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    • 5. 发明授权
    • Hydrogen sensor and method of manufacturing the same
    • 氢传感器及其制造方法
    • US08468872B2
    • 2013-06-25
    • US13059882
    • 2010-12-03
    • Woo Young LeeJun Min LeeEun Yeong Lee
    • Woo Young LeeJun Min LeeEun Yeong Lee
    • G01N27/04G01M3/04
    • G01N27/127G01N33/005
    • A novel method of manufacturing a hydrogen sensor is disclosed. The method includes the steps of forming a thin film made of a transition metal or an alloy thereof on a surface of an elastic substrate, and forming a plurality of nanogaps in the thin film formed on the surface of the elastic substrate by applying a tensile force to the elastic substrate. The nanogaps are formed as the thin film is stretched in a direction in which the tensile force acts while being contracted in a direction perpendicular to the direction in which the tensile force acts when the tensile force is applied, and is contracted again in the direction in which the tensile force is released while being stretched again in the direction perpendicular to the direction in which the tensile force is released when the tensile force is released.
    • 公开了制造氢传感器的新颖方法。 该方法包括以下步骤:在弹性基材的表面上形成由过渡金属或其合金制成的薄膜,并通过施加张力在所述弹性基材的表面上形成的薄膜中形成多个纳米点 到弹性基材。 当薄膜在拉伸力作用的方向上被拉伸时,形成纳米薄膜,同时在垂直于张力作用于拉伸力的方向的方向收缩,并且再次沿着 当拉伸力被释放时,张力再次沿与拉伸力释放方向垂直的方向被拉伸。