCTIONAL PROBER CHIP 有权
公开(公告)号：US20210063470A1
公开(公告)日：2021-03-04
申请号：US17095862
申请日：2020-11-12
申请人： Xallent LLC
发明人： Kwame Amponsah
IPC分类号： G01R31/26 , G01R1/067 , H01L21/66
摘要： Systems, devices, and methods for characterizing semiconductor devices and thin film materials. The device consists of multiple probe tips that are integrated on a single substrate. The layout of the probe tips could be designed to match specific patterns on a CMOS chip or sample. The device provides for detailed studies of transport mechanisms in thin film materials and semiconductor devices.

2. 发明申请

US20220341968A1 FINE PITCH PROBE CARD 有权
公开(公告)号：US20220341968A1
公开(公告)日：2022-10-27
申请号：US17596644
申请日：2020-06-16
申请人： Xallent LLC
发明人： Kwame Amponsah , Mehmet Ozdogan , Sirui Tan
IPC分类号： G01R1/073
摘要： A probe chip consisting of multiple probes integrated on a single substrate. The layout of the probes could be designed to match specific features on the device under test. The probes are spring-loaded to allow for reversible deformation during contacting of the device under test. The probe chip provides for detailed electrical and mechanical testing of integrated circuits (IC).

3. 发明授权

US11280825B2 Functional prober chip 有权
公开(公告)号：US11280825B2
公开(公告)日：2022-03-22
申请号：US17095862
申请日：2020-11-12
申请人： Xallent LLC
发明人： Kwame Amponsah
IPC分类号： G01R31/26 , G01R1/067 , H01L21/66
摘要： Systems, devices, and methods for characterizing semiconductor devices and thin film materials. The device consists of multiple probe tips that are integrated on a single substrate. The layout of the probe tips could be designed to match specific patterns on a CMOS chip or sample. The device provides for detailed studies of transport mechanisms in thin film materials and semiconductor devices.

4. 发明授权

US11125774B2 Systems and methods for manufacturing nano-electro-mechanical-system probes 有权
公开(公告)号：US11125774B2
公开(公告)日：2021-09-21
申请号：US16751913
申请日：2020-01-24
申请人： Xallent LLC
发明人： Kwame Amponsah
IPC分类号： G01Q70/06 , G01Q60/30 , G01Q70/10 , G01Q70/14 , B41J2/165
摘要： Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

5. 发明授权

US10436814B2 Systems and methods for manufacturing nano-electro-mechanical-system probes 有权
公开(公告)号：US10436814B2
公开(公告)日：2019-10-08
申请号：US15054626
申请日：2016-02-26
申请人： Xallent, LLC
发明人： Kwame Amponsah
IPC分类号： G01Q70/06 , G01Q60/30 , G01Q70/10 , G01Q70/14
摘要： Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

6. 发明申请

US20160252546A1 Systems and Methods for Manufacturing Nano-Electro-Mechanical-System Probes 审中-公开
标题翻译：制造纳米机电系统探针的系统和方法
公开(公告)号：US20160252546A1
公开(公告)日：2016-09-01
申请号：US15054626
申请日：2016-02-26
申请人： Xallent, LLC
发明人： Kwame Amponsah
IPC分类号： G01Q70/06
CPC分类号： G01Q70/06 , G01Q60/30 , G01Q70/10 , G01Q70/14
摘要： Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.
摘要翻译：用于制造用于扫描探针显微镜的多个集成尖端探针的系统和方法。根据一个实施例，被配置为分析样品的显微镜探针，所述显微镜探针包括：可移动探针末端，包括末端探针末端; 第一致动器，其构造成沿着第一轴线移动所述可移动探针尖端; 以及检测部件，被配置为响应于所施加的信号来检测所述可移动探针尖端的运动; 其中所述可移动探针尖端包括固定到支撑层的金属层，所述终端探针端处的所述金属层的至少一部分延伸穿过所述支撑层。

7. 发明申请

US20210389346A1 SYSTEMS AND METHODS FOR MANUFACTURING NANO-ELECTRO-MECHANICAL-SYSTEM PROBES 有权
公开(公告)号：US20210389346A1
公开(公告)日：2021-12-16
申请号：US17445448
申请日：2021-08-19
申请人： Xallent LLC
发明人： Kwame Amponsah
IPC分类号： G01Q70/06 , G01Q60/30 , G01Q70/10 , G01Q70/14 , B41J2/165
摘要： Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

8. 发明授权

US10895585B2 Multiple integrated tips scanning probe microscope 有权
公开(公告)号：US10895585B2
公开(公告)日：2021-01-19
申请号：US16799221
申请日：2020-02-24
申请人： Xallent, LLC
发明人： Kwame Amponsah
IPC分类号： G01Q20/02 , G01Q60/04 , G01Q60/30 , G01Q70/06 , G01Q10/04 , G01Q20/04 , G01Q30/02
摘要： Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

9. 发明授权

US10663484B2 Multiple integrated tips scanning probe microscope with pre-alignment components 有权
公开(公告)号：US10663484B2
公开(公告)日：2020-05-26
申请号：US15896638
申请日：2018-02-14
申请人： Xallent, LLC
发明人： Kwame Amponsah
IPC分类号： G01Q60/38 , G01Q70/06 , G01Q60/30 , G01Q70/02
摘要： Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nanometer of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

10. 发明授权

US10613115B2 Multiple integrated tips scanning probe microscope 有权
公开(公告)号：US10613115B2
公开(公告)日：2020-04-07
申请号：US16219297
申请日：2018-12-13
申请人： Xallent, LLC
发明人： Kwame Amponsah
IPC分类号： G01Q20/02 , G01Q60/04 , G01Q60/30 , G01Q70/06 , G01Q10/04 , G01Q20/04 , G01Q30/02
CPC分类号： G01Q20/02 , G01Q60/04 , G01Q60/30 , G01Q70/06 , G01Q10/045 , G01Q20/04 , G01Q30/025
摘要： Device and system for characterizing samples using multiple integrated tips scanning probe microscopy. Multiple Integrated Tips (MiT) probes are comprised of two or more monolithically integrated and movable AFM tips positioned to within nm of each other, enabling unprecedented micro to nanoscale probing functionality in vacuum or ambient conditions. The tip structure is combined with capacitive comb structures offering laserless high-resolution electric-in electric-out actuation and sensing capability and novel integration with a Junction Field Effect Transistor for signal amplification and low-noise operation. This “platform-on-a-chip” approach is a paradigm shift relative to current technology based on single tips functionalized using stacks of supporting gear: lasers, nano-positioners and electronics.

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