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    • 1. 发明授权
    • Thermal imager using metamaterials
    • 热成像仪使用超材料
    • US08450690B2
    • 2013-05-28
    • US13252821
    • 2011-10-04
    • Richard AverittXin ZhangHu TaoAndrew StrikwerdaWillie J. PadillaEric Shaner
    • Richard AverittXin ZhangHu TaoAndrew StrikwerdaWillie J. PadillaEric Shaner
    • G01J5/02
    • H01L27/1446G01J3/42G01J5/0853G01J5/40H01L27/14649
    • An apparatus and method are disclosed for detecting terahertz radiation at room temperature. A detecting pixel includes a sub-wavelength split-ring resonator, and is mechanically coupled to (but thermally decoupled from) a substrate via a cantilever formed from two materials that have a significant mismatch in their thermal expansion coefficients. Incident radiation causes the split-ring resonator to resonate, thereby generating heat that is transferred to the cantilever, causing the cantilever to flex. An optical readout system includes a secondary light source, such as a laser, that shines on a reflective surface on the pixel, whereby a photodiode detects the reflected light and permits calculation of a relative deflection of the pixel in the nanometer range. An exemplary detector has a noise equivalent power rating of approximately 60 pW/√Hz.
    • 公开了用于在室温下检测太赫兹辐射的装置和方法。 检测像素包括亚波长分离环谐振器,并且通过由两个材料形成的悬臂机械耦合(但是与基板热分解),所述悬臂由热膨胀系数具有显着不匹配的两种材料形成。 入射辐射导致开环谐振器谐振,从而产生传递到悬臂的热量,导致悬臂弯曲。 光学读出系统包括发光在像素上的反射表面上的诸如激光器的次级光源,由此光电二极管检测反射光并允许像素在纳米范围内的相对偏转的计算。 一个示例性的检测器具有大约60pW /√Hz的噪声等效额定功率。