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2. 发明授权

US4086491A Direct measurement of the electron beam of a scanning electron microscope 失效
标题翻译：直接测量扫描电子显微镜的电子束
公开(公告)号：US4086491A
公开(公告)日：1978-04-25
申请号：US771715
申请日：1977-02-04
申请人： William H. Vaughan
发明人： William H. Vaughan
IPC分类号： G01Q20/04 , G01Q30/04 , G01T1/29 , H01J37/244 , H01J37/28 , G01N27/00
CPC分类号： H01J37/244 , G01T1/29 , H01J37/28 , H01J2237/24475 , H01J2237/24578
摘要： Apparatus for measuring the electron beam diameter of a scanning electron croscope includes: a transducer which supports a heated wire acting as a knife edge; an electron collector; and a display. The electron beam is scanned across the knife edge to obtain a change in current density which is received by the electron collector and shown as a trace on the display. This trace is a relative measurement of electron beam diameter. The electron beam is scanned a second time with the transducer moving the heated wire abruptly during the second scan to cause a shift in the current density trace on the display. The amount of shift between the traces of the initial and second scans is a reference distance against which the relative measurement of electron beam diameter may be measured.
摘要翻译：用于测量扫描电子显微镜的电子束直径的装置包括：支撑作为刀刃的加热线的换能器; 电子收集器和显示器。电子束被扫描穿过刀刃，以获得由电子收集器接收的电流密度的变化，并在显示器上显示为痕迹。该迹线是电子束直径的相对测量。第二次扫描电子束，换能器在第二次扫描期间突然移动加热的线，导致显示屏上的电流密度迹线发生偏移。初始扫描和第二扫描的迹线之间的偏移量是可以测量电子束直径的相对测量的参考距离。

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